1

P PA PB X XA YY YL Z NN PW Q S R T RR RB U RA XC XL VA VB XB 12 16 20 25 18 19 25 28.5 34 38 47 55 13 15 12.5 12.5 7 13 9 14 14 16 18 48 54 70 33 33 37 RB0806 RB0806 M4 x 0.7 3 3 10 10 50 56 3 3 6 6 6 6 5 5 37 38 3.5 M5 x 0.8 M12 x 1.5 41 46 54 56 62 81 8 10 10.5 13.5 15 18 21.5 28 4.5 4.5 5.5 5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3 5.6 5.6 6.6 6.6 8.6 8.6 10 12 13 15 20 20 22 22 8 8 9.5

Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

C85

3 q !5 !1 10A e !2 t !9 !7 !4 !6 !0 i 2A @2 r @0 o y !8 @1 u !

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

3 !4 r t y u i !5 !6 No.

One-touch Fittings

[mm] Model 1 D1 1 D2 L1 L2 P I M1 M2 Q O N Weight [g] a b Nylon Urethane 4 6 KQ2UD04-06A 8.2 10.4 29.2 18.2 8.2 16.6 13.3 13.3 6.8 6 3.2 4.2 4.2 3 5.4 6 8 KQ2UD06-08A 10.4 13.2 32 20.5 10.4 21 13.3 14.2 8.2 6 3.2 13.4 10.6 4.5 8.1 I Round type 4 to 8 P Q 1: D1, D2 are maximum diameters.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

9 q r !5 y i !8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

MXS Series Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 41 Q MXS Series 6, 8, 12, 16, 20,25 The MXS series air slide table is ideal when precise load transfer/ assembling is required. Shock absorber type and Symmetric type are now available.

Proposals for Energy Saving

8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !

Modular F.R.L. Unit

AD38 AD38NNote 6) AD38 AD38NNote 6) AD48 AD48NNote 6) AD48 AD48NNote 6) Float type auto drain N.C.

•

Q I>A F ' F Flat "" ,,"OD with rib G :M5 xO.8 G:M6Xl y " p Q I>A ~ . F Fiat A. ,,"OD withn b Modol M I>B e 0 E Modol M ',B . e 0 ' El ZPY4Ol! 40 43 1 8.5 :!as .as 6.5 3.3 itt,ion' ZPY1Ol! 10 12 12 22 38 3 1.7 H4{~1 14.5 5 1.8 ZPYSOl! 50 53 19.5 29.5 <7.5 6 8 7.5 3.8 N6 (~,1 16.5 7 2.5 ., 1~ 15 12 22 38 5 6 3 1.8 ZPY~ 16 18 12.\ 22.5 :!

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Analogue input or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0..2 (Ch0 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 4 4..6 (Ch1 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0: None, 1: 2 value average, 2: 4 value average

Thermo-chiller

1 CH1 Circulating fluid return port CH2 Circulating fluid return port e r u y t CH2 Circulating fluid outlet q DI filter CH1 Circulating fluid outlet i !5 r t !6 !2 x 4 !3 w Parts List (170) No.

KJ

(mm) Applicable Port B min. port size Weight (g) fitting size d D1 Model D2 L1 L2 L3 P Q1 Q2 A MB MA a b KM15-04-06-3 10.4 12.8 78.5 85.5 92.5 98 105 18 19 20 21 22.5 13 15.5 15.5 19 19 9.9 11.1 11.1 12.8 12.8 12 24 25 37 41 6 6 61.5 67 74 77 17 18.5 18.5 21 85 4.5 6 6 7.5 7.5 38.2 4 10.4 16 KM15-04-08-3 15.2 KM15-06-08-3 12.8 15.2 KM15-06-10-3 18.5 KM15-08-10-3 15.2 18.5 8 8 8 8 45.4 6 12.8

F

7 6 M5x0.8 KQH06-M5 11.8 24 20.5 17 4 4 9 5/32 1/8 KQH03-34S 11.11 22 18 16 3 9 6 1/8 KQH06-01S 12 22.5 18.5 17 13.1 13.1 10 5/32 1/4 KQH03-35S 14.29 21 15 16 3 16 6 1/4 KQH06-02S 14 23 17 17 13.1 13.1 15 3/16 1/8 KQH05-34S 12.7 22 18 16 3.5 11 6 3/8 KQH06-03S 17 23 16.5 17 13.1 13.1 27 3/16 1/4 KQH05-35S 14.29 21 15 16 3.5 12 8 1/8 KQH08-01S 14 28 24 18.5 26.1 18 21 1/4 1/8 KQH07-34S 14.29

V

Water 1.1 0.6 0.9 0.5 1 0.5 0.5 (6A) VX2120-01 3 0.33 6 0.45 0.2 0.4 0.2 0.45 0.2 0.15 VX2130-01 4.5 0.61 11 Oil 2 1.5 2 1.5 1 1.5 1.5 VX2110-02 2 0.17 3 1.1 0.6 0.9 0.5 1 0.5 0.5 VX2120-02 3 0.33 6 Air 5 2 1.5 1.7 1.5 1 1.2 1.2 VX2220-02 3 0.33 6 3 3 3 2.5 3 1.7 2 VX2320-02 3 0.33 6 0.45 0.2 0.4 0.2 0.45 0.2 0.15 VX2130-02 4.5 0.61 11 0.75 0.35 0.6 0.35 0.75 0.35 0.3 VX2230-02 4.5 0.61

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(D, Y) Manual override (Non-locking) Double Single VK 197.5 (3 position: 226.5) Y: 217.5 (3 position: 246.5) D: 218.5 (3 position: 247.5) 218.5 (3 position: 247.5) Y: 108.5 (3 position: 123) D: 109.5 (3 position: 124) (3 position: 124) (3 position: 113.5) VZ (Pitch) (Mounting hole) VF 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) (With individual EXH