4/5 Port Air Operated Valve Series SYJA3000 1

port) (R1, R2 port) 5-2-28

ZSE30A(F)/ISE30A

42.5 Bracket A (Option unit part no.: ZS-38-A1) 25 20 20 45 30 2 30 34.6 19 5.2 14.7 9.6 5.2 Bracket configuration allows mounting in four orientations.

Table of Contents

Body Ported VQ140 0.73 0.84 Series VQ1000 Single/ 3 position only VQ141 1.0 0.84 P. 2-4-36 P. 2-4-30 VQ240 2.3 Series VQ2000 Single only VQ241 2.7 P. 2-4-36 P. 2-4-30 VQ170 0.60 0.58 Series VQ1000 Single/ 3 position only VQ171 0.80 0.70 P. 2-4-74 P. 2-4-72 2-4-2 3 Manifold Option Option Individual SUP/EXH Built-in silencer DIN rail mounting style Elbow fitting for cylinder port D-sub connector

PSxx-OMU0005CN

/8 NPT1/8 4 mm 5/32 inch 6 mm () PBTCB156PPSO HNBR C3604 SUS304NBR POMSUS304NBRC3604 24 g 34 g 36 g 30 g 30 g +39 g 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0005CN-C M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4LC6L 4 A B C4L 17.5 8.2 C6L 18.3 10.4 -79No.PS-OMU0005CN-C A B -80No.PS-OMU0005CN-C 0.5~7 + 0.5~7 -81No.PS-OMU0005CN-C 2 (n ) <> <> 31n +3.5(n -1) 31n +3.5(n -1

Vacuum System Peripherals:

30 e Valve Model Fill in the blanks below with symbols of necessary specifications.

SZ3000

(Manifold specifications sheets are on pages 30.)

IDX-OM-Y002

IDF240D-3-W Parts marked with square brackets are included in the package (900) 1647 (80) 770 1550 10K 100 Flange 10K 100 Compressed air inlet (730) 10K 100 Flange 10K 100 1640 Terminal block Compressed air outlet Power supply port signal connection port (36) R1 Cooling water outlet R1 Cooling water inlet R1 (273) (223) (703) C1/2 R Grommet with membrane (Lower hole 36) (467) Rc 1/2 R1

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt Model C Mounting bolt CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-

CL

A R1 Part No.

MLU

(Tolerance 30%) Hysteresis may fluctuate due to the operating environment.

IDX-OM-W094

R410A (HFC) GWP2,088 7) g 39010 53010 63010 78010 :0.1MPa) mm 12 R1 R1 1/2 R2 kg 49 68 95 110 :1 :2 1 2ANR[2065%] 3[3275%] 4 5 6R 30mA 7IPCC4 AR4 R410A GWP2090 8L V1.6MPa IDFA60/70/80/90 Series 7-1 IDX-OM-W094 oC 525 30 35 40 45 50 55 60 65 1.42 1.15 1.00 0.71 0.62 0.50 0.40 0.33 0.21 MPa 0.3 0.4 0.5 0.6 0.71.6 0.71 0.75 0.82 0.89 1.00 oC 225 30 35 40 45 1.0 0.85 0.80 0.73 0.62

IDX-OM-V020

Coefficient factors Inlet air temperature (oC) 5 to 25 30 35 40 45 50 55 60 65 1.42 1.15 1.00 0.71 0.62 0.50 0.40 0.33 0.21 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 to 1.6 0.71 0.75 0.82 0.89 1.00 Ambient temperature (oC) 2 to 25 30 35 40 45 1.0 0.85 0.80 0.73 0.62 Calculation example: The air flow capacity when the dew point of IDFA60 is set to 10 oC under the following conditions <

OMR0032

Specifications LAT3-10 Stroke 10 mm, Resolution 30 m LAT3-20 Stroke 20 mm, Resolution 30 m Card Motor 8 options LAT3-30 Stroke 30 mm, Resolution 30 m (Refer to the table Product LAT3M-50 Stroke 50 mm, Resolution 5 m Number on the right) LAT3F-10 Stroke 10 mm, Resolution 1.25 m LAT3F-20 Stroke 20 mm, Resolution 1.25 m LAT3F-30 Stroke 30 mm, Resolution 1.25 m LAT3F-50 Stroke 50 mm, Resolution

Vacuum Saving Valve

Relationship between Minimum Operating Flow and Fixed Orifice Size 50 40 M8 0.5 5.0 Connection thread size for the pad Fixed orifice size (mm) Minimum operating flow (l/min (ANR)) Q2 30 N = 6 (unit) 20 10 0 5 10 15 20 25 30 35 Q1 = 31 l/min (ANR) Suction flow (l/min (ANR)) The above selection example is based on a general method under the given selection conditions, and may not always be

A

50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

IDX-OM-U010

Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) GWP:2088 (Note6) Amount of refrigerant to be filled g 39010 53010 63010 78010 Auto drain Float type (Normally open: Min. operating pressure: 0.1MPa) Drain tube O.D. mm 12 Port size R1 R1 1/2 R2 Weight kg 49 68 95 110 Coating color Panel: White1 Base: Gray2 Note 1: The operating range does not guarantee use with normal air flow

PSxx-OMS0006CN

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

Pressure Gauge Guide

Size Symbol R1/8: M5 (Female thread) 01 R1 R 1/16 Max. display pressure Symbol 10 0.1 Unit: MPa Pressure other than 1.0 MPa is not available. 14-11-3 3 Pressure Gauge Guide Pressure Gauge for General Purpose /With limit indicator O.D.: 37 G36, GA36 Standard Specifications Model G36 GA36 Back side thread Vertical side thread Type 1 8 Port size (1) (Option M: With M5 female thread) R Air Fluid

MHY2/MHW2

(F: Thrust of one finger) Pressure 0.6MPa 0.5 40 8 0.5 Holding force (N) Holding force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Holding point L (mm) 40 0 30 40 60 70 Holding point L (mm) 50 80 F F F F MHY2-16D MHY2-25D 35 100 Pressure 0.6MPa Pressure 0.6MPa 30 0.5 0.5 80 25 External hold Holding force (N) Holding force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20