VXA21/22 Applicable Fluids Standard Option (1) Water (Standard, Up to 40C) Air (Standard, dry), Turbine oil Vacuum (Up to 1 Torr) Carbon dioxide (CO2), Nitrogen gas(N2) Freon11, 113, 114 Vacuum (Up to 103 Torr) (V, M) Non-leak (105 atm cc/sec or less) (V, M) Symbol N.C.
Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials
ZSE2-0R-15 Air 0 to 101 kPa 3% or less 3% Full span (5 to 40C) 5% Full span (0 to 60C) 12 to 24 VDC (Ripple 10% or less) Open collector 30 V, 80 mA Lights up when ON 17 mA or less (when 24 VDC is ON) 0.2 MPa Fluid Setting pressure range Hysteresis Compact size: 39H x 20W x 15D (except the connecting portion) ZX Temperature characteristics Improved wiring: Connector style Operating voltage
Fluid Set pressure range Hysteresis ZY Air 0 to 101 kPa 3% Full span or less 3% Full span (5 to 40C) 5% Full span (0 to 60C) 12 to 24 VDC (Ripple 10% or less) M5 x 0.8 Note) If not operated within the specified range of pressure and temperature, trouble may be caused. ZQ 1% Full span Accuracy ZF Voltage Port size ZP ZCU AMJ Misc.
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: L (Left Side), Stroke: 20mm, Adjuster: C (Both Side Adjusters/Metal Stoppers)
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: Left Side, Stroke: 20mm, Adjuster: Retracting Stroke End Adjuster/Shock Absorber, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: Left Side, Stroke: 30mm, Adjuster: Both Side Adjusters/Metal Stoppers, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: Left Side, Stroke: 50mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: Left Side, Stroke: 10mm, Adjuster: Both Side Adjusters/Metal Stoppers, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: Left Side, Stroke: 10mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: Left Side, Stroke: 50mm, Adjuster: Both Sides Adjusters/Shock Absorbers RJ, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: Left Side, Stroke: 30mm, Adjuster: Both Side Adjusters/Metal Stoppers, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: Left Side, Stroke: 50mm, Adjuster: Both Side Adjusters/Metal Stoppers, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: Left Side, Stroke: 20mm, Adjuster: Both Sides Adjusters/Shock Absorbers, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: L (Left Side), Stroke: 50mm
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: L (Left Side), Stroke: 10mm
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: L (Left Side), Stroke: 20mm
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: L (Left Side), Stroke: 20mm, Adjuster: BT (Retracting Stroke End Adjuster/Shock Absorber)
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: L (Left Side), Stroke: 30mm
Bore Size: 8mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: L (Left Side), Stroke: 30mm, Adjuster: C (Both Side Adjusters/Metal Stoppers)