Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Rated voltage For DC 5 24 VDC 6 12 VDC V 6 VDC Electrical entry for D, Y S 5 VDC Nil Without light/surge voltage suppressor S Z With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) R 3 VDC 50 60 For AC ( Hz) 1 100 VAC 2 200 VAC DOZ and YOZ are not available. For AC voltage valves there is no S option.

High Vacuum Angle Valve

plug connector M type plug connector 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz XLA U 5 24 VDC 6 12 VDC S type: Not available for AC.

MGP

, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5 25 53.5 37.5 11.5 M6 X 1.0 M6 X 1.0 Rc1/8 12.5 13.5 28.5 MGF WA WB Bore (mm) Q R S T U VA VB X XA XB YY YL Z 30st 30st< 100st 300st< 30st 30st< 100st 23 24 28 34 100st< 200st 200 200 200 200 200st< 300st 100st< 200st 105 105 117

CM2

13 5.5 19.5 8 M10 X 1.25 45 15 34.5 32 M26 X 1.5 26 22 41 8 10 14 46.5 24 16 7 21 11 M14 X 1.5 50 21.5 42.5 40 M32 X 2 32 Dimensions by stroke Boss-cut style (mm) (mm) Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Symbol Symbol S ZZ S ZZ S ZZ S ZZ S ZZ ZZ ZZ ZZ ZZ ZZ Bore Bore 87 141 112 166 137 191 20 20 128 153 178

V

I O N S 02 2 Stations 20 20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200) 02 Rc

240

T4 = 0.2 [s] T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] T2 = = = 0.133 [s] L 0.5 V (T1 + T3) V 40 0.5 200 (0.067 + 0.067) 200 T4 = 0.2 [s] Therefore, the cycle time can be obtained as follows.

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

CLS

: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order M9B CLS L 125 125 100 100 Without auto switch M9B CDLS Y7BW L

Smooth Cylinder/Low Speed Cylinder

mm/s 0.5 to 200 mm/s 16 20 M8 x 1.25 M14 x 1.5 M10 x 1.5 M18 x 1.5 16 M8 x 1.25 M14 x 1.5 20 M10 x 1.5 M18 x 1.5 0.03 MPa 0.025 MPa Female thread Male thread Without auto switch: 10 to 70C With auto switch: 10 to 60C Rod end thread Ambient and fluid temperature +1.0 0 mm Stroke tolerance Port size Vacuum port, Relief port Piston speed Piston rod size 1 to 200 mm/s 0.5 to 200 mm/s M5 x 0.8

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

SX

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation SX3120-C6 0 800 700 600 500 400 300 200 100

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Model T1 T2 (1) (1) (1) Max. number 16 14 16 16 14 8 8 16 16 Note 1) Due to the limitation of internal wiring.

CA2

200 CA2K CDA2K Y7BW With auto switch Number of auto switches With auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Pressure 0.5 MPa Load factor 50% Stroke 500 mm VZS Average speed (mm/s) Series VFS VS4 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VQ7 VZ514--02 (Piping: 6 x 1 m) EVS VFN AS3301F-02-06/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 8 x 1 m) AS3301F

Cylinder with Lock

] Load mass m [kg] 50 50 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] 7 CP96N/C96N Series Working Principle Model Selection Normal Operation (Operation pressurized by air) Working Principle Unlock port (Exhaust the air.)

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

300400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Weight/MY2C MY2C/m1 MY2C/m2 MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load weight Nm Load weight Nm Load weight Nm MY2C40 MY2C40 MY2C40 10 10 10 MY2C25 MY2C25 MY2C25 5 5 5 4 4 4 MY2C16 MY2C16 3 3 3 MY2C16 2 2 2 1 1 1 100 200 300 400500 1000 1500 100 200

LEY-OM007

I/O LEC-CN5-* 1) PLC 1) 2) DC24V CN5 1) LE-C*-*-* LE-C*-*S-* CN4 CN3 CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 2) 50 200 50 200 3 3 CN1 DC24V <> AWG20 (0.5mm 2) USB A-miniB type USB LEC-W2 3m LEC-T1-3JG* 1 2 UL ,UL1310 Class2 LEC 5.P.35 USB P.38 6.3 <> NPNPNP LEY16B-100 NPN 4.2 LEC -17- 1 1 2 1 1 DATA TEST DATA

10

239 264 289 125 120 130 140 150 170 190 210 230 250 270 290 310 Bore size [mm] S ZZ 32 90 141 40 90 145 50 102 164 63 102 164 80 124 200 100 124 200 125 132 235 Model without air cushion is designed to include rubber bumpers.