Electric Actuator with Integrated Guide For the dimensions of the motor mounting position, refer to the dimensions on page 70 for the guidelines for assembly and designing. 80 46 (2 x n1)-6.6, Drill through 13, counter bore depth 6 5 thread depth 4 4-M2 x 0.4 Photo micro sensor 12 (Groove depth 1) E D Proximity sensor 7.5 Stroke + 96 (Table movement range) (25.5) 97.5 4.5 1 60 2 x n2-M2.6 x 0.45 4-C3 PCD3 56 8 4 5.8 3.3 thread
) (Station 1) Light/surge voltage suppressor (Station n1) (Station 1) With option 60 45.5 37.5 10 74.5 (For DIN rail mounting) (7.5) 11.8 n1 = Valve stations n2 = Input block stations Individual EXH spacer Individual SUP spacer L2 = L1 10.5 L3 = 10.5 x n1 + 53 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 L1: DIN rail overall length Valve stations (n1) 2 3
C85RBF Y Without magnet, Built-in magnet (Band mounting type) 20/25 Stroke B SW WH G1 EE EE G2 4-FF D D KK C ND K 3 N1 N2 FX NA NA AM F S + Stroke H ZZ + Stroke Head cover Y Head cover F (mm) F FX NA Bore AM FF KK ND h8 S C D EE G1 G2 H K N1 N2 SW WH ZZ 0 0.033 0 0.033 20 20 M5 x 0.8 depth 9 M8 x 1.25 8 28 30.4 22 30 6 24 76 13 10 106 20 G 1/8 22 8 29 15 26 25 M6 x 1 depth 11 M10 x 1.25 10
) 0 50 100 150 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4
Clean air, N2, Ar, CO2, Pure water Fluid Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Grade B Air, N2, Ar, CO2, Water Air, N2 Port size Proof pressure 1.5 MPa Grade A Clean air, N2 Clean air, N2, Ar, CO2, Pure water Max. operating pressure 1.0 MPa Fluid Grade B Air, N2 Low pressure type High pressure type Air, N2, Ar, CO2, Water 0.02 to 0.2 MPa Set pressure
(n=2, 4, 6) 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 10 65 20 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 20+50( ) (n=2, 4, 6) 10 75 15 75+55(n2) n2 2 D-B59W 15 75 20 D-A3lA D-G39A D-K39A D-A44A 35+30(n2) 10 100 35 100+100(n2) Mounting Bracket Auto Switch Mounting Band Refer to p.1.4-35 for part numbers of the mounting brackets.
OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).
) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
= 10.5 x n1 + 42 L7 = 21 x n2 + 81 B A B A B A B A Dimensions are the ones for SV1300--.
4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)
= Input block stations (Station n2) Light/Surge voltage suppressor L2 = L1 10.5 L3 = 10.5 x n1 + 53 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 60 45.5 10 11.8 (for DIN rail mounting) (7.5) L1: DIN rail overall length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block Stations (n2) 0 1 2 3 4 5 6 7 8 185.5 210.5 223 248
New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer
weight Axial foot 1.44 1.88 2.44 3.72 Flange 1.29 1.79 2.23 3.47 Weight for additional stroke per 50mm 0.06 0.08 0.09 0.15 Calculation example: RHCL32-600 PBasic weight 2.44 (Foot style 32) PBasic weight 0.09/50 Stroke PCylinder stroke600 Stroke 2.44+0.09 X 100/50=2.62kg 4.10-5 High Power Cylinder Series RHC Front flange Rc(PT)P GB Rc(PT)P GA 4-R chamfer 4-FD H2 NN MM I H1 MK/MK2 ND FY FW
Flange material: Carbon steel Rod end nut L1 Rear flange type Rear flange type/RQG, RDQG mm Bore size (mm) Stroke range (mm) A 15 to 50 20 44.5 FV FW 15 to 50 25 49.5 mm B + Stroke A + Stroke 2-6.6 L Bore size (mm) 8 FX B L FV FW FX FZ FZ 20 4.5 40.5 60 32 39 48 Rod end male threads 25 5 44.5 64 36.5 42 52 } Rear flange type Double clevis type Applicable (All dimensions but A is identical
Data Flange material: Carbon steel Rod end nut L1 Head Side Flange Style Head side flange style: RQG/RDQG Bore size (mm) Stroke range (mm) A 20 15 to 50 44.5 FV FW 25 15 to 50 49.5 B + Stroke A + Stroke 2-6.6 L Bore size (mm) 8 FX B L FV FW FX FZ FZ 20 4.5 40.5 60 32 39 48 Rod end male thread 25 5 44.5 64 36.5 42 52 } (All dimensions but A is identical to those of the basic style.)
MY-A32H 74 5.5 73.2 15 8(MAX20) 90 RB2015 6 MY-A40H 74 5.5 73.2 15 9(MAX25) 100 4 Model E EA EB EC EY F FB FC FH FW h S T TT W Shock Absorber No.
(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5
MY-A32H 74 5.5 73.2 15 8(MAX20) 90 RB2015 6 MY-A40H 74 5.5 73.2 15 9(MAX25) 100 4 Model E EA EB EC EY F FB FC FH FW h S T TT W Shock Absorber No.
Lead wire type F0 Without lead wire Option F kit: D-sub connector kit Single wiring FS Nil B R None Back pressure check valve External pilot specification F kit: D-sub connector kit Double wiring FW P kit: Flat ribbon cable kit Single wiring Note) Enter "-BR" for both options.