PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.
Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel
04 VFA5244(-P) 02 03 04 VFA5144(-P) 36 (39.5) 27 (31) 36 (39.5) 27 (31) SYA 14 (15.5) 14 (15.5) SYJA 20.5 (24.5) 20.5 (24.5) VZA 92 (100) 1/8 [Pilot port: Lateral (-P)] 1/8 [Pilot port: Lateral (-P)] VFA VFA 82 (87) 51.5 (55.5) 82 (87) 5 (6.5) 51.5 (55.5) VFRA 2B 4A 2B 4A VPA4 42 (45) 52 (58) 42 (45) 52 (58) B A B A PE PE 6.5 6.5 SYJA 5EA 3EB 1P 5EA 3EB 1P 97.5 2 x M5 x 0.8 (Breathing hole
KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5
Refer to the following details of the kit. rThreaded Stud Kit for Manifold Part number Applicable model 4 stations 6 stations 8 stations 10 stations Metric size Inch size AS-1AB AS-3AB AS-5AB AS-7AB AS1002FS-23 AS1002FS-01 AS1002FS-04 AS1002FS-03 AS-4AB AS-6AB AS-8AB AS1002FS-06 AS-2AB AS-23AB AS1002FS-07 AS-9AB AS-10AB AS-11AB AS-12AB AS2002FS-04 AS2002FS-03 AS2002FS-06 AS2002FS-07 AS
Symbol S Standard dew point (C) 60 Thread type Port size Symbol Bore Size Rc NPT G Nil N F 60 75 100 03 3/8 04 1/2 Standard Specifications/Single Unit Type (Standard dew point: 60C) Model Standard dew point: 60C IDG60S IDG75S IDG100S Compressed air Fluid Range of operating conditions Inlet air pressure (MPa) IDG60S 0.3 to 1.0 Inlet air temperature (C) (1) 5 to 50 5 to 50 Ambient temperature
MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.
Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless
X Port size) Speed controller System figure System Solenoid valve SYJ7l40-01 Rc(PT)1/8 (S = 12.6mm2) AN110-01 (S = 35mm2) 4 X 1/8 AS2301F-01-04 A 02 03 AS3301F-06 6 X 1/4 B q 02 03 AS3301F-08 SYJ7l40-02 Rc(PT)1/4 (S = 12.6mm2) 8 X 1/4 C AN200-02 (S = 35mm2) 02 03 AS3301F-10 10 X 1/4 D 12 X 1/4 12 X 1/2 AS4001F-12 w E 1.2-53 Series SYJ7000 How to Order Light and surge voltage suppressor
2 3 8 3 VFA5420-03-X1 5 VFA5144-02 2 1 8 1 4 3 VFA5444-02-X1 5 Base mounted (1) VFA5144-03 2 3 8 3 VFA5444-03-X1 5 VFA5144-04 2 1 2 3 VFA5444-04-X1 5 Note 1) With sub-plate Note 2) { }: Normal position 5-3-15 8 Series VFA5000 Dimensions: Body Ported 2 position single: VFA5120-02 03 2 position double: VFA5220-02 03 (Pilot port) (Mounting hole for manifold) (Pilot port) (Mounting hole for
C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000
Pressure gauge Applicable model VAC (Vacuum pump side) SET (Pad side) AL Specifications Symbol IRV1000 IRV2000 IRV3000 L H O S C U K P SMC 01 Connection Rc 1/8 02 Standard specifications Connection Rc 1/4 03 Connection Rc 3/8 Accessory 04 Connection Rc 1/2 None With bracket With pressure gauge Nil B G B Bracket Accessory Note) G Pressure gauge R Pressure gauge reverse mounted Note) Brackets
Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/
) B Backlit LCD 01 Direct Piping 1/8 T1 NPTF 1/8 P I P I N G S P E C I F I C AT I O N S S W I T C H S P E C I F I C AT I O N S 01 Direct Piping PT 1/8 T1 NPTF 1/8 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output S W I T C H S P E C I F I C AT I O N S 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output W I R I N G S P E C I F I C AT I O N S 0.6m L Grommet entry
CS1 SGP10A x 1 m AS420-03 AN300-03 SY9120-03 Tubing bore x Length Speed controller Silencer SY7140-03 Tubing bore x Length Speed controller Silencer SY9140-04 Tubing bore x Length Speed controller Silencer SGP15A x 1 m AS420-04 AN400-04 Features 1 Valve Variations Note 1) Electrical entry Actuation Voltage Light/surge voltage suppressor 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50
Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54
R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.
AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 522 Series AS Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow characteristics are representative values.
Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)