Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

5 !

Modular F.R.L. Unit

Features 5 Feature 6 F.R.L.

KJ

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

EtherNet/IP K @4 PCA-141m 7/8 inch, 4 pins, Socket, Straight 2 m, 6 m @5 PCA-141m 7/8 inch, 4 pins, Socket, Angle PROFINET @1 PCA-15588m 7/8 inch, 5 pins, Socket, Straight 2 m, 6 m EX500 K @2 PCA-15588m 7/8 inch, 5 pins, Socket, Angle PROFIBUS DP K @6 EX500-APm-S M12, 5 pins, A-coded, Socket, Straight 1 m, 5 m DeviceNet @7 EX500-APm-A M12, 5 pins, A-coded, Socket, Angle EtherNet/IP K @6 EX500

Table of Contents

K Note) K plug connector DIN terminal Option D KS K plug connector With light/surge voltage suppressor 6 12 VDC DIN terminal, With light /surge voltage suppressor DZ 9 Other Option Note) Since F and K types are attached without lamp cover, it should be arranged separately. 3-7-24 25 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 Use as a guide for

ZP

Y A J K B Y C D Misc.

Possible to transfer a workpiece at low-speed.

10, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.

Table of Contents

) output impedance 1 k output for display unit PF2A3 Output for display unit Output Note 2) specifications Voltage output 1 to 5 V within the flow rate range Linearity: 5% F .S. or less; allowable load resistance: 100 k or more.

MXQ

5 !6 !7 !8 !

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

5 !6 Component Parts Component Parts No.

XL

Actuation port direction Nil Flange side Left flange surface Rear flange surface Right flange surface K L M Temperature specifications/Heater Symbol Temp. range Heater Nil 5 to 60C (41 to 140F) None None H0 High temp. type 5 to 150C (41 to 302F) With heater for 80C (176F) H1 With heater for 100C (212F) H2 With heater for 120C (248F) H3 High temperature type combination table High temperature

Table of Contents

198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series

TABLE OF CONTENTS

V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

High Vacuum Angle Valve, XL Series

Actuation port direction Nil Flange side Left flange surface Rear flange surface Right flange surface K L M Temperature specifications/Heater Symbol Temp. range Heater Nil 5 to 60C (41 to 140F) None None H0 High temp. type 5 to 150C (41 to 302F) With heater for 80C (176F) H1 With heater for 100C (212F) H2 With heater for 120C (248F) H3 High temperature type combination table High temperature

Air Fittings Fitting Series For Special Environment

8 / 3 S 6 3 7 0 Y R K 1 1 / 6 1 ) 6 4 . 7 1 ( 6 1 . 1 ) 5 . 9 2 ( 9 7 . 1 ) 5 . 5 4 ( 7 3 6 1 . 1 ) 5 . 9 2 ( 3 0 . 2 ) 5 . 1 5 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 Y R K 2 3 1 1 / 6 1 ) 6 4 . 7 1 ( 9 8 . 0 ) 7 . 2 2 ( 7 6 . 0 ) 7 1 ( 0 1 . 1 ) 8 2 ( 8 / 3 S 6 3 1 1 Y R K 4 2 . 1 ) 5 . 1 3 ( 9 0 . 2 ) 3 5 ( 1 4 8 / 3 2 / 1 S 7 3 1 1 Y R K 0 4 . 1 ) 5 . 5 3 ( 9 1 . 2 ) 5 . 5 5

Air Cylinder

9 Non-locking type manual release: Suffix N Locking type manual release: Suffix L CJ1 K !7 !6!5!8 CJP K @3 @6 @2 @9 @7 u q @5 @4 y !9 r t !4!0!1iow !2 @8 @1 @0 CJ2 JCM CM2 CM3 CG1 CG1 Rod end lock CG3 e w JMB MB MB1 CA2 Long stroke CS1 Component Parts CS2 No.

CQ2

Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 A L L1 37 3.5 3.5 4.5 5 14 39.5 44 15.5 18.5 22.5 45.5 Double clevis (mm) Bore (mm) 12 16 20 25 Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 A B CD CT N RR CL CU CW CX CZ L L1 51.5 55 63 45.5 49 54 M4 X 0.7 28 5 5 8 10 4 4 5 5 6 6 9 10 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 14 M4 X 0.7 30.5 15.5

Mechanical Valves Series NVM, NVFM, NVZNI

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

IIIIIII

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

AC

5 !6 Block packing !