ZR -3-2 2 Series ZR Large Size Vacuum Module: Ejector System/Vacuum Pump System Modular Components Introduction System Ejector System Vacuum Pump System 13-3-4 to 13-3-33 13-3-34 to 13-3-49 Component equipment Characteristics Ejector unit ZR1-W Nozzle dia.
across flats 10 2 2 C Model A B C Vacuum inlet direction q Pad dia.
F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.
Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 R A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.
Q Width across flats 12 N M5 x 0.8 Width across flats 10 8 3 5 Y R R F F Width across flats 12 Width across flats 3 Width across flats 10 Width across flats 2 E E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 10.5 13 40 2 12.5 15.5 29.3
Double wiring specification specification 12 13 12 13 12 stations 12 stations 13 stations 13 stations Specified wiring Note 2) Specified wiring (up to 25 solenoids possible) ... ... ... ...
tubing O.D.Q I 5 H R J F Hexagon width across flats 10 Hexagon width across flats 2 E Hexagon width across flats 12 Applicable tubing O.D.Q D C Y 2 R H A B Hexagon width across flats 12 Hexagon width across flats 3 F E D C 3 2 Dimensions: 10 mm Stroke A A B (mm) B C D E F H I J Model ZPR10F10-0-A10 10 12 10 12.5 23.4 39.5 50.5 84.5 Stroke: 10 mm ZPR13F10-0-A10 13 15 23 10.5 13 23.9 40 51
(P A/B) (2) Standard: 1W AC High pressure: 1W Low wattage: 0.5 W Series Configuration Model C [dm3/(s.bar)] b Cv C [dm3/(s.bar)] b Cv 4/2 5/3 (A/B EA/EB) 12 or less 15 or less 29 or less VQZ1120 0.13 0.26 0.54 0.13 0.20 0.54 Metal seal 42 Single 12 or less 15 or less 34 or less VQZ1121 0.19 0.40 0.71 0.26 0.40 0.90 Rubber seal 2 position 10 or less 13 or less 13 or less VQZ1220 0.13 0.26
75 155 22 20 15 M12 x 1.75 26 26 29 M22 x 1.5 35 30 1/2 26 100 38 6.5 118 118 90 35.5 80 35 13 16 145 90 172 27 19 16 M12 x 1.75 27 26 34 M27 x 2 35 32 1/2 34 125 38 6.5 140 140 112 35.5 80 35 15 18 170 112 200 27 19 16 M14 x 2 27 30 34 M27 x 2 35 32 1/2 34 160 M16 x 2 42 9 174 174 140 45 100 38 17 20 205 140 240 36 22 18 28 34 38 M33 x 2 40 36 3/4 43 (mm) Without rod boot With rod boot Bore
at the Number of Manifold Stations (Operated individually) VP4 Model Passage/Stations Station 1 Station 5 Station 10 Station 15 1 4/2 (P A/B) C [dm3/(sbar)] 5.9 5.9 5.9 5.9 b 0.23 0.23 0.23 0.23 Cv 1.5 1.5 1.5 1.5 VQ 1/2 2-position metal seal VQ4 1 250 VQ 4/5 VQ 4/5 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] 6.2 6.2 6.2 6.2 b 0.19 0.19 0.19 0.19 Cv 1.5 1.5 1.5 1.5 VQC 1/2 1 4/2 (P A/B) C [dm3
6.5 6.5 7 7 3H9 depth 2.5 +0.025 0 12 1 B A NN-M4 x 0.7 thread depth 8 4 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 48 58 68 86 96 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-
1/4 2.72 2 5/8 5 53/64 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1 1/2 1/2 7/8 3/8-24 4.5 2 1/4 0 1/2 1.57 1.18 5/8 1/2-13 2 1/16 1 3/8 2 7/16 2.34 4 1/4 2.72 2 5/8 5 53/64 Detachable Rear Clevis Type NC A1D (MP2 Mounting Style) (in) Bore (in) MM KK A AA B C CB CD CW D DD E EA EE F G J L LR M WF XD Y LF P ZD 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 3/8 3/4 1/2 1/2 9/16 1/4-28 2 0.3 3/8 3/8 1.26 1.1 3/
XAH7 depth XL GC 2-P (plug) 2-P Q GA LL GB PB J K WB WA Z G PA + Stroke C + Stroke B + Stroke A + Stroke XAH7 depth XL FA FB S XAH7 depth XL HR E b a With front lock XAH7 c d e MO T-slot dimensions XB (mm) DM HN XAH7 XC XL Bore size (mm) a b c d e End lock mechanism (Locking type manual release) 6.5 10.5 5.5 3.5 9.5 32 Section XX detail 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8
N.C. 2-position double (metal) 4-position dual 3-port valve (B) Coil voltage 4 2 A B B 24VDC 12VDC 5 6 Note) 1 5 3 P EA EB N.O. N.O. 2 2-position double (rubber) 4-position dual 3-port valve (C) 4 2 A B C C: Locking type (Manual) Function Note) 1 5 3 P EA EB N.C. N.O.
JIS B 4636 CLS 10 40 2 point angle socket 10 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 13 2 point angle socket 13 50 JIS B 4636 CLQ 13 2 point angle socket 13 JIS B 4636 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 MLGP 63 17 13 2 point angle socket 17 2 point angle socket 13 4. Allow at least 0.5 seconds from a locked stop (intermediate stop of the cylinder) until release of the lock.
JIS B 4636 CLS 10 40 2 point angle socket 10 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 13 2 point angle socket 13 50 JIS B 4636 CLQ 13 2 point angle socket 13 JIS B 4636 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 MLGP 63 17 13 2 point angle socket 17 2 point angle socket 13 4. Allow at least 0.5 seconds from a locked stop (intermediate stop of the cylinder) until release of the lock.
Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34 33 Lock-up Cylinder Double Acting, Single Rod Series CL1 40, 50, 63, 80
16.2 34 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 P 1 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable D-sub connector: equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch
(mm) C D MHZ2-10D-X46 MHZ2-16D-X46 MHZ2-20D-X46 MHZ2-25D-X46 Model A B D9 4.5 11 5.2 7.5 7 13 5.8 2010 7 15 6 10.7 7 20 6.2 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. Reference values to establish criteria for needle adjustment.
(mm) C D MHZ2-10D-X46 MHZ2-16D-X46 MHZ2-20D-X46 MHZ2-25D-X46 Model A B D9 4.5 11 5.2 7.5 7 13 5.8 2010 7 15 6 10.7 7 20 6.2 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. Reference values to establish criteria for needle adjustment.