Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

But, F mark is indicated on the inside of the pad when the plate is removed. 260

VK3000

Port size (P, A and B port) Rated voltage M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz R1, R2: M5 4 Option 5 6 24 VDC 12 VDC Nil None With bracket (Not assembled) 7 240 VAC, 50/60 Hz 9 Other Option F Option Part No. Description Part no.

VK3000

F Option Part No. Description Part no.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Barrier 52-SY7000 Without barrier Z728.H MTL728P+ KFD0-SD2-Ex1.1065 Nil A B F Note) One barrier per solenoid supplied.

ZQ-OM01401

(1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A F1-LC3 3.2 () F1-LC4 4 () 9 Assy ZQ1-BK1-A 25 - No.ZQ-OM01401-B 7.3 b a a a 1. (2 ) 2.

ZB-OM00301

Q2 +COM 30.30.4 4 L L 5 DC24V LO L 6 DC12V M M 5 MO M 5 4300 5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4

Compact manifold regulator ARM5 Series

ARM ARM Fitting size 18.5 C4 C6 N3 N7 4 6 5/32 1/4 ARP 8.5 14 IR-A IR Straight type IRV VEX SRH V SRP SRF Elbow type ITV IC ITVH W X ITVX Y PVQ VY1 One-touch fittings for regulator VBA VBAT Fitting size Elbow Elbow Elbow Straight V W X Y AP100 4, 5/32 2.5 6 11 35.5 6 3 6.5 11 36 1/4 6.5 6 11.5 38.5 8, 5/16 Note) The O-ring is attached.

5 Port Solenoid Valve Series SV

Specification SV1000 SV2000 Applicable series Stacking type cassette base manifold Manifold type Common SUP, EXH 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) 18 stations 20 stations Max. number of solenoids 18 points 26 points 1(P)/3, 5 (E) port C8, N9 C10, N11 Port size C3, C4, C6 N1, N3, N7 C4, C6, C8 N3, N7, N9 4(A)/2(B) port Flow Characteristics Flow characteristics Port size

Large Type Vacuum Unit Series ZR

C4 Double SOL.

Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Rated Flow Range: 0.05 to 5 L/min, Flow Adjustment Valve: None (Straight), Port Size: ø6, Output Specification: Out 1: PNP; Out 2: Analog 4 to 20 mA, Lead Wire: Lead Wire w/Connector, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: Bracket, w/o Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

PSxx-OML0002CN

F 0] [F] 2 2 [F][-] [F 0] 26 ISE30A MPa ""M ZSE30A(F) kPa ISE30A P ZSE30A(F) psi [F 1] OUT1 27 ONOFF ISE30A0.500 MPa ZSE30A-50.5 kPa ZSE30AF50.0 kPa ISE30A0.050 MPa ZSE30A5.1 kPa ZSE30AF5.0 kPa ON OFF -24No.PS-OML0002CN-G [F 2] OUT2 30 [F 1]OUT1 OUT1 [F 3] 30 2.5 ms [F 4] 31 1000 [F 5] 32 [F 6] 34 0 [F 7] 35 OFF [F 8] 36 OFF [F90] 37 OFF [F97] 39 OFF [F98] 41 [F99] 43

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

LEC-OM02904

PB35 0.00 PB36 0.00 PB37 100 PB38 0.0 PB39 0.0 PB40 0.0 PB41 1125 PB42 1125 PB43 0004h PB44 0.0 PB45 CNHF 2 2 0h (1) 0 22 2(2) [Hz] [Hz] 0 1 2250 5F 4.5 2 (2) 0 -40.0dB F -0.6dB 1. C4 TM MR Configurator2 2. 7.7 5 19 5 5.3 (No.PC) * * ** 5.3.1 No.

lPSMt

To 140" F High Temperature 2Oo F To 212o F Low Temperature -2O F To 140' F Single Actino Double Actinq Single Actino Double Actino Single Actinq Double Actinq Supplv Pressure 20 to 1OO psi Siqnal Pressureo 3 to 15 psi (split ranqinq possible) Rotarv Anole (stroke 10" to 28'(10-85mm) (0.3" to 3.4" std.)5.9" max.)

lPSMt

To 140" F High Temperature 2Oo F To 212o F Low Temperature -2O F To 140' F Single Actino Double Actinq Single Actino Double Actino Single Actinq Double Actinq Supplv Pressure 20 to 1OO psi Siqnal Pressureo 3 to 15 psi (split ranqinq possible) Rotarv Anole (stroke 10" to 28'(10-85mm) (0.3" to 3.4" std.)5.9" max.)

Series: VQ1000, IN Port Size: C4 (One-touch Fitting for ø4), OUT Port Size: C4 (One-touch Fitting for ø4), Option: F (Bracket)