Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 400mm

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 400mm, Motor Option: -, Rod End Thread: -, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC: -

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

ZX

flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1

Series VQ Metal Seal/Rubber Seal Body Ported

Kit/Electrical entry/Cable length F P Kit (Dsub connector) Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) Connector location Top (vertical) Side (horizontal) P .1.10-40 P .1.10-36 Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 stations Max.16 (2) Max.16 (2) F kit P kit P kit F kit With cable (1.5m) With cable (3m) With cable (5m

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 400mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 400mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 400mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 400mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: L (Left Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 400mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 400mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m)

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 400mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 400mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 400mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable Length

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm, Stroke: 400mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable Length:

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: Left Side Parallel, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 400mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 400mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: Right Side Parallel, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm, Stroke: 400mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm, Stroke: 400mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable Length: