SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(If not specifying dimension C2, indicate instead.)

Possible to transfer a workpiece at low-speed.

(If not specifying dimension C2, indicate instead.)

ZP3

w q ZP3 T N 04 B5 e Connection thread (Female thread) M5 x 0.8 Width across flats D B5 M5 x 0.8 5 Model A B C2 D Vacuum inlet direction q Pad dia.

CRQ2

Q1= M L1 (3 x P) C1 = C C2 = C Y = C2 Y = L2 = C2 = C L2 = L2 (3 x P) L1 = X = Q2 = M D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 Size 10 15 Size 10 15 Size 10 15 L1 max X 2 X 2 X 8 to 18 9.5 to 20 L2 max Y Y 3.5 to 4.9 3.5 to 5.9 11-8-13 14 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] JXC-C2-1 160 JXC-C2-3 300 JXC-C2-5 480 DIN rail L For 3 Axes For 4 Axes 5.25 12.5 (Pitch) JXC92 JXC73/83/93 7.5 AXT100 DR * For , enter a number from the No. line in the table below.

CM2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Width across flats B3 e ZZ + Stroke 9 Cushion valve Width across flats 1.5 l 9 f h ZZ + Stroke With air cushion One-touch fitting port size P Built-in One-touch fittings H1 H G FZ FY FX FT AL FD ZZ A B1 E F Z B2 C2 H2 I B D K MM N NA NN P S Bore size

CV/MVGQ

30 M26 x 1.5 62 20 8 25 135 55 15 M10 x 1.25 34.5 M26 x 1.5 64 20 8 25 137 55 15 42.5 M32 x 2 88 23 10 27 171 75 M14 x 1.5 21.5 Rod Side Flange Style (F) Bore size Stroke CVM5F Manual override Width across flats B2 Width across flats B1 Mounting hole Width across flats NA In the case of 40 Mounting hole S + Stroke ZZ + Stroke In the case of 20 to 32 Eh8 B1 FT FX FY FZ H H1 A AL B B2 C2

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

CV/MVGQ

M26 x 1.5 M10 x 1.25 30 55 15 137 25 8 20 64 M26 x 1.5 M10 x 1.25 34.5 55 15 171 27 10 23 88 M32 x 2 42.5 75 21.5 M14 x 1.5 Rod Side Flange Style (F) Bore size Stroke CVM5F Manual override Width across flats B2 Width across flats B1 Mounting hole Width across flats NA In the case of 40 Mounting hole S + Stroke ZZ + Stroke In the case of 20 to 32 Eh8 H1 H FZ FY FX B1 FT B FD AL F A B2 C2

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

Title not found

Slim line coupler not shown 5/8 27/32 1 1 C6 C2-SL C2 C4 C8 C6 C3 C1 C5 C2 1/2 C7 C3 1/2 Reducing Couplings not shown Note not shown not shown 1 1/8 7/16 Dia. 3/8 Dia. Typ. 3/8 Dia. 5/16 Dia. Typ. 1/4 Dia.

CM2

Please delete the unnecessary part. 1.4-12 Series CM2 Rear Flange (G) CM2G Bore size Stroke (mm) Bore Stroke range A B2 C2 D H2 I AL E F B FD B1 FT FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 13 26 30 5 8 18 8 28 15.5 13 34 7 4 60 20 75 8 41 20 1 to 300 17 32 37 6 8 22 10 33.5 19.5 13 40 7 4 60 25 75 8 45 26 1 to 300 17 32 37 6 8 22 12 37.5 19.5 13 40 7 4 60 32 75 8 45 26

Compact Type

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

Compact Type Dual-Rod Cylinder Series CXSJ

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

17

G Za2 D2 Ea Ea Eb Eb 4-MM E1 E1 E2 E2 C2 P Q2 Section Za2 detail (Adjustable range) B2 F2 D G Section Z detail (Adjustable range) F B3 B2 B1 C1 Zb2 JJ B F Z H K2 Counter bore depth H H L Thread length A2 Section Za2 detail (Adjustable range) A A 2 x 2 x LD J C Mounting direction (1) Mounting direction (2) C2 (mm) (mm) Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Mounting direction

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 L2 max Y 2 Y Y Y Y D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Rotary Actuator

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = Y = C2 J axis X axis K axis T axis D2 = C2 = C L2 = [mm] [mm] [mm] Size Y L2max D2 30 3 to 25 Y-2 5 to 7.9 50 1 to 36 Y 5 to 14.9 63 1 to 41 Y 5 to 16.9 80 1 to 50 Y 8 to 19.9 100 1 to 60 Y 8 to 24.9 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 218

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.