ZR

(1) on page 13-3-5 for details.

0.4

Note 1) Metal seal only Note 2) When -COM. is specified for the SI unit, select and mount the valve of negative common. Note 3) Dual 3-port is not applicable. N.O. N.O. 2 B A 2-position double (Rubber) 4-position dual 3-port valve (C) VQC 1/2 VQC 1/2 2(B) 4(A) 2(B) (A)4 Note) C VQC 4/5 (R1)5 1 (P) 3(R2) C Turn locking type (Manual) 1(P) 5(R1) 3(R2) N.C. N.O.

MB

60 13 13 14 14 20 20 27 47 51 58 58 72 72 97 16 16 16 16 16 16 20 4 4 5 5 5 5 6 M6 x 1.0 6 6 7 7 10 10 13 M10 x 1.25 27 27 31.5 31.5 38 38 38 1/8 1/4 1/4 3/8 3/8 1/2 1/2 84 84 94 94 114 114 120 4 4 5 9 11.5 17 17 6.5 9 10.5 12 14 15 15 178 186 210 210 258 258 314 90 90 102 102 124 124 132 184 192 218 218 268 268 326 22 30 35 35 40 40 54 13 14 15.5 16.5 19 19 19 to 500 to 500 to 600 to 600

ZP3

Form w 1 Material C 04 4 4.5 1.2 7 6 0.5 06 6 6.5 N S U F GN GS HS A 0.8 08 8 8.5 10 10 11 9 7 1 13 13 14 1.2 16 16 17 B ZP3 (10 to 16) (4 to 8) UM 2 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber, HS: Semiconductive silicone rubber Construction p. 160 Mounting Bracket Assembly From p. 162 With adapter 4 to 16 w q ZP3 T N 04 A5

SMC Pneumatic Clean Series

x 1.25 M8 x 1.25 15 11.5 10.5 8.5 40 32 25 20 11 8 8 8 36 31 31 31 16 13 13 13 37 42.5 34.5 30 24 47.3 37 37 30 108 82 80 80 7 5.5 5.5 5 22 17 17 13 41 32 32 26 6 6 5 8 8 8 50 45 45 41 24 22 22 18 31 26 26 26 75 75 75 66 60 60 60 M26 x 1.5 M26 x 1.5 M20 x 1.5 174 140 138 134 17.5 17.5 19.5 15.5 35.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 45 41 41 35.5 26-0.033 0 17.5 19.5 35.5

Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 8 1 to 14 1 to 8 15 4 to 18 1.5 to 9 1.5 to 18 1.5 to 9 20 4.5 to 20 1.5 to 10 1.5 to 20 1.5 to 10 30 5 to 22 2 to 13 2 to 22 2 to 13 40 18 to 30 4.5 to 15 18 to 30 4.5 to 15 Size CRB2 CRBU2 X Y X Y 10 3 to 10 (19) 1 to 12 (3) 1 to 3 (12) 1 to 19 (10) 15 4 to 11.5 1.5 to 15.5 1.5 to 6.5 1.5 to 20.5 20 4.5 to 13 1.5 to 17 1.5 to 7.5 1.5 to

SZ3000

L 20 46 (7.5) L 14 1 8 55 47.04 (35) (25) 5.5 Approx. 10 25 13 2-M2.6 x 0.45 Socket side Rail mounting hole pitch 12.5 Plug connector HDB-CTF Terminal No.

VQZ1000/2000/3000

5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

42

Stations (1 to 12) C C kit (Plug lead type) 6.

MXQ

Area: (800) 258-9200-www.stevenengineering.com (mm) Stroke adjustment range (mm) Body mounting section Table mounting section A Applicable size Model B C F G M D E L E1 P *1) H J K Q 1) MXQ8(L) M3 x 12 M8 x 1 MXQ-BS8(L) M3 x 12 20 7 24.5 14 12.5 40.8 5 12 1.4 16.6 8 12 14.6 MXQ12(L) M4 x 12 M8 x 1 MXQ-BS12(L) M4 x 12 18 9.5 29 14 11 40.8 6 12 1.4 20.5 11 13 18.5 MXQ16(L) M5 x 16 M10 x 1

NCA1

3.25) 1 3/4-16 1 1/8 3.9 1/2 3 13/16 1 15/16 1 1/4 3/4 11/64 1.5 1/2 7/8 3/8-24 3.75 0 1/2 5/8 1.57 1.18 6 1/4 1 3/8 2.34 2.72 4.25 7 3/8 6 7/8 7 5/8 400 (4) 1 3/4-16 1 1/8 4.7 1/2 4 1/2 2 1/4 1 1/4 3/4 15/64 1.5 1/2 7/8 3/8-24 4.5 0 1/2 5/8 1.57 1.18 6 1/4 1 3/8 2.34 2.72 4.25 7 3/8 6 7/8 7 5/8 Front Flange Type NC A1F (MF1 Mounting Style)-X130US (in) Bore (in) MM KK A AA B BA C D DD E EA

VQC

Values for double types are when the switch is ON. 1 5 3 N.C. N.C. 4-position dual 3-port valve (B) 4 2 1 5 3 N.O. N.O. 4-position dual 3-port valve (C) 4 2 1 5 3 N.C.

MGP

C 0.2 C 0.2 B 0.2 B 0.2 Piping Caution A 0.2 A 0.2 Depending on the operating conditions, piping port positions can be changed by using a plug. D (mm) Hexagon socket mounting bolt Hexagon socket mounting bolt 50 56 72 82 98 106 130 142 180 210 Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) MGPM MGPL 1.

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 15 10 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28

CNA

35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 25 to 500 25 to 600 32 to 600 41 to 750 45 to 750 M18 x 1.5 M8 x 1.25 56.5 M18 x 1.5 M10 x 1.25 67 M22

CNA

to 500 Up to 600 Up to 600 Up to 750 Up to 750 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 56.5 67 83 98 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

/N.O. 1 2 3 4 5 A B C Switch Made to Order Nil J Without switch With switch Main valve fluororubber (Refer to page 411.)

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

43 112 11 10 9 30 10 73 225 60 28 99 251 1/4 stroke 63 3/8 47 116 11 12 10 37 10 80 243 65 30 106 269 80 1/2 57 127 11 16 13 40 13 90 270 80 32 116 296 100 1/2 66 137 12 20 16 47 13 100 299 100 35 123 322 1/5 stroke 125 1/2 77 137 12 20 16 55 15 100 305 100 35 123 328 160 3/4 94 155 12 24 20 60 20 108 343 120 38 131 366 93 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

size C4 (4 Onetouch fitting) C4 (4 One-touch fitting) A, B port C6 (6 One-touch fitting) M5 x 0.8 Flow Rate Characteristics Flow rate characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55

MHZ

Refer to page 12-13-1 for further information on auto switches.