Air Slide Table

MXQ 6-mm2 With end lock (6) 5 J Q 5.5 3 11.5 7 7.5 0.5 Pilot port 2 x M5 x 0.8 5 8.5 24.2 Dimensions [mm] Symmetric type MXQ6-10Z2 Model J Q MXQ6-10Zm2 60 25 MXQ6-20Zm2 MXQ6-30Zm2 81 33 MXQ6-40Zm2 93 MXQ6-50Zm2 103 * Dimensions other than those listed above are the same as those for the standard type. MXQ 6-mm2 With end lock, extension stroke end adjuster (6) Type Adjuster part no.

Hydraulic

Q: Required fluid volume for extension (l/min) Q: Required fluid volume for retraction (l/min) D: Bore size (cm) d: Piston rod diameter (cm) : Piston speed (mm/s) Q = D __ 4 6 _ 1000 Formula (1) Q = (D d) __ 4 6 _ 1000 ..

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body material: Brass, Stainless steel, Aluminum q w q e t w r e y r t y u !1 i u !3 !2 o i !4 !3 !0 o !4 !5 !0 !5 !6 !1 !7 !2 !6 !8 !7 Component Parts Component Parts No. Description Material Brass Stainless steel Aluminum 1 Clip Stainless steel 2 Solenoid coil Stainless steel, Cu, Resin 3 Stopper PPS 4 Spring Stainless steel 5 Tube assembly Stainless steel No.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Q Diode LED Coil Timer circuit How to Order Q SYJ 3 T Z 1 2 Black (--) Q 1: Starting current 2: Holding currect Q Applied voltage Q Rated voltage 24V 5 6 24VDC 12VDC 0V Q Standard Specify the same as standard 0.55W Q Power saving type 0.22W 0W Q 62ms Q Q Q Q Q Q Q Q Q Q Q Q Q 20 Q Q Q Q Drawings Series

Rotary Actuator/Vane Type

6 q w !4 !2 w !4 o !0 !7 !1 q !5 !1 Double shaft type Single shaft type Single shaft type Component Parts Double shaft type DNo. Description Material Note No.

Vacuum Unit

Symbol Type Note Nil Without option Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" When R is selected for q, P needs to be selected.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Table of Contents

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

mA), Holding 1.26 VA (6 mA) 200 VAC Inrush 1.38 VA (6 mA), Holding 1.38 VA (6 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

mA), Holding 1.26 VA (6 mA) 200 VAC Inrush 1.38 VA (6 mA), Holding 1.38 VA (6 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

7-6-20.

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

0.4

6) Special wiring spec.

MY1

@7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !

New

Step 1 Item Selection item Symbol Page VX2 Air Page 2 2 Water VXN 3 2 q C A Select the fluid. q Medium vacuum Page 4 3 Page 6 Oil 4 Select Body material, Port size and Orifice diameter from Flow rate Pressure of each fluid.

High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

15

FP (Mounting distance) Actuator Motor plate details q w FC Motor mounting surface FD FH FF FE 4 x FA, thread depth FB FG Dimensions [mm] Size Motor type FA FB FC FD FE FF FG FH M1 T1 M2 T2 PD FP 40 NY M3 x 0.5 6 45 30 3.5 6 99 49 M4 x 12 2.7 M2.5 x 10 0.65 8 12.5 NX M2.5 x 10 0.65 8 7 NY M4 x 0.7 6 70 50 3.5 6 123 68 M4 x 12 2.7 M4 x 12 2.7 11 18 NX M5 x 0.8 6 63 40 3.5 6 123 68 M4 x 12 2.7

1

spring pin 6-17-87 2 -XC30 Rod side trunnion 6-17-88 3 -XC34 Rod does not extend beyond non-rotating plate 6-17-90 4 -XC35 With coil scraper 6-17-91 5 -XC36 With boss in rod side 6-17-95 6 -XC37 Larger throttle diameter of connecting port 6-17-95 7 -XC38 Vacuum (Rod through-hole) 6-17-96 8 -XC42 Built-in shock absorber in head cover side 6-17-97 9 -XC51 With hose nipple 6-17-98 0 -

7

suppressor) C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (200.5) 96 (104) 104 (112) 90.5 (98.5

NCQ8

Q J E D-rod Dia.