Body Size: ø20mm, Body Material: Aluminum, Mounting Plate: None, Attachment: PS [with Stopper; Silicone Rubber (White)], Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2, Suffix: X1

Body Size: ø20mm, Body Material: Stainless Steel, Mounting Plate: None, Attachment: w/o Vibration Suppression Cover, Pressure Sensor: with Pressure Sensor; Part Number PSE541-M5-X2

Body Size: 20 (ø20mm), Body Material: Aluminum, Mounting Plate: None, Attachment: Basic Type, without Attachment, Pressure Sensor: S (with Pressure Sensor; Part Number PSE541-M5-X2)

Body Size: 20 (ø20mm), Body Material: Aluminum, Mounting Plate: T (Aluminum), Attachment: w/o Vibration Suppression Cover, Pressure Sensor: S (with Pressure Sensor; Part Number PSE541-M5-X2)

Body Size: 80 (ø80mm), Body Material: S (Stainless Steel), Mounting Plate: None, Attachment: Basic Type, without Attachment, Pressure Sensor: S (with Pressure Sensor; Part Number PSE541-M5-X2)

Body Size: 20 (ø20mm), Body Material: Aluminum, Mounting Plate: T (With mounting plate - Aluminum), Attachment: PN [with Stopper; NBR (Black)], Pressure Sensor: S (with Pressure Sensor; Part Number PSE541-M5-X2)

15

NZ M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NY M4 x 0.7 8 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NX M5 x 0.8 9 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 12 NM2 M4 x 0.7

MY1

Series MY1MW/CW Dimensions/Centralized Piping Type 16, 20 1 in = 25.4 mm MY1 M C W G Bore size Stroke 8.5 G Cushion needle For 16 Unavailable port 2-M5 x 0.8 2-M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 QQ QQ RR SS RR SS NC Cushion needle TT UU G G TT UU 2-M5 x 0.8 PP PP (Hexagon socket head plug) GB WW XX WW XX 2-ZZ (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV

Table of Contents

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

Dedicated Controller

16 N-LS open for reverse drive suppression P-LS 17 P-OT Normal drive suppression P-LS open for normal drive suppression 3Ry 18 ALM RST Alarm reset 3Ry ON for alarm release 30V DC 50mA or less 5Ry +12 to 24V 1ALM ALM-SG 34 35 5Ry OFF with servo alarm Servo alarm 8Ry 0V COIN SG-COM 8 10 8Ry ON with positioning complete Positioning complete 4Ry 7 BK 4Ry OFF with holding brake actuated Brake

Shock Absorbers and Rate Controls

-ls./ryde Ir{} Mox. iulbs./ltur (5) Stroke (iI'.) Irlodel Weight (oz,l lrlerded (lhc.)

Electric Actuator/Slider Type

0.8 6.5 4 5 40 to 100 105 to 120 125 to 200 205 to 400 25 MH 20 to 35 Section XX MD M6 1 8.5 5 6 40 to 100 105 to 120 125 to 200 205 to 500 MC ML + Stroke MA 32 Section XX details 50 to 70 XB M8 1.25 10 6 7 75 to 120 125 to 205 to 505 to 63 XA H9 XA A B C L Included parts Foot Body mounting bolt Foot: LEY L 25 32 63 LT LL Outward mounting LG LY LH LT X Y Y Y LX X X LS + Stroke LS1 LS

Battery-less

Foot: LEY E -mmmL 16 25 32 40 A B C LT LL LG LY LH LT X Y X Y LZ LX 4 x LD A + Stroke LS + Stroke Special cap bolt Outward mounting Included parts Foot bracket Body mounting bolt X Y LS + Stroke LS1 Foot [mm] Size Stroke range [mm] A LS LS1 LL LD LG LH LT LX LY LZ X Y 16 10 to 100 106.1 76.7 16.1 5.4 6.6 2.8 24 2.3 48 40.3 62 9.2 5.8 101 to 300 126.1 96.7 25 15 to 100 136.6 98.8 19.8 8.4

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B C L Included parts Foot Body mounting bolt Foot: LEY ll -lllL 25 32 63 LT LL Outward mounting LG LY LH LT X Y Y Y LX X X LS + Stroke LS1 LS + Stroke LZ A + Stroke 4 x LD Special cap bolt [mm] Foot Size Stroke range [mm] A LS LS1 LL LD LG LH LT LX LY LZ X Y 25 15 to 100 136.6 98.8 19.8 8.4 6.6 3.5 30 2.6 57 51.5 71 11.2 5.8 105 to 400 161.6 123.8 32 20 to 100 155.7 114 19.2 11.3 6.6 4

MY1

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

Series CE1

M8 X 1.25 10 8 28 25.5 Q R T* V Y N O P Bore (mm) 12 20 5.5 47 7 53.5 22 7 M4 X 0.7 M5 X 0.8 50 15 62.5 36 5 M6 X 1 M5 X 0.8 * Refer to p.4.4-8 regarding the rod end nut which is included. * Dimensions for auto switch model D-F79W. 4.4-10 Stroke Reading Cylinder Series CE1 Foot CE1L Bore size Stroke MK/MK2 RSQ/RSG RSH CE1 Front flange CE2 CE1F Bore size Stroke ML2B ML1C REA REC RHC MTS Rear

MU

X 0.8Depth11 M6 X 1Depth11 AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8Depth7.5 M6 X 1Depth12 M8 X 1.25Depth13 M8 X 1.25Depth11 M10 X 1.5Depth15 M10 X 1.5Depth14.5 M12 X 1.75Depth18 M12 X 1.75Depth15 Rod end female thread (mm) (mm) P M5 X 0.8 Rc(PT)1 /8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 MM M6 X 1Depth12 NY 26 28 36 42 46 H 14 14 15 18 21 NX 6 6.5 8 10

MY2

x 0.8 1/8 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165 (LL) 40 49.6 75 LE 4 5 6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165 (LL) 40 49.6 75 LE 4 5 6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G

Integrated Controller

H A B C Foot bracket: EQY H -L 16 25 32 LL LT LG LY LH LT X Y LS + Stroke A + Stroke Y X LZ LX 4 x LD Outward mounting Included parts Foot bracket Body mounting bolt Y LS + Stroke X LS1 Foot Bracket [mm] Size Stroke range [mm] A LS LS1 LL LD LG LH LT LX LY LZ X Y 16 30 to 100 106.5 77.1 16.1 5.4 6.6 2.8 24 2.3 48 40.3 62 9.2 5.8 101 to 300 126.5 97.1 25 30 to 100 142.3 104.5 19.8 8.4 6.6