Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Thermo-chiller

Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon

VK3000

Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 3-2-7 Series VK3000 Base mounted (Bottom ported) Type 40 Manifold Grommet: G DIN terminal: D VV5K3-40Station -M5 ( ) ( ) ~ = L Dimension n: Stations n L 1

SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

Table of Contents

L type plug connector is used for 3 position AS.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

XM, XY

(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

CG5-S

Applicable bore size (mm) Snap ring l l A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m +0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 C type 3.2 C type 3.2 0.030 0.060 +0.048 0 0.030 0.060 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 8 25 M5 x 0.8 6.4 12 14 4.8 22.7 18.3 1.5 0.7 4.8 16.6 12.2 1.5

MLU

MLU Clevis pin and knuckle pin Rod end nut ML1C D30 d Dd9 -X d 20D C l m m t t L H B Data (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

IDX-OM-W093

IDX-OM-W093-B / Series IDF60-20-A,C,L,R,T,V IDF60-30-A,C,L,R,T,V IDF70-20-A,C,L,R,T,V IDF70-30-A,C,L,R,T,V IDF80-20-A,C,L,R,T,V IDF80-30-A,C,L,R,T,V IDF90-20-A,C,L,R,T,V IDF90-30-A,C,L,R,T,V URLhttp://www.smcworld.com/ English instruction manual can be downloaded from our URLhttp://www.smcworld.com/ SMC *1) JIS B8370 *2) ISO4414 *1) ISO4414Pneumatic fluid power Recommendations for the application

IDX-OM-W094

GWP (GWP) GWP Regulation (EU) No 517/2014 Regulation EU No 517/2014 (IPCC AR4 ) IPCC AR4 R410A 2,088 2,090 2,088 2,090 R410A 1 IDFA60/70/80/90 Series 7-2 IDX-OM-W094 7.3 Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFA60 R1 307 745 605 161 405 681 94 71 46 12.5 330 704 355 126 IDFA70 R1-1/2 342 890

IDX-OM-W032

9 L 9-1 1.1 2 2. 3

IDX-OM-W095

IDX-OM-W095-A / Series IDFC60-23-C,L,R,T,V IDFC70-23-C,L,R,T,V IDFC80-23-C,L,R,T,V IDFC90-23-C,L,R,T,V URLhttp://www.smcworld.com/ English instruction manual can be downloaded from our URLhttp://www.smcworld.com/ SMC , ISO4414 *1) JIS B8370 *2) *1) ISO4414Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B8370 URLhttp

IDX-OM-V020

IDX-OM-V020 Original Instructions PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFA60-23-A,C,L,R,T,V IDFA70-23-A,C,L,R,T,V IDFA80-23-A,C,L,R,T,V IDFA90-23-A,C,L,R,T,V This manual is intended to explain the installation and operation of the product.

IDX-OM-U010

IDX-OM-U010-H PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFC60-23-C,L,R,T,V IDFC70-23-C,L,R,T,V IDFC80-23-C,L,R,T,V IDFC90-23-C,L,R,T,V This manual is intended to explain the installation and operation of the product.

PSxx-OMM0006CN

M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1 /M8 1 L M SI2 M8 P (psi)1 1 2kPaMPa 1 ZS-24-A A M35 L,M45 L, 2 ZS-24-D D M35

51

Refer to page 372 for pivoting bracket. 371 CG3 Series Dimensions of Accessories Single Knuckle Joint Double Knuckle Joint I-G02, I-G03 Material: Carbon steel I-G04, I-G05, I-G08, I-G10 Material: Cast iron Y-G02, Y-G03 Material: Carbon steel Y-G04, Y-G05, Y-G08, Y-G10 Material: Cast iron R1 R1 ND hole H10 Axis d9 ND hole H10 Axis d9 MM MM (mm) L NZ NX L NZ NX E1 E1 Applicable bore size

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

VF1000-OMP0001

(L) M (M) DC +DIN +-1 2 (G) A C S DIN DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000 VF1000 VF3000 VF3000 VF3000 VF3000 VF5000 VF5000 VF5000 VF5000 () P P(SUP) P A B A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2)

Exhaust Cleaner for Vacuum Pump AMV Series

150 175 AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 R1 R1 1/2 R2 R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789