Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

A

25 A I R C U S H I O N E D 32 1, 2, 3, 4, 5, 6, 8, 10, 12 40 40 1, 2, 3, 4, 5, 6, 8, 10, 12 45 50 1, 2, 3, 4, 5, 6, 8, 10, 12 55 63 1, 2, 3, 4, 5, 6, 8, 10, 12 55 Courtesy of Steven Engineering, Inc. !

SX

stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch fitting for 6 C6 One-touch fitting

1

Refer to pages 6-20-3 to 6-20-6 for Safety Instructions and Actuator Precautions. 6-17-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6-17-2 3 Made to Order Simple Specials: Simple Specials P. 6-17-3 CJ1 Page z -XA0 to A30 Change of rod end shape 6-17-4 x -XA1

Smooth Cylinder/Low Speed Cylinder

=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 35 + 35(n-2) 20 + 35 D-M9V 35 20 5 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 25 + 35(n-2) 15 + 35 D-A9V 25 15 5 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 D-M9WV D-M9AV 35 + 35(n-2) 20 + 35 35 20 10 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 50 + 45(n-2) D-C7 D-C80 15 + 45 50 15 10 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) D-H7 D-H7W D-H7NF (n-2) 2 60 +

5

+ 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 95 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 105 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 110 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 1 60 65 75 80 85 2 (Different surfaces) 70 75 80

LEC-OM07605CN

PA09]) 6 2 6 (2) Yes 2 1 () 2 No Yes No Yes No No 1 Yes Yes OK? No 2 Yes OK? No No OK? 2 2 Yes Yes OK?

Made to Order

(mm) Series CQ2 CQS Bore size (mm) G G Th9 Th9 0 0.043 0 0.043 12 1.5 1.5 15 15 0 0.052 0 0.052 16 1.5 1.5 20 20 MGC Series MGG Series (mm) (mm) 0 0.043 0 0.043 20 2 2 13 13 0 0.043 0 0.052 0 0.052 0 0.062 0 0.062 0 0.062 0 0.074 0 0.043 25 2 2 15 15 Bore size (mm) Bore size (mm) Throttle dia. () Throttle dia. () 32 2 21 20 5 20 3 40 2 28 25 5 25 3.5 50 2 35 32 6 32 6 63 2 35 -X -

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

[68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 73.5[75.7] 63.7[65.9] 83.5 65.2 72.6 58.7 0.5 45.5 45.5 45.5 45.5 17 17 17 17 17 17 17 17 42.7 0.5 0.5 6 6 6 6 0.5 8.5 8.5 8.5 8.5 21.5 21.5 21.5 21.5 Refer to page 563 for dimensions with connector cable. 522 5 port solenoid valve Series 10-SYJ5000 2 position double [ ]: AC G H G H Grommet (G), (H): 10-SYJ5243-01 Built-in speed controller

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

VQ7-6/7-8

AXT512-13 O-ring NBR 2 AS568-022 O-ring NBR 1 AS568-020 O-ring NBR 2 AXT512-5 Gasket NBR 1 AXT512-4 Plate SPCC 1 M4X10 Oval countersunk head screw SWRH3 2 AXT512-6-1 Connection fitting A 2 AXT512-6-4 Connection fitting B 2 AXT512-6-3 Hexagon socket head screw 2 32 Manifold Specification Sheet Series VQ7-6 1.

CL

2 !3 !4 !5 !6 !

SZ3000

Stations Stations Scale: 37% [With external pilot] 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 17.8 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 R 3 B 2 PE X A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 P 1 A 4 2-One-touch fitting 2-One-touch fitting (P, R ports) Applicable tube O.D.: 8 (X, PE ports) Applicable tube O.D.: 6 2n1-M5

OMU0023

(ii) Function codes to be used 03h / 10h (iii) Memory map Address Number of registers(Bytes) Details D0600 2 Alarm number of alarm entry 1 D0601 2 Alarm number of alarm entry 2 D0602 2 Alarm number of alarm entry 3 D0603 2 Alarm number of alarm entry 4 D0604 2 Alarm number of alarm history 5 D0605 2 Alarm number of alarm history 6 D0606 2 Alarm number of alarm history 7 D0607 2 Alarm number

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.