Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRB2 L1= CRBU2 L1= Q1=M Q1=M Q1=M L1= Q1=M L1= CRB1 W1= Q1 MSU L1 Q1 Q1 Q1 L1 L1 J axis X axis L1 K axis T axis CRJ L3= L1= (mm) (mm) X= Size Size 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 CRA1 2.5 4 5 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 4 5 6.8 6.8

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Series VQ Base Mounted Metal Seal/Rubber Seal

Positive COM How to Order Manifold VV5Q 1 0 08 C6 1 N T Option Symbol Option Remarks VQ1000 VQ2000 None Check valve for prevention of back press.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3

Air Cylinder

V V U Rod trunnion V(1 pc.) Note 4) V(1 pc.) V(1 pc.) V(1 pc.) V V T Head trunnion V(1 pc.) Note 4) V(1 pc.) V(1 pc.) V(1 pc.) V V E Integrated clevis V(1 pc.) Note 3) V(1 pc.) Note 3) V V V Integrated clevis (90) V(1 pc.) Note 3) V(1 pc.) Note 3) V V BZ Boss-cut/Basic V(1 pc.) V(1 pc.) V(1 pc.) V V FZ Boss-cut/ Rod flange V(1 pc.) V(1 pc.) V(1 pc.) V(1 pc.)

-fl Seies

cenler .1&t*080 PEEA A P B EBPE Main Parts No.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

cenler .1&t*080 PEEA A P B EBPE Main Parts No.

F

16 11 3/8 13 1/2 B O D Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

Free Mount Cylinder

31 1 8 Rc 1 8 Rc 1 8 Rc 1 8 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 33.5 34 34.5 6.6 5 to 50 19 21.5 23 8 5 to 50 11.5 5 to 50 L H J P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.

Compact

1 1 2N q w e r t y u i o !

MG

1 !7 @6 !0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

HRX-OM-W002

Thermister Thermister T2 T1 ExpansionValve ExpansionValve PressureSensor PressureSensor PressureSensor Not connected at option Z/Z1 Option T1 Option T Flow Sensor t t EV1 EV2 PTSensor PS1 PS2 PS3 PT FL WH WH BK BK DOUT2(temp) DOUT( flow) PM DC(+) DC(-) M M OUT OUT OUT + + + 3 3 3 2 2 2 1 1 1 3 2 3 2 1 1 4 2 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BR BR BR BR BR BR BL BL BL BL BL BL BL BL

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1 !

REA/REB

T Amount of stroke adjustment (Max. 2 mm) Adjusting bolt Hexagon nut Plate Adjusting Bolt Position (at the time of shipment), Hexagon Nut Tightening Torque Tightening torque (Nm) T (mm) Model REAL10 1 1.67 REAL15 1 REAL20 3.14 1 REAL25 10.8 1 REAL32 1 23.5 REAL40 1 10-2-42 42 Sine Rodless Cylinder Slider Type: Ball Bushing Bearing Series REAL Construction: 10, 15 o !6 @9 !4 @4 #2 y r !

REA/REB

1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts No. Description Body No.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type 40/41 How to Order 10--SS3YJ7-40 -05 --01 Applicable solenoid valve 10-SYJ714M10-SYJ724MR port 1/4 R port 1/8 Clean series Applicable blanking plate assembly SYJ700-10-2A Manifold P, R port thread 40 41 Type 40 Type 41 Stations Nil Rc G NPT NPTF A A A A 2 stations : 20 stations 02 : 20 F N T P Port 1/8 P Port 1/4 01 1/8 A port size A port 1/8 A port 1/8 Note) For more than 6 stations

Compact

l-en load,o f * t__i-r i l u i I I I l ; l 5 t 6 t i ] F ? {C $mies L)(P tleslric Actrfllor$ It|odd $slediru ltleiludl Operating conditions when LXP is used as lifter Working fange to linear bail bearing. Use within allowable thrust. Lateral load allowance zoo T---*J-rf I I T---r -tl l r ) = _ 1 ) , 4 \ t l 1 -;-) 50 to 100 stroke 75 | 2.47 1oo I zJt 125 1 5 0 ' , , e 1'rC ' "; ?

Title not found

EI/.1, ,t,\/m @l/-, ,t,\tEE t r NVZCUUU Symbol With Subplate CvO.7 w Body po.ted type Base mounted tyPe with subplate NVZ5I20 NVZ5140 J J e4IrF 4uri{F NVZ5220 NVZ5240 r#T--n |r-,,.+ qlA.\lF qll,tr tFN Base mounted type NVZs3:O NVZ534O ^4T7fh rh. ,4TrnND* E l t / . 1 . . , 1 . \ { 6 @ t h L . 1 1 \ l @ __--?

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Individual SUP spacer assembly + Individual EXH spacer assembly (Double spacer) Individual EXH spacer assembly Individual SUP spacer assembly Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors (End plate) (Pilot valve) t t SUP port EXH port EXH port t 11 15 18 20 1 4 t 11 15 18 20 1 4 Series Assembly part no.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !