Compact Type

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

Compact Type Dual-Rod Cylinder Series CXSJ

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

Multi-Axis Step Motor Controller

Controller side PLC side For 4 Axes JXC73/83 L JXC C2 (Terminal no.) (R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

Fluoropolymer Piping Equipment

B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.

High Vacuum Angle Valve, XL Series

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

EX500-GPR1A.eng

To the communication connector ( C2 ) or ( 1 ) of SI unit, connect the branch cable with M12 connector from GW. To the communication connector ( C1 ) or ( 0 ), connect the branch cable with M12 connector from Input unit. To the communication connector of Input unit, connect the branch cable with M12 connector from SI unit.

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Applicable bore size SNJ-016C SNKJ-016C 10 16 C1 d C2 d B1 B2 H1 H2 14 17 16.2 19.6 4 4 7 8 8.1 9.2 3.2 4 M10 x 1.0 M12 x 1.0 M4 x 0.7 M5 x 0.8 The applicable mounting nuts are different from those for standard cylinders. 7 B CJ2W-Z Series 10-/1121-/22Double Rod Cylinder 10, 16 How to Order Clean series 10 11 Relief type Vacuum suction type M9BW Z 60 16 L W 2 J D C 10 B M9BW Z 60 16 L

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators d C2 C1 B2 H2 B1 H1 Material: Carbon steel (mm) Material: Carbon steel (mm) Part no. Applicable bore size Part no.

VS 8-2/VS 8-4

463 508 15 490 535 16 517 562 6 5 4 3 2 247 292 220 265 193 238 139 184 L1 L2 VV802 (Size 18 mm) S kit (Serial transmission kit: EX500) Rc, G (According to ISO1179-1), NPTF 1/8" Pilot port M4 x 7 earth thread 2 x Rc, G (According to ISO1179-1), NPTF 3/8" 3(R) port Rc, G (According to ISO1179-1), NPTF 1/8" Pilot exhaust port C1 (M12) 0 0 57.5 82 60 30 1 1 35.5 31.3 22 28.5 34.5 11.3 13.5 C2

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

BM Bellows type with groove UM Flat type with groove KJH C2 06 Pad diameter Applicable tubing O.D. 63 63 80 80 04 4 06 6 03 5/32" 07 1/4" When changing the pad diameter, replace also the plate together. !

Table of Contents

M26 x 1.5 M10 x 1.25 30 55 15 137 25 8 20 64 M26 x 1.5 M10 x 1.25 34.5 55 15 171 27 10 23 88 M32 x 2 42.5 75 21.5 M14 x 1.5 Rod Side Flange Style (F) Bore size Stroke CVM5F Manual override Width across flats B2 Width across flats B1 Mounting hole Width across flats NA In the case of 40 Mounting hole S + Stroke ZZ + Stroke In the case of 20 to 32 Eh8 H1 H FZ FY FX B1 FT B FD AL F A B2 C2

MY1

Model B3 C1 14 20 22 C2 39 44 54 E1 1 1 1 E2 1 1 1 B1 28 40 44 78 88 108 96 111 131 MY-J25 MY-J32 MY-J40 8-11-29 29 Series MY1B Floating Bracket Facilitates connection to other guide systems. Applicable bore size Floating Bracket Operating Precautions Caution Make sure that the amount of divergence from the external guide is within the adjustable range.

Large Type Vacuum Unit Series ZR

Manual operation C2 Air operated C3 N.O. Nil Non-locking push type C4 Double SOL.

ZB-OM00301

Q2 +COM 30.30.4 4 L L 5 DC24V LO L 6 DC12V M M 5 MO M 5 4300 5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4

Note) Production of the “-C1” type was terminated in October 2019; it has since converged with the “-C2” type.
G□ pressure gauge catalogs can be found here.

Valve Stations: 08 (8 Stations), Port Size: C2 (ø2 One-Touch Fitting), Voltage: 6 (12VDC), Coil Specifications: Standard (w/Light Surge Voltage Suppressor)(+COM), Operating Pressure Range: H [Standard (0 to 0.7 MPa)], Connector Cable: C2 (Length 600mm)