Series: 25A-PFM5, Rated Flow Range: 11 [2 to 100 (50) L/min], Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Operation Manual: With Instruction Manual, Calibration Certificate: None, Lead Wire: W (w/Lead Wire w/Connector, Rubber Cover for Connector, Silicone Rubber)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4), Accessories: N (w/o Bracket, w/o Silencer)

1

n = 4 to 24 n = 1 to 3 n = 4 to 24 n = 1 to 3 42.3 62.5 n: Number of stations 3 5 4 3 2 1 1 3 1 2 3 4 5 n: Number of stations Pitch 10.5 Pitch P = 16 (SY5000) P = 19 (SY7000) Make sure to mount in the right direction. Make sure to mount in the right direction. (20) SY5000: SY50M-86-(N) SY7000: SY70M-86-(N) Name plate is the number of stations (1 to 24).

2

mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8

I

) B Backlit LCD 01 Direct Piping 1/8 T1 NPTF 1/8 P I P I N G S P E C I F I C AT I O N S S W I T C H S P E C I F I C AT I O N S 01 Direct Piping PT 1/8 T1 NPTF 1/8 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output S W I T C H S P E C I F I C AT I O N S 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output W I R I N G S P E C I F I C AT I O N S 0.6m L Grommet entry

V

5 ~ 60C / 40 ~ 40F Temperature Rc(PT) 1/8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc

Secondary Batteries

2 pcs. 1 pc. n pcs.

F

H O W T O O R D E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

70pvpump

2 ADC12 (Aluminum) SCS14 (Stainless steel) PA5000 Diaphragm material Thread type 1 2 PTFE NBR Nil T Rc NPTF G NPT F N T, F, N are options.

ITV

ITV X88 2 0 1 0 S 0 1 2 High-speed response time specifications Model Pressure range 1 2 1000 type 2000 type 1 3 5 0.1 MPa 0.5 MPa 0.9 MPa Pressure display unit 2 3 4 5 MPa kgf/cm2 bar PSI kPa Power supply voltage Input signal 0 1 24 VDC 12 to 15 VDC 0 1 2 3 Current 4 to 20 mA (Sink type) Current 0 to 20 mA (Sink type) Voltage 0 to 5 VDC Voltage 0 to 10 VDC Cable connector type S L N Straight

q"s

@-@n-m a 16 points preset type Note 1) E in parl number is lhe same modelno. for the standard products.

A

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS

Precision Regulator

IRM 10 3 G ARJ A IR X465 0 AR425 to 935 Set pressure and quantity 0 1 2 0.2 MPa setting 1 to n pcs. 0.4 MPa setting 1 to n pcs. 0.8 MPa setting 1 to n pcs.

ITV

connector S L N Option Option Monitor output Bracket Thread type 0 None (for preset input) Analog output 1 to 5V DC Switch output/NPN output Switch output/PNP output Analog output 4 to 20mA Without bracket Flat bracket L-bracket B Port size Rc(PT) NPT NPTF G(PF) 1 2 N T 1/4 (2000, 3000) 3/8 (2000, 3000) 1/2 (3000) 2 3 4 C 3 Option 4 F 1.12-1 Option Option Series ITV2000

IR1000/2000/3000

IRM 10 3 G Copper-free Specifications 2 Set pressure and quantity External and internal copper parts are changed to stainless steel or aluminum. 0.2MPa setting 1 to n pcs. 0.4MPa setting 1 to n pcs. 0.8MPa setting 1 to n pcs. 0 1 2 Standard part number 20 Note) Contact SMC if equipped with pressure gauge.

tTV2000/3000

M 1 2 x 1 Cable connection threads suP (1) 2-Ro(PT) 114,318, 1/2 Port size Mounting hole L-bracket tNt-398-0-6 (optional) 2-Rc(PT) 1/4,3/8, 1/2 SUP port, OUT port Eleclno-Pltoulnalic Relulatnn rTUz000/3 lt'iler ilile $ruciliciliotts 2 through I station manifold.

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)