0.4

For L dimension, refer to the dimensions of each kit. L 1.25 P=12.5 5.25 7.5 J kit 35 25 T 5.5 kit L Dimension L = 12.5 x n + 10.5 No. L dimension 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 L kit No. L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No.

MXQ

10 16 12 4 MXQ-CT12(L)-X11 15 32 G MXQ-CT12(L)-X12 25 42 B C MXQ-CT16(L) 5 23 J MXQ16(L) M10 x 1 M5 x 12 MXQ-CT16(L)-X11 15 33.5 35.5 20 12 17 14 5 33 MXQ-CT16(L)-X12 25 43 A K MXQ-CT20(L) 5 27 MXQ20(L) MXQ-CT20(L)-X11 M5 x 14 M12 x 1.25 15 41 44.5 25 23 37 13 17 6 MXQ-CT20(L)-X12 25 47 MXQ-CT25(L) 5 30 MXQ25(L) M14 x 1.5 M6 x 18 MXQ-CT25(L)-X11 15 40 49 53.5 31 15 28 19 6 MXQ-CT25(L)-X12

F

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

Modular F.R.L. Unit

Note 2) For M5 and NPT thread type.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Modular F.R.L. Unit

Note 3) For M5 and NPT thread types.

Electric Actuators

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

Mini Free Mount Cylinder

M4 x 35 l M4 x 40 l M4 x 45 l M4 x 50 l M4 x 55 l M4 x 30 l M4 x 35 l M4 x 40 l M4 x 45 l M4 x 50 l M4 x 55 l M5 x 35 l M5 x 40 l M5 x 45 l M5 x 50 l M5 x 55 l M5 x 60 l M5 x 65 l M5 x 70 l M5 x 75 l M5 x 80 l 20 8.5 M4 x 20 l 9.5 9.5 25 M4 x 25 l 8 7.5 25 M5 x 25 l 11.5 12 Series CUJ Clean Series How to Order Double acting 10 12 30 D C D UJ B F8N Number of auto switches Clean Series Nil

Air Slide Table Series MXQ

B C 25 42 MXQ-CT12 (L)-X12 5 23 MXQ-CT16 (L) J M5 x 12 M10 x 1 MXQ16 (L) 15 35.5 12 33.5 14 20 5 17 33 MXQ-CT16 (L)-X11 A K 25 43 MXQ-CT16 (L)-X12 5 27 MXQ-CT20 (L) MXQ20 (L) M5 x 14 15 13 37 44.5 41 17 25 6 23 M12 x 1.25 MXQ-CT20 (L)-X11 25 47 MXQ-CT20 (L)-X12 5 30 MXQ-CT25 (L) MXQ25 (L) M6 x 18 M14 x 1.5 15 40 15 49 53.5 19 31 6 28 MXQ-CT25 (L)-X11 25 50 MXQ-CT25 (L)-X12 1) Size of hexagon

Vacuum Module Series ZX

(VJA324) ZX1-VJ114K1, J1 AMJ Port size 1 2 ZX1-VJ3 4K3, J2 M3 M5 M3 x 0.5 M5 x 0.8 Pilot port/ External release port AMV 1 2 K8 ZX1-VJA3 4 AEP K6 Air operated N.C. (ZX1A) Table (4) How to Order Ejector Assembly 05 ZX1 1 D W HEP Table (2) How to Order Solenoid Valves Z L 5 ZX1 VJ114 Related Assembly no. Ejector type (Exhaust type) Equipment Ejector unit nozzle dia.

Parallel Style Air Gripper Series MHZ

MHC l MHT Model MHZ26 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 Max. screw-in depth ( l mm) Model Applicable bolts Max. tightening torque (Nm) Max. screw-in depth ( l mm) MHY 5 MHZ2-6 Note) M2 x 0.4 0.15 4 MHW 8 MHZ2-10 M3 x 0.5 0.9 6 10 MHZ2-16 4.5 M4 x 0.7 1.6 -X 12 MHZ2-20 3.3 8 M5 x 0.8 13 MHZ2-25 M6 x 1 5.9 10 MRHQ 16 MHZ2-32 M6 x 1 5.9 10 MHZ2-40 13 M8 x 1.25 13.7 MA Note) Except

0.4

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Stations 1 2 3 D side U side 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 152 141 130 119 108 64 97 53 86 31 42 75 175 162.5 150 137.5 125

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

M5 Note 4) (68.4) 57.3 PE Vacuum (V) port (M5) Note 4) 20.3 29.4 P V 9.7 Exhaust part 17.7 22.8 0.8 87.2 Note 1) 10 Circuit diagram 5 6 E F Note 1) The above dimensions are for ZQ1 1U-K2 L-F .

Modular F.R.L. Units

0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 00 0 0 1000 2000 3000 4000 5000 0 1000 2000 3000 500 1000 1500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AR50(K)-B Rc1 AR60(K)-B Rc1 0.6 0.6 0.5 0.5 Outlet pressure [MPa] Outlet pressure [MPa] 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 5000 10 0 0 0 5000 10 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 70 AR10-A Series AR20-B to AR60-B

ISO Cylinder

EE G1 G2 H K KK L LD LH LX N1 N2 NA S SW (WH) (XB) ZZ 8 12 16 4 M5 x 0.8 19 5 16 M4 x 0.7 23 3.5, 6.5 counterbore depth 4 8 14 23.5 9.5 15 58 7 4 12 74 10 12 16 4 M5 x 0.8 19 5 16 M4 x 0.7 23 3.5, 6.5 counterbore depth 4 8 14 23.5 9.5 15 58 7 4 12 74 12 16 20 6 M5 x 0.8 25 6 21 5 M6 x 1 26 4.5, 8 counterbore depth 5 10 16 29.5 10.5 18.3 67 10 5 16 88 16 16 20 6 M5 x 0.8 25 6 21 5 M6 x

Magnetically Coupled Rodless Cylinder

Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t N m 4.4 1.37 2.65 13.2 Tightening torque Square nut l t Service Life and Replacement Period of Shock Absorber Caution 1.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.