Series: Standard w/ Magnet, Mounting: MS1, Foot, Bore Size: 2", Stroke: 3", Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, X Option: -

Series: Standard w/ Magnet, Mounting: MS1, Foot, Bore Size: 2", Stroke: 4", Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, X Option: -

Series: Standard w/ Magnet, Mounting: MS1, Foot, Bore Size: 2", Stroke: 5", Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, X Option: -

Series: Standard w/ Magnet, Mounting: MS1, Foot, Bore Size: 2", Stroke: 6", Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, X Option: -

Series: Standard w/ Magnet, Mounting: MS1, Foot, Bore Size: 2", Stroke: 7", Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, X Option: -

Series: Standard w/ Magnet, Mounting: MS1, Foot, Bore Size: 2", Stroke: 10", Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, X Option: -

Series: Standard w/ Magnet, Mounting: MS1, Foot, Bore Size: 2", Stroke: 12", Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, X Option: -

Series: Standard w/ Magnet, Mounting: MS1, Foot, Bore Size: 2", Stroke: 2", Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, X Option: -

Digital Flow Switches, Series PF2A, Series PF2W

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 9 Series PF2A For Air Digital Flow Switch Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

Digital Flow Switches Series PF2A

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 11 Digital Flow Switch Series PF2A For Air Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

Digital Flow Switches

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 9 Series PF2A For Air Digital Flow Switch Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow rate

PF2A/PF2W

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 16-11-14 11 Series PF2A Digital Flow Switch, High Flow Type For Air Flow Characteristics (Pressure loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 ZSE ISE PSE Z I SE3 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400

Table of Contents

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 16-11-14 11 Series PF2A Digital Flow Switch, High Flow Type For Air Flow Characteristics (Pressure loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 ZSE ISE PSE Z I SE3 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400

Digital Flow Switch

4800 7200 9600 12000 0 600 1200 1800 2400 3000 0 1200 2400 3600 4800 6000 Flow [L/min] Flow [L/min] Flow [L/min] 11 3-Color Display Digital Flow Switch for Large Flow PF3A7 H Series IN Side Straight Section and Accuracy (Reference Data) PF3A703H (for 3000 L/min) PF3A706H (for 6000 L/min) PF3A712H (for 12000 L/min) 70% 70% 70% PFG300 Function Details PF3A7 H With 1/2" connected With 1" connected

Table of Contents

Select the communication speed from 1200, 2400, 4800, 9600 or 19200 with the UP/DOWN keys. Store the setting with the SET key. The SEL. key only shifts the cursor without storing the setting. UP J DOWN DFUNC. FUNC. SEL. key 3-8 -X Unit no. 20Data The unit number registration mode is selected by pressing the SEL. key while UNIT is flashing.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line LZ 200 W /l60 (Motor rotation speed) (3750 rpm) (2400 rpm) LC3F2 A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63l Motor mounting position: Top/Parallel, In-line 400 W /l60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L 2.86 70 (Motor rotation speed) (1470 rpm

Electric Actuator/Slider Type

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W / 60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 400 W / 60 Motor mounting position: Top/Parallel, In-line (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L 2.86 70 (Motor rotation speed) (1470 rpm) 70 Series

Environment

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L* 2.86 70 (Motor rotation speed) (1470 rpm) * Top/Parallel

15

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W equivalent (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63l 400 W equivalent (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L 2.86* 70 (Motor rotation speed) (1470 rpm) * Equivalent lead which includes the screw lead

Environment

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L* 2.86 70 (Motor rotation speed) (1470 rpm) * Top/Parallel