1

) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:

MLU

+ Stroke BA 2-BT (mm) Stroke range Model A BY D GW GY H H1 B1 C B AL BA BB BP BS BT ET GA GA1 GB GC GC1 EY 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 MLUB25 MLUB32 MLUB40 MLUB50 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37

Fieldbus system Ethernet POWERLINK compatible SI unit

BS Displays the Communication status. BE Displays the Communication error L/A1 Displays the communication status of the BUS IN side. L/A2 Displays the communication status of the BUS OUT side. ST(M)-LED LED display Content OFF The power supply for control and input is OFF. Green ON Normal operation. Diagnostic error of I/O unit is detected.

Plate Cylinder with Lock Series MLU

+ Stroke BA 2-BT (mm) Stroke range Model BY C D GW GY H H1 B AL BA BB BP BS BT ET GA GA1 GB GC GC1 EY A B1 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8

Dedicated Controller Series LC1 Uniaxial Type

Interactive input display Programming with the same language as PC software ACTUATOR & CONSTRUCTION SYSTEM L c /BS HOLD STOP CONTROLLER POWER ALARM L R UP ENT DOWN /ESC MODE Able to execute operations such as programming, test runs and parameter changes, which up until now have been performed from a PC.

Air Pilot Operated Series NVSA

Op onal pitot connction In junctlon box and laroe lapped junction box cover allow looic control tubes to bs run Into the,unction box through electricat conduiir alJ hose usd as conduit, lhus avoidlng exposd control tubes. Junclion box i9 splash-proof and o -tight.

Air Cylinder NCX2 Series Slide Unit

B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix | -2 pcs. ] s-t nc' .Auto

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

OMU0023

(a) Alphanumeric characters (capital / small letters) (b) Special characters (BS, space, TAB, comma, full stop, hyphen) (c) Line-break code (CR + LF) (3) ID When communication is established between the Card Motor controller and upper level device such as a PLC, a request will be received and a response will be sent only when the pre-set Card Motor controller ID matches with the controller

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

NCX2 seies

B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix | -2 pcs. ] s-t nc' .Auto

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

5

or less -XC27 Double clevis and double knuckle pins made of stainless steel -XC30 Rod side trunnion 140 1000 or less 1000 or less 1600 or less 160 1200 or less 1200 or less 1600 or less -XC68 Made of stainless steel (with hard chrome plated piston rod) -XC86 With rod end bracket Accessories/For details, refer to page 221.

Made to Order

1600 1000 1400 w-1 From P. 470 Standard type CA2 Double acting, Double rod Smooth cylinder w-3 From P. 198 w-1 From P. 530 Double acting, Single rod CS1 Standard type Double acting, Single rod Double acting, Single rod Standard type CS2 w-1 From P. 568 Double acting, Double rod Smooth cylinder Double acting, Single rod How to Order XC68 Standard model no.

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2

XL-OMV0002

XL-25 XL-40 XL-50 XL-63 AC90240V Ass'y XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 Ass'y 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 Ass'y XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 Ass'y 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400/130 XL-80 XL-100 XL-160 AC90240V Ass'y XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 Ass'y

XL-OMY0002

/80 1600/80 2400/130 XLD-80 XLD-100 XLD-160 AC90240V XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12

AIR CYLINDER

Maximum stroke (mm) Basic Bracket Head side flange, Foot, Single clevis Rod side flange Double clevis Bore size Center trunnion 125 1000 or less 1600 or less 140 1000 or less 1600 or less 160 1200 or less 1600 or less Caution Cylinder should be operated within the max. usable stroke. Operation at the stroke beyond the max. stroke could cause breakage of piston rod.

l

1400 or less 1600 or less Order Made Made to Order Mounting Bracket Part No.