Compact Type D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V
D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V
Table 3-10 Piping port size Description Port Recommended Recommended piping size tightening torque specifications Circulating fluid outlet port Rc1/2 28 to 30Nm 0.4MPa or more*2 Circulating fluid return port Rc1/2 28 to 30Nm 0.4MPa or more*2 Facility water inlet port *3 Rc3/8 22 to 24Nm 1.0MPa or more (Supply puressure: 0.3 to 0.5MPa) Facility water outlet port *3 Rc3/8 22 to 24Nm 1 For NPT
75 161 9 15 40 40 50 4 28 75 174 Use a thin wrench when tightening the piston rod.
24 24 9 18 21 21 43 43 28 28 17 26 44 44 54 23 23 39 3.6 LQ1T41-R12 6 12 12 29 26 54 39 3.6 LQ1T41-R22 10 6 12 6 24 20 24 9 18 21 21 43 38.5 43 28 23 28 3.6 LQ1T41-R23 6 6 12 7 20 29 14 28 17 26 44 44 54 23 39 3.6 LQ1T41-R26 12 3 12 6 24 15 24 9 18 21 14 21 43 33 43 28 16.5 28 1.8 LQ1T41-R32 6 12 6 15 24 15 14 21 14 33 43 33 16.5 28 16.5 3.6 LQ1T41-R34 3 12 3 1.8 LQ1T51-R2 19 10 19 7 29 20
Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage
Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage
Controller side PLC side For 4 Axes JXC73/83 L JXC C2 (Terminal no.) (R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.
K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.
10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.
M14 x 2 11 200 2 128 15 M8 x 1.25 47 43.5 MY1C50 84.5 29 100 230 19 12.5 29.5 27.5 39.5 130 32 M16 x 2 13.5 230 5.5 152 16 M10 x 1.5 50 60 MY1C63 104 32.5 115 (mm) XX Z NW PA PB PG Q PP QW QQ RR SS TT UU W WW Model NF NH VV W1 118 120 90 10 380 26 90 28 35 10 35 24 144 22 MY1C50 83.5 400 81 28 74 128 142 140 110 12 436 42 110 30 49 13 43 28 168 25 MY1C63 92 460 103 105 30 152 Y 2 x d R WX
28 Bore size With air cushion Air cushion type is not available for 21-/22-CJ2.
28 Bore size 11 11 10-0.022 0 12-0.027 0 With air cushion With air cushion type is not available for 21-/22-CJ2.
M14 x 2 11 200 2 128 15 M8 x 1.25 47 43.5 MY1C50 29 100 84.5 230 19 12.5 29.5 27.5 39.5 130 32 M16 x 2 13.5 230 5.5 152 16 M10 x 1.5 50 56 MY1C63 32.5 115 104 (mm) W1 NW PA PB PG Q PP QW QQ RR SS TT UU W WW Model NF NH VV XX Z 118 120 90 10 380 26 90 28 35 10 35 24 144 22 MY1C50 128 81 28 74 400 83.5 142 140 110 12 436 42 110 30 49 13 43 28 168 25 MY1C63 152 103 30 92 460 105 Y 2-d R WX
SI Unit for VQC/S0700 Series Valves ( EX500-Q 01 ) SI Unit for SV Series Valves ( EX500-S 01 ) M3 28: 4 pcs. ( Plus-minus slot round head screw ) Supply/exhaust block assembly Supply/exhaust block assembly 1.
8 5 41 13 8 26 13 40 15.5 18 Up to 300 76.5 40 3.2 102 28 6.8 4 5.5 33.5 8 6 45 13 10 32 17 47 19.5 22 Up to 300 78.8 40 3.2 104 28 6.8 4 5.5 37.5 8 6 45 13 12 32 17 47 19.5 22 Up to 300 84.8 55 3.2 134 30 7 4 7 46.5 10 8 50 16 14 41 22 54 21 24 Up to 300 (mm) ZZ Z Y X S MM LZ NN NA N Bore size (mm) 20 25 32 40 131 21 8 20 62 M8 x 1.25 M20 x 1.5 24 55 15 135 25 8 20 62 M26 x 1.5 30 55 15
8 18 15 13 5 8 C J G5-S 32 M10 x 1.25 55 76.5 40 3.2 28 6.8 4 45 47 5.5 13 19.5 30 33.5 10 22 15 17 6 8 32 M10 x 1.25 55 78.8 40 3.2 28 6.8 4 45 47 5.5 13 19.5 34.5 37.5 12 22 15 17 6 8 CV 41 75 84.8 55 3.2 30 7 4 50 54 7 16 21 42.5 46.5 14 24 21.5 22 8 10 M14 x 1.5 Dimensions by Stroke MVGQ Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) Z Y X NN Bore (mm) Symbol
/N.O.) u Coil type C2 C3 C4 C6 C8 Standard With power saving circuit (Continuous duty type) Nil T P P P Be sure to select the power saving circuit type when a valve is continuously energized for long periods of time. Note the specified energizing time when power saving circuit is selected.
CJP FZ CJ2 Foot: C(D)JP2L6 to 16 CM2 Foot LX (mm) CG1 2 x LC Symbol Bore size X Y LC LH LT LW LX LZ MB X Y 6 10 16 6.5 7 10 10.5 12 16.5 3.4 4.5 5.5 11 13 18 1.6 1.6 2.3 21.5 25 32.5 20 24 30 28 33 43 MB1 Foot Other dimensions are the same as basic mounting.
K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.