Rubber seal 5 Port Solenoid Valve Series SYJ7000

2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal pilot Type SS5YJ7-42-C6 Type SS5YJ7-42-C8 Note)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

per/station: 19 2 stations: 126 Addition per/station: 38 2 stations: 209 Addition per/station: 60 C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) Side Top 2 to 20 stations Rc 1/8 VV3QZ15VQZ100 VQZ115 V100 C4 (For 4) C6 (For 6) C8 (For 8) Rc 1/8 2 to 20 stations VV3QZ25VQZ200 Rc 1/4 Side VQZ25 SY SYJ 1(P) port Rc 3/8 3(R) port Rc 1/4 C6 (For 6) C8 (For 8) C10 (For 10) Rc 1/4 2 to 20 stations

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Rc(PT) 1/8 SY C4 (for 4) C6 (for 6) C8 (for 8) Rc(PT)1/8 Rc(PT) 1/4 Side VV3QZ25-lll VQZ2l5 VQZ200 2 to 20 2 stations:126 Additional station:38 SYJ VK C6 (for 6) C8 (for 8) C10 (for 10) Rc(PT)1/4 1(P)port Rc(PT)3/8 3(R)port Rc(PT)1/4 Side VV3QZ35-lll VQZ3l5 VQZ300 2 to 20 2 stations:209 Additional station:60 VZ VT Note 1) Threaded port style.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible The flow rate value and the device status can be figured out easily via the process data.

VZ100/300/500

1/8 1/8 1/8 1/8 C6 Base mounted For internal pilot VZ54 VV3Z5-41-1 1/4 1/4 C8 Body ported For external pilot VV3Z5-21R-1 VZ52R 2.2 0.34 0.55 2.4 0.32 0.62 1/4 1/8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VV3Z5-41R-2 1/4 1/4 1/8 1/8 C6 C8 2.2 2.0 1.6 2.1 0.35

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1.6 2.1 0.34 0.39 0.35 0.35 0.27 0.32 0.24 0.55 0.59 0.59 0.59 0.47 0.39 0.51 2.3 2.4 2.3 2.4 2.2 2.2 2.3 0.27 0.32 0.27 0.36 0.32 0.27 0.31 Body ported for internal pilot 0.59 0.62 0.54 0.66 0.56 0.54 0.59 1/8 1/4 1/8 1/4 10-SYJ72M 1/8 1/8 1/8 1/8 C6 C8 Type 10-SS3YJ7-40 Type 10-SS3YJ7-41 Base mounted for internal pilot 10-SYJ74M 1/4 1/4 Type 10-SS3YJ7-42-01 Type 10-SS3YJ7-42-C6 1/4 Type

VQC

Series VQC1000 Base Mounted Plug-in Unit How to Order Manifold VQC F P T B VV5QC 1 1 08 C6 FD1 L M / / / Kit / SQ VQ0 VQ4 S Kit B VV5QC 1 1 08 C6 SDQ VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option VQZ Series Nil None All stations with back pressure check

5 Port Air Operated Valve Series SYA3000/5000/7000 1

fitting for 1 4" One-touch fitting for SYA5000 One-touch fitting (Metric size) Bracket 5 16" One-touch fitting for VM Symbol Port size Applicable series C4 C6 C4 C6 C8 C8 C10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without bracket 1 4" One-touch fitting

5 Port Air Operated Valve SYA3000/5000/7000 Series

side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 SYA5000 3 SYA3000 5 SYA5000 SYA7000 7 SYA7000 SYA 5 1 C6 20 Body ported 40 SYA 5 1 Base mounted Series 3 SYA3000 5 7 SYA5000 SYA7000 P, R port thread type Type of actuation Nil Rc 2 position single (A)4 2(B) G F N NPT 1 NPTF T 1 (P) (EA)5 3(EB) Port size 2 position double

SYA3000/5000/7000

side bracket Series SYA5000 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 3 SYA3000 5 SYA5000 SYA7000 7 SYA7000 SYA 5 1 C6 20 Body ported 40 SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Rc Nil G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Rc Nil 2 position single G F Port size 1

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

center SMC 5 3 position pressure center Dual body type (double/3 position) Pilot type Internal pilot External pilot Nil R Manifold SS5Y3-45GD-05U-C6 Rated voltage SS5Y3-45GD-05U-C6 . 1 set (manifold part number) SY3140-5FU . 3 sets (single solenoid part number) SY3245-5FU . 1 set (double solenoid part number) 5 24VDC Manual override Nil Non-locking push type D E Slotted locking type Knob

Serial Transmission System Series EX250 Series EX500

-05B-C6 1 set (manifold part no.)

VCC

1 1 1 1 2 1 1 2 1 1 1 2 1 2 2 1 1 1 1 1 3 2 3 VCC12-1A-1 (for VCC12-00) 1 set unit VCC12(D)-00 (dedicated) Orifice body assembly VCC12D-1A-1 (for VCC12D-00) VNA 1 set unit VNB O-ring assembly 1 set unit VCC12-OR-1 SGC O-ring assembly Orifice assembly 1 set unit VCC12-OR-4 SGH 1 set unit VCC13-1A-1 VNC VCC13-00 (dedicated) 1 set unit VNH O-ring assembly VCC13-OR-1 O-ring assembly 1 set unit

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

5 Port Solenoid Valve Series SQ1000/2000

The solenoids are counted as Single : 1 point Double, 3P: 2 points Dual 3 port: 2 points Manifold mounting Symbol Mounting DIN rail mount type Direct mount type D E How to Order Valves 1 1 1 Y 5 B C6 Series SQ 3 Manifold block Specifications Without manifold block With manifold block With manifold block Built-in back pressure check valve Symbol Nil Note 1) SQ1000 SQ2000 1 2 M Note 2) Type

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

0.27 0.32 0.24 0.55 0.59 0.59 0.59 0.47 0.39 0.51 2.3 2.4 2.3 2.4 2.2 2.2 2.3 0.27 0.32 0.27 0.36 0.32 0.27 0.31 1/8 1/4 1/8 1/4 0.59 0.62 0.54 0.66 0.56 0.54 0.59 Body ported for internal pilot SYJ72 Type SS3YJ7-21 1/8 1/8 1/8 1/8 C6 C8 Type SS3YJ7-40 Type SS3YJ7-41 Base mounted for internal pilot SYJ74 1/4 1/4 Type SS3YJ7-42-01 Type SS3YJ7-42-C6 1/4 Type SS3YJ7-42-C8 Body ported for external

A

16 3/8 3/8 3/4 5/8 1.57 1 1/2 3 3/4 1 1/4 1 3/8-24 325 (3.25) 1 1/8 3.9 1/2 0 7 1/2 1 1 1/4 1.18 2.34 4 1/4 1 3/8 3/4 5/8 2.72 8 1/4 3/4-16 3/4 7/8 1/2 5/8 1.57 1 1/8 1 1/2 3/8-24 4 1/2 1 1/4 1 400 (4) 4.7 1/2 0 7 1/2 1 1 1/4 1.18 2.34 4 1/4 1 3/8 3/4 5/8 2.72 8 1/4 3/4-16 3/4 7/8 1/2 5/8 Courtesy of Steven Engineering, Inc. !

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

exhaust center 3 position pressure center 2 3 4 5 5 24VDC Rated voltage 2 1 Station U side D side Pilot type 24VDC -COM SMC Nil R Internal pilot External pilot SS5X3-45GD-05U-C6 .1 set (manifold part number) SX3140-5LOZ ... 3 sets (single solenoid part number) SX3240-5LOZ ... 2 sets (double solenoid part number) The "" symbol indicates mounting.