Flow Rate Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Output Specifications: NPN; NPN, Option 1: -, Unit Specifications: -, Option 2: -, Calibration Certificate: -

Flow Rate Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Output Specifications: PNP; PNP, Option 1: -, Unit Specifications: -, Option 2: -, Calibration Certificate: -

Flow Rate Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Output Specifications: NPN; Analog 4 to 20 mA, Option 1: -, Unit Specifications: -, Option 2: -, Calibration Certificate: -

Flow Rate Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Output Specifications: PNP; Analog 4 to 20 mA, Option 1: -, Unit Specifications: -, Option 2: -, Calibration Certificate: -

Flow Rate Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Output Specifications: NPN; Analog 1 to 5 V, Option 1: -, Unit Specifications: -, Option 2: -, Calibration Certificate: -

EXxx-OMY0006CN

No.EX##-OMY0006CN SI / / EX245-FPS1 EX245-FPS2 EX245-FPS3 / / EX245-DX1 / / EX245-DY1 EX245-FPS1/2/3 Firmware version (FW) : 2.1.X(X 0 ) Hardware version (HW) : 03 FW : FW : watch dog : PROFINET FW 2. 1.

EXxx-OMW0014CN

SI FW --1 SF/BF LED SI Web --2 SF/BF LED SI FW FW 81 No.EX-OMW0014CN-A . 13-4 US1/US2 LED No. 1 US1 LED SI US1 US1 SI US2 2 US1 LED US1 (DC19.2 V ) 3 US2 LED SI US2 US2 . 13-5 No. SI 1 SI US2 US2 . 13-6 FO LED No. 1 FO1 LED FO2 LED 1 2 02dB 2 FO1 LED FO2 LED 1 2 0dB 82 No.EX-OMW0014CN-A 13.2.

Table of Contents

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

ZP

Type/ZPRmF ZPRmFm-(04/06/08)-(B5/B8) y t e r Component Parts w No.

Table of Contents

22 1 2 KGT16-04 40.5 46 116 Reference dimensions after R thread installation.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

KJ

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8 1 4 3 8 1 2 Products color M5 M6 01 02 03 04 00 04 06 08 10 12 16 99 23 04 06 3.2 M5 x 0.8 M6 x 1.0 R , Rc R , Rc R , Rc R , Rc Thread connection Tubing (Rod) connection 4 6 8 10 12 16 4 Symbol 2 Body White Black

Table of Contents

0, Metal joint q, w, Terminal i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VVFS5000-1A-1!0 Manifold block assembly 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

AC

Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Table of Contents

4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-

Table of Contents

Symbol A R P Symbol 2 Body class 2 Orifice dia. LVQ Metric sizes 4 04 06 4 6 N.C.

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N C2 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y B3 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N Vacuum inlet: One-touch fitting 10 13 16 Applicable tubing O.D.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

plug connector (M): DIN terminal (D, Y): SY9 40(R)-WO3 4 5 M8 connector (WO): VFR 3 4 5 3 4 5 3 4 5 D Y SY9 40(R)SY9 40(R)-M03 04 03 04 03 04 03 04 VQ7 Applicable cable O.D. 3.5 to 7 109.2 101.7 75.4 [82.4] Max. 10 202.3 64.9 90.4 (Lead wire length) 60 75.4 Approx. 300 79.9 M8 x 1 (Lead wire length) Approx. 300 86.5 [93.5] 62.4 Pg7 113.5 29.5 29.5 29.5 29.5 29.5 29.5 29.5 29.5 120 184.1