Low torque Metal seal type Rotary joint

(6) 1 2-M4 x 0.7 thread length 8 P.C.D.38 2 1 2 4 45 3 41 32 2-M3 x 0.5 thread length 8 P.C.D.29 3 Low torque Metal seal type Rotary jointSeries MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR8-M5 MQR12-M5 0.03 7 M6 x thread length 10 4-M3 x 0.5 thread length 6 P.C.D.43 4-M3 x 0.5 thread length 6 P.C.D.48 M6 x 1 thread length 10 0.03 8 4.1 0.05depth 10

Clean Air Module

Tightening Torque for Operating Port Operating port Torque (Nm) After tightening by hand, tighten additional 1/6 rotation with a tightening tool. M5 Rc, NPT 1/8 0.8 to 1.0 2. Use the pilot ports and sensor (respiration) port as follows.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

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MGF

K (6 places) 57 114 5 Guide Table Series MGF 63 MGF63 Scale: 40% 4-M10 x 1.5 through 140 160 120 11.5 48.5 + Stroke 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 4 146 11 6-K (6 places) 73 146 6 Series MGF Dimensions

CYV

4 #6 !5 !1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Ejector Valve Unit Series ZYY/ZYX 1

(M3: Port PE) Pilot valve exhaust port Hysteresis setting trimmer (AN203-KM8) Silencer 62.1 57.1 49.4 41.6 33.6 29.5 23.5 21 10 Vacuum port (8.25) 3.75 6 One-touch fitting Port V (5.25) (13.5) 19 88 18.75 16.75 Supply port Button for block separation 6 One-touch fitting Port P1 27 ZYX35LOZ-10S1 (Specifications without vacuum switch) End plate (P44027A) 31 20 EXH.

MGZ Series

6 6 9.5 12.5 15 178 195 221 18 18 18 12 15 15 44 50 56 138 150 171 4 5 5 1/4 1/4 1/4 to 1000 to 1000 to 1000 7 Series MGZ Non-rotating Double Power Cylinder Applicable auto switches Auto switch models Auto switch type Electrical entry D-Z7, Z80 Grommet Reed switch D-Y59, Y69, Y7P Grommet D-Y7NW, Y7PW, Y7BW Grommet (2 color indicator, with diagnostic output) Solid state switch Grommet (2

CYP

Also, note that a 12VDC relay is not applicable. 6. Pay attention to leakage current. With a 2 wire solid state auto switch, current (leakage current) flows to the load to operate the internal circ u i t even when in the OFF state.

CYPSeries

Take special care to avoid reverse wiring with the brown (red) power supply line and the black (white) output line on 3 wire type switches. 6. Avoid incorrect wiring. A 24VDC switch with indicator light has polarity. The brown (red) lead wire is (+), and the blue (black) lead wire is ().

CYPSeries

Take special care to avoid reverse wiring with the brown (red) power supply line and the black (white) output line on 3 wire type switches. 6. Avoid incorrect wiring. A 24VDC switch with indicator light has polarity. The brown (red) lead wire is (+), and the blue (black) lead wire is ().

Series CQ2

Consult SMC if switches are used where there are temperature cycles other than normal temperature changes, as there may be adverse effects inside the switches. 6. Do not use in an environment where there is excessive impact shock.

Hand Valve Series VH 1

4 3 1 7 9 SA 1 (P) VA 4 (B) 2 (A) 3 (R) 2 SA VA VH300/400 VM 8 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 VR 4 3 VH 1 9 VHS 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600 6 5 4 1 7 1 (P) 2 (A) 4 (B) 2 3 (R) Component Parts Material VH200/300/400 Zinc die-casted Aluminium

Two Hand Control Valve

6 !4 !

Trimmer Auto Switch

(Switch spacer and auto switch mounting bracket) Cylinder series Bore size 40 50 63 MGZ BMP1-032 BMP1-032 BMP1-032 Note) When tightening an auto switch mounting screw, use a watchmakers screwdriver with a grip diameter of 5 to 6 mm.

Hand Valve Series VH

4 3 1 SlA 7 VlA 8 1 (P) SlA 4 (B) 2 (A) 2 3 (R) VlA VH300 / 400 5 6 VM/VR 4 3 VH 1 8 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600 6 5 4 1 7 1 (P) 2 (A) 4 (B) 2 3 (R) Component Parts Material VH200/300/400 Zinc die cast Aluminium die cast VH600 Cast iron Description No.

High Vacuum Angle Valve

If the fluid temperature is 5C or less, the moisture in the circuit could freeze, causing damage to the seals and equipment malfunction. Therefore, take appropriate measures to prevent freezing. For compressed air quality, refer to the Product Selection Guide. 5.

Clean Exhaust Filter SFE Series

Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. ow capacity L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. ow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch tting type Symbol Applicable tubing O.D.

PSE200

cover Waterproof seal Panel 48 conversion adapter + Panel mount 6 2 48 1.5 MPa kPa OUT1 OUT2 1 2 3 4 CH PRESSURE SET Panel mount adapter Waterproof seal 48 conversion adapter Panel 55 or more 37.5 +0.1 -0.2 55 or more Panel fitting dimension Applicable panel thickness: 0.5 to 8mm 6 Series PSE Descriptions 4-digit display Unit display Displays the measured pressure value, content for each

F/ISE

Proper tightening torque N.m Nominal thread size 1/6 rotation after tightening by hand M5 13.6N.m R 1/4, NPT 1/4, G 1/4, URJ 1/4, TSJ 1/4 3. Apply wrench only to the metal part of the main housing when installing the pressure switch onto the system piping.