(Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing lock3307.924 VDC 010%

(Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing lock3307.924 VDC 010%

(Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing lock3307.924 VDC 010%

(Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing lock3307.924 VDC 010%

(Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing lock3307.924 VDC 010%

(Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing lock3307.924 VDC 010%

(Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing lock3307.924 VDC 010%

(Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing lock3307.924 VDC 010%

(Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing lock3307.924 VDC 010%

(Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing lock3307.924 VDC 010%

(Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing lock3307.924 VDC 010%

(Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing lock3307.924 VDC 010%

(Refer to page 71 for limit according to work load and duty ratio.)o0.022050/20Ball screwLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)2102302181275Non-magnetizing lock3307.924 VDC 010%

VQ4000

00-A-5 0 0 200 400 600 800 1000 1200 1400 VQ45 (Plug lead type) B ARBQ4000-00-B-5 Flow rate (l/min(ANR)) P ARBQ4000-00-P-5 ARBQ4000-00-P (P B) 0.7 Outlet pressure (MPa) 0.6 SMC 0.5 0.4 0.3 0.2 50 147 0.1 0 0 200 400 600 800 1000 1200 1400 B 2 SMC Flow rate (l/min(ANR)) 12 1 P 5 3 R2 R1 Pressure Characteristics 59 PE 4 A Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate

Free Mount Cylinder

Do not drop, bump or apply excessive impacts (300m/s2 or greater for reed switches and 1000m/s2 or greater for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

In order to maintain the particulate generation grade, use operation of 500 thousand cycles or travel distance of about 400 km as a standard. (Graph (1) below) If operation is continued beyond the recommended values, lubrication failure of the linear guide and loss of particulate generation characteristics may occur. 1.

MRQ

The unit conversion between SI and conventional units are as follows: Oscillation acceleration 100m/s2 = 10.1972G Pressure 1MPa = 10.1972kgf/cm2 Cylinder thrust/load 100N = 10.1972kgf Standard air: Symbol (ANR) Torque 1Nm = 10.1972kgfcm Temperature 20C {293K}, Air with Moment of inertia 1kgm2 = 10.1972kgcm/s2 an absolute pressure of 760 mmHg Kinetic energy 1J = 10.1972kgcm {101.3kPa}, and

Size: 40, Motor Type: S2 [AC Servo Motor (Incremental Encoder) 100W], Stroke: 400mm, Motor Option: None, Cable Type: R (Robotic, Flexible), Cable Length: 5m, Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/O Connector: H (Connector)

Size: 40, Motor Type: S2 [AC Servo Motor (Incremental Encoder) 100W], Stroke: 400mm, Motor Option: None, Cable Type: S (Standard), Cable Length: A (10m)

Size: 40, Motor Type: S2 [AC Servo Motor (Incremental Encoder) 100W], Stroke: 400mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 5m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: Connector