Series: Belt Drive, Size: 32, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 800mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: LECA6 PNP, Step Data Input Type, I/O Cable Length for LEC: -, Controller Mounting: -,

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm, Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable Length:

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 500mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable Length

Body Size: 20, Motor Size: Standard, Stroke: 6mm, Motor Cable Entry: Basic, Entry on the Left Side, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5m, Controller: LECP6, Step Data Input Type, PNP, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -

Body Size: 32, Motor Size: Standard, Stroke: 22mm, Finger Option: Basic Type, Motor Cable Entry: Basic, Entry on the Left Side, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5m, Controller: LECP6, Step Data Input Type, PNP, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5, Controller: Step Data Input Type, PNP, I/O Cable Length: -, Communication Plug Connector: -, Controller Option: -

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa

TABLE OF CONTENTS

MANIFOLD MOUNTING FLANGE MOUNTING Option H Option E .350 (8.9) .340 (8.6) x .047-.052 DEEP (1.2) (1.3) 2 PLACES .350 (8.9) .340 (8.6) x .047-.052 DEEP (1.2) (1.3) 2 PLACES 9/32 (7.14) DIA. 3 HOLES EQUALLY SPACED on 2 3/8 (60.3) B.C.

SQ1000/2000

450 Station 3 Station 15 230 470 Station 4 Station 16 250 490 Station 5 Station 17 270 510 Station 6 Station 18 For double wiring SSQ1000 P 41A 350 290 530 Station 7 Station 19 310 550 Station 8 Station 20 330 570 Station 9 Station 21 350 590 Station 10 Station 22 L 370 610 Station 11 Station 23 390 630 Station 12 Station 24 410 Station 13 108 Series SQ1000/2000 How to Add Manifold Stations

Compact

250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 48 20 1000 Page 170 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 10 25 LEMH Linear guide single axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000),

Table of Contents

C With N.O. auto-drain D With drain guide (2) 150 250 350 450 550 650 850 With N.C. auto-drain J Note 1) 850 size comes with a ball valve. Note 2) Drain piping, or piping for a stop valve, like a ball valve, is required. 850 size comes with a ball valve. substitute with (Symbol: A).

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

MGP

, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Applicable auto switches Lead wire length (m) Auto switch model no.

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

SY

(Station 1) (Indicator light/Surge voltage suppressor) + + + + + Height when using DIN rail Stations n 12 385.5 375 357 14.5 343 13 410.5 400 381 15 367 11 360.5 350 333 14 319 14 435.5 425 405 15.5 391 15 460.5 450 429 16 415 16 485.5 475 453 16.5 439 17 510.5 500 477 17 463 18 535.5 525 501 17.5 487 19 560.5 550 525 18 511 20 573 562.5 549 12 535 94.2 [100.7] L1 L2 L3 L4 L5 81.8 66.8 20

Compact 5-Port Solenoid Valve

198 210.5 223 235.5 248 260.5 273 273 285.5 L4 112.5 125 137.5 150 162.5 175 187.5 200 212.5 225 237.5 250 262.5 262.5 275 L5 17.5 18 18.5 19 19.5 20 20.5 21 21.5 22 22.5 23 23.5 18 18.5 n L 17 18 19 20 21 22 23 24 L1 266.3 277.8 289.3 300.8 312.3 323.8 335.3 346.8 L2 238.6 250.1 261.6 273.1 284.6 296.1 307.6 319.1 L3 298 310.5 323 335.5 348 360.5 373 385.5 L4 287.5 300 312.5 325 337.5 350