Table of Contents

F H: M6 x 1 H: M8 x 1 ZY A B L A B K L Y Model C D E K Y Model C F G G D E E ZPY20B ZPY25B ZPY06B ZPY08B 20 25 22 27 23.5 24 33.5 34 51.5 52 79.5 80 85 69.5 70 12.4 15.6 25 28 18.9 37 6 8 7 9 3.3 4.7 9.1 10.1 2.5 20 45 25 50.5 4 10.5 ZQ 25 15 32 34 29 39 57 ZPY32B 75 14 Applicable Tubing Applicable Tubing ZF P Q R Applicable tubing Q R Applicable tubing P N4 (Nylon tube, 4/2.5) N6 (Nylon

Made to Order

1.5 23.5 27 26 11 43.5 M18 x 1.5 28.5 H1 C1 X L1 Both Ends Tapped (mm) A B C D E H J K L M O P Q R Th9 W Z Bore size (mm) Stroke range (mm) 32 40 50 34 17 45 4.5 14 10 10 49.5 16 M6 x 1.0 1/8 13 M8 x 1.25 14 50.5 23 0 0.052 67.5 125 to 200 Note 1) 0 0.052 17 40 14 57 16 52 5 M6 x 1.0 1/8 12.5 10 13 M8 x 1.25 15 77 60 28 250, 300 0 0.062 78.5 17 18 50 71 7 14 15 20 64 M10 x 1.5 M8 x 1.25

Modular F.R.L. Unit

M K J H G E Q T N P K L B AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B 71 11 50 56 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 7 4.5 20 27 25 28 0 26 13.5 4.5 2.8 40 89 114 26.5 80 83 5.5 12 33 24 41.5 30 2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 80 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 80 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36

Table of Contents

Applicable shaft type: K Applicable shaft types: J, K, T (mm) X L3 max W1 L1 max (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size W1 = L3 = L1 = 10 10 0.5 to 2 4.5 to 14 0.5 to 2 Y 1 L2 1 6.5 to 14 L1-1 X 3 L4 = 15 15 0.5 to 2.5 Y = 5.5 to 18 0.5 to 2.5 Y 1.5 L2 1 8 to 18 L1-1 X 4 L2 = 20 20 6 to 20 0.5 to 3 0.5 to 3 Y 1.5 L2 1 9 to 20 L1-1 X 4.5 X = 8.5 to 22

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: K Applicable shaft types: J, K, T (mm) X L3 max W1 L1 max (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size W1 = L3 = L1 = 10 10 0.5 to 2 4.5 to 14 0.5 to 2 Y 1 L2 1 6.5 to 14 L1-1 X 3 L4 = 15 15 0.5 to 2.5 Y = 5.5 to 18 0.5 to 2.5 Y 1.5 L2 1 8 to 18 L1-1 X 4 L2 = 20 20 6 to 20 0.5 to 3 0.5 to 3 Y 1.5 L2 1 9 to 20 L1-1 X 4.5 X = 8.5 to 22

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: K Applicable shaft types: J, K, T (mm) X L3 max W1 L1 max (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size W1 = L3 = L1 = 10 10 0.5 to 2 4.5 to 14 0.5 to 2 Y 1 L2 1 6.5 to 14 L1-1 X 3 L4 = 15 15 0.5 to 2.5 Y = 5.5 to 18 0.5 to 2.5 Y 1.5 L2 1 8 to 18 L1-1 X 4 L2 = 20 20 6 to 20 0.5 to 3 0.5 to 3 Y 1.5 L2 1 9 to 20 L1-1 X 4.5 X = 8.5 to 22

Rotary Actuator/Vane Type

6 q w !4 !2 w !4 o !0 !7 !1 q !5 !1 Double shaft type Single shaft type Single shaft type Component Parts Double shaft type DNo. Description Material Note No.

Table of Contents

KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F-1 -02F-1 -03F-1 KKA4S-02F-1 -03F-1 -04F-1 KKA6S-03F-1 -04F-1 -06F-1 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 1/8 1/8 1/4 1/4 1/2 1/2 15-2-90 19 19 S Couplers Stainless Steel Type Series KKA Specifications K Fluid Water

Hydraulic

Q: Required fluid volume for extension (l/min) Q: Required fluid volume for retraction (l/min) D: Bore size (cm) d: Piston rod diameter (cm) : Piston speed (mm/s) Q = D __ 4 6 _ 1000 Formula (1) Q = (D d) __ 4 6 _ 1000 ..

ZP3

Basic Type ZP Series Model Connection thread Tightening torque [Nm] ZP(2 to 8)(J/K)--A8 M8 x 1 1.5 to 2.0 ZP(10 to 32)(J/K)--A10 M10 x 1 2.5 to 3.5 ZP(40/50)(J/K)--A14 M14 x 1 6.5 to 7.5 Lock ring Adapter Compact Type ZP3 Series Model Connection thread Tightening torque [Nm] ZP3-(015 to 035)JM6 x 0.75 1.5 to 1.8 ZP3-(015 to 035)KM8 x 0.75 2.0 to 2.5 ZP3-(04 to 16)(J/JB/K)Pad 2.

Aluminum High Vacuum Angle Valve

83 7-1 90 u o K flange i 83 KF flange 2-1 0.2 112 q 114 90 O-ring Part No.

Table of Contents

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

One-touch Fittings Series KQ2

S 3 0 7 0 L 2 Q K 7 1 5 . 8 4 9 4 9 6 8 / 1 S 1 0 9 0 L 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 3 4 7 4 5 . 8 1 6 0 3 6 1 / 5 4 / 1 S 2 0 9 0 L 2 Q K 4 1 5 . 9 4 1 5 7 4 8 / 3 S 3 0 9 0 L 2 Q K 7 1 5 . 1 5 3 5 4 7 4 / 1 S 2 0 1 1 L 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 6 5 9 5 1 2 7 9 6 8 / 3 8 / 3 S 3 0 1 1 L 2 Q K 8 5 1 6 6 7 2 / 1 S 4 0 1 1 L 2 Q K 2 2 5 . 4 6 5 . 5 6 7 4 1 R(PT) 4 / 1 S 2 0 3 1 L 2

AC

Model Port size Q M B B A B C D P E F G H J K L 8, 1 4 1 AFM2000 AFM3000 AFM4000 AFM4000-06 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFM2000 AFM3000 SAC2000, #1 SAC2503, #1 AFM4000 AFM4000-06 SAC4000, #1 SAC4006, #1

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

Vacuum Unit

Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Pilot valve for supply Pilot valve for supply + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k B C A B C A Coil + + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k Black For supply valve (,+)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

G B B [mm] Size Port size A B C D E F G 20 1/8, 1/4 42 40 77.6 36 17.5 18 15.5 30 1/4, 3/8 53 53 94.5 42 21.5 21 18 40 1/4, 3/8, 1/2 71 70 102.5 42 25.5 21 22.5 Size Port size Grommet Grommet with PCB Conduit J K J K J K 20 1/8, 1/4 47.9 28.5 53.6 38 55.2 48.9 30 1/4, 3/8 56.8 31.1 62.5 41 64.1 51.9 40 1/4, 3/8, 1/2 64.8 31.1 70.5 41 72.1 51.9 Glossary of Terms Specific Product Precautions

7

1 t !1 t o y o y u IN(P1) u r IN(P1) r OUT(P2) B A OUT(P2) A B C IN(P1) IN(P1) e C e q w q w VXD23 VXD24 !2 i i !0 !2 A B !0 !1 !1 o t o u B u OUT (P2) w C IN(P1) A r r OUT(P2) IN (P1) e e C w IN(P1) q q VXD27, 28, 29 VXD25, 26 Component Parts Operation When coil !2 is energized, armature assembly !1 is attracted by core i and pilot valve A is open.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.