EXxx-OMZ0016

Wireless Wireless Communication channel WEB distance Protocol Base Remote select function function (F.C.S.) 1 EXW1 EXW1 Up to 100 m V.1.0/V.2.0*1 Available*2 2 EXW1 EXW1+EX600 *3 V.1.0 NA 3 EXW1 EX600 Up to 10 m V.1.0 NA 4 EX600 EXW1 Up to 10 m V.1.0 NA Available*4 5 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*4 6*5 EX600 EX600 Up to 10 m V.1.0 NA Available *1: For more details, check

CXT

23 55 53 28 M8 x 1.25 10 86 6.9 9.5 16 PA Bore size (mm) M MM (N) (NA) NN PB PW Q QW RB RW S T U W X Y Z 12 M4 x 0.7 M8 x 1.0 6 8 27 30 60 80 85 26 RB0806 17.5 96 13 1 77 22 7.5 5 16 M5 x 0.8 M8 x 1.0 8 8 27 45 70 95 90 40 RB0806 15 103 13 2 92 22 7.5 5 20 M6 x 1 M10 x 1.0 10 10 29 60 100 120 105 46 RB1007 26 122 17 2 117 29.5 9 5.5 25 M6 x 1 M14 x 1.5 10 12 50 60 100 130 105 50 RB1411

CXT

Stroke X+Stroke H 4-LD Through, Counter bore B Depth C 4-MM HP Depth M Back side 4-J Depth JK HG HA T PA T (N) d d NN RW RW PW QW PB GP lE W Y Z 2-M5X0.8 2-RB G G HT U (NA) (Option) A L HN(MAX.)

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88

REA/REB

Compared with the previous type (series REA: 300mm/s), the tact time can be shortened by approximately 1/2. Smooth acceleration & deceleration at 5m/s Acceleration Stroke 15m/s (REB) 5m/s (REA) REB REA 1/2 T T Time Cushion ring The exterior of the cushion ring is provided with a variable throttle groove in its longitudinal direction.

REA/REB

1 Sine Rodless Cylinder Series REA/REB (Maximum speed: 300 mm/s) (Maximum speed: 600 mm/s) RE A B REC CX CY MQQ M RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 Series REA CE2 Series REB ML2B C J G5-S CV MVGQ CC RB J Series REA (300 mm/s) Series REB (600 mm/s) DGuide type Model Page Guide type Model Page -X Direct mount type REBR 10-2-63 Basic type REA 10-2-6 20High precision guide type (Single

REA/REB

type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products Glass products Sine rodless cylinder Series REA/REB Maximum speed (300 mm/s) sensitive workpieces Allows rapid transfer of impact Maximum speed (600 mm/s) m/s 2 or less (REA) or 15 m/s 2 or less (REB) Throughput dramatically

LJ1H

(B contact) 2 pcs.

Vacuum

(mm) 0 2 o 2 0 4 a 4 0 6 0 6 0 8 0 8 1 0 0 1 0 13 s13 1 6 s 1 6 20 s2O 25 o25 92 o32 40 s4O 50 o50 S Silicone rubber U Urethane rubber F Fluorine rubber GN Conductive NBF (o2-o16) GS Qonductive Silicone (o2-o 16) Vacuum thread dia.)

Vacuum

(mm) 0 2 o 2 0 4 a 4 0 6 0 6 0 8 0 8 1 0 0 1 0 13 s13 1 6 s 1 6 20 s2O 25 o25 92 o32 40 s4O 50 o50 S Silicone rubber U Urethane rubber F Fluorine rubber GN Conductive NBF (o2-o16) GS Qonductive Silicone (o2-o 16) Vacuum thread dia.)

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

of 500 mm/s, use graph (2).

Enclosure: W (IP67), SI Unit: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 10 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: C8 (ø8 One-touch Fitting)

Enclosure: W (IP67), SI Unit: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 5 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: C8 (ø8 One-touch Fitting)

Enclosure: W (IP67), SI Unit: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 3 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: C8 (ø8 One-touch Fitting)

Enclosure: W (IP67), SI Unit: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 6 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: C8 (ø8 One-touch Fitting)

Enclosure: W (IP67), SI Unit: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 8 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: C8 (ø8 One-touch Fitting)

Enclosure: W (IP67), SI Unit: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 10 Stations, P, E Port Entry: U (U Side 2~10 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: C8 (ø8 One-touch Fitting)

Slider Type/Ball Bushing Bearing

CY1H25 (Nm) 64 56 50 40 30 50 40 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H25 CY1HT25 CY1HT32 Model CY1H10 CY1H15 CY1H20 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm 10 10 2 2.5 3 4 5 3 4 5 CY1H10 M3 2 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 100 300 500 1000 1000 70 M1 M2 Piston speed mm/s Piston speed mm/s Graph (3) Graph (2) Moment generated

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

With air cushion 2 x M5 x 0.8 Relief port RA GA WA RA GA WA Cushion valve (Width across flats WH) Cushion valve (Width across flats WH) 10 10 20 20 ZZ + 2 Stroke S + Stroke (mm) A AL Bore size Stroke range Standard Long B1 C D E F GA H H1 I J K KA MM NA P RA S 1 2 ZZ 20 20 20 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19

Basic Type/Direct Mount Type

Q N F I NA F N CC 0.1 + CY3B6 to 15 CY3B50, 63 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111