Size, Body, Valve Type: 30F (Size: 3; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: J (110VAC); DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)

Size, Body, Valve Type: 30F (Size: 3; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Bracket Interchangeable with Old Type: XB, Electrical Entry: C (270°)

Size, Body, Valve Type: 30F (Size: 3; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Bracket Interchangeable with Old Type: XB, Electrical Entry: A (90°)

Size, Body, Valve Type: 30F (Size: 3; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2C (110VAC; DIN Terminal w/Surge Voltage Suppressor & Light), Other Options: B (NPT Thread), Bracket Interchangeable with Old Type: XB

Size, Body, Valve Type: 30F (Size: 3; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1J (12VDC; DIN Terminal w/Surge Voltage Suppressor), Other Options: B (NPT Thread)

Size, Body, Valve Type: 30F (Size: 3; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1U (24VAC; Grommet w/Surge Voltage Suppressor), Other Options: E (Oil-free, NPT Thread), Bracket Interchangeable with Old Type: XB

Size, Body, Valve Type: 30F (Size: 3; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: None, Bracket Interchangeable with Old Type: XB, Electrical Entry: A (90°)

Size, Body, Valve Type: 30F (Size: 3; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: F (24VDC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: None, Bracket Interchangeable with Old Type: XB

Size, Body, Valve Type: 30F (Size: 3; Body Mat'l: Aluminum; Port Size: 3/8; Orifice Dia: 10, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: A (G Thread)

Flow Sensor Series PFMV

P1 P2 P1 P2 Vacuum source (Vacuum pump) Nozzle Nozzle Note) Since the calculated value may not meet the approximate value due to leakage and pressure loss in the piping system, please check the result by using actual equipment. 950 Flow Sensor Series PFMV5 How to Order PFMV5 05 1 Option (shipped together) Measurement flow range 05 10 30 05F 10F 30F Nil 0.0 to 0.5 l/min None With L-type bracket

76

150FS Standard Specications Item Model IDF100FS-30 IDF125FS-30 IDF150FS-30 Fluid Inlet air temperature Compressed air 41 to 140F (5 to 60C) Inlet air pressure 22 to 145 psi (0.15 to 1.0)/22 to 232 psi (0.15 to 1.6 (Option K) Ambient temperature (humidity) 36 to 113F (2 to 45F) (Relative humidity 85% or less) Operating Outlet air pressure dew point set range Note 2), Note 3) 50 to 86F (10 to 30F

CG5-S

Bore size 20 25 32 40 50 63 80 100 NBR Wiper (R option) FKM Wiper (V option) SDB-8 SDB-8F SDB-10 SDB10F SDB-12 SDB12F SDB-16 SDB-16F SDB-20 SDB-20F SDB-20 SDB-20F SDB-25 SDB-25F SDB-30 SDB-30F Replacement parts: Seal kits Note) Rubber bumper Air cushion Bore size CG5NSR CG5NSV CG5ASR CG5ASV 20 25 32 40 50 CG5N20SR-PS CG5N20SV-PS CG5A20SR-PS CG5A20SV-PS CG5N25SR-PS CG5N25SV-PS CG5A25SR-PS

Dual Speed Controller with One-touch Fitting Series ASD

32" 3/16" 1/4" 6 6, 8 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size Flow rate l/min (ANR) Controlled flow (Free flow) 500 600 700 1200 1300 175 295 350 75 {N R/min} Effective area (mm2) 7.6 9.1 10.7 18.3 19.8 2.7 4.5 1.1 5.3 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-14 Dual Speed Controller with One-touch Fitting Series ASD How to Order ASD 3 30F

JXCx-OMT0023

Driver No-fuse breaker (Note) Fuse Current Voltage AC Current Voltage AC LECSA2-S1 50A frame 5A 10A LECSA2-S3, LECSA1-S1 50A frame 10A 240V 15A 300V LECSA2-S4, LECSA2-S3 50A frame 15A 20A Note.

Metal Seal/Rubber Seal Series VQ Body Ported

No. of output points, 16 points Master station: PLC made by Mitsubishi Electric Corporation Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). No. of output points, 16 points.

Base Mounted Metal Seal/Rubber Seal Series VQ

U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 Without cable Without cable Without cable (2) (2) (2) (2) Kit Kit Kit Kit Kit Kit With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) 2 to 16 2 to 24 2 to 16 2 to 24 stations

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

Series VQ Base Mounted Metal Seal/Rubber Seal

Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). 16 outputs, 2 stations occupied. T unit Can be connected with PLC I/O card for serial transmission. EX300-TMB1For models of Mitsubishi Electric Corp. EX300-TTA1For models of OMRON Corp. EX300-TFU1For models of Fuji Electric Company Ltd.

LJ1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

Table of Contents

No. of output points, 16 points Master station: PLC made by Mitsubishi Electric Corporation Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). No. of output points, 16 points. No. of sta. occupied, 2 stations Stations are counted from station 1 on the D side.