o

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Proper tightening torque (Nm) (cylinder body) 10 16 20, 25 32 Hexagon socket head cap screw size (mm) Bore sizes (mm) 16 20 25 32 Piston seal: 1 pc. Rod seal: 1 pc. Gasket: 1 pc. CUX16-PS CUX20-PS M3 0.54 10% CUX25-PS M4 1.23 10% Grease pack (10g): 1 pc. CUX32-PS M5 2.55 10% Due to cylinder structure, 10mm bore size seals cannot be replaced. M6 4.02 10% 2.

ZQ-OM01401

0.15 22 20 17 32 3.2 0.25 31 29 24 46 0.35 44 39 31 60 0.45 54 48 38 74 0.05 11 11 9 16 0.15 24 22 18 33 4 0.25 34 32 27 48 0.35 46 42 35 62 0.45 57 52 44 76 0.05 12 11 9 16 0.15 25 24 20 33 6 0.25 37 34 30 47 0.35 49 45 39 63 0.45 61 56 48 77 3 39 - No.ZQ-OM01401-B 12. 12.1 12.2 0 40 - No.ZQ-OM01401-B 12.3 Assy ZQ VQ100 3 2 Assy Assy Assy () ZQA-K15LO--2 ZQA-K25LO--2 ZQA-J15LO--

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Piston seal: 1 pc. 12 16 20 25 CQSX12-PS Rod seal: 1 pc. CQSX16-PS Tube gasket: 1 pc. CQSX20-PS Grease pack (10g): 1 pc. CQSX25-PS 2. Grease packs When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

ZL3-OM00801

No 1 2)3) 4) 5)6) 6) 5)6) 7) O 8) 9) 10) 11) 12) 13) 1 2)3) 4) 14) 15) 10) 11)16) 28 No.ZL3-OM00801-A No 1 ON 10 2) 3) 4) 5) 6) 7) 8) O O 9) 10) 11) 12) 13) 14) 15) ON/OFF 16) 29 No.ZL3-OM00801-A Revision history AUKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

VCW

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

3 Port Solenoid Valve Series SYJ300/500/700

(Example) SS3YJ3-20-03 . 1 set (manifold base) SYJ312-5LZ-M3 . 2 sets (valve) SYJ300-10-1A . 1 set (blanking plate assembly) SS3YJ3-42R-03-C4 . 1 set (manifold base) SYJ314R-5G . 2 sets (valve) SYJ300-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

IR1000/2000/3000

For IRV2000, IRV3000 Zero position Heaven Zero position Ground Fig. (2) Fig. (1) 14-5-16 16 Vacuum Regulator Series IRV1000/2000/3000 Standard Specifications F.R.L.

VCW

W (44) (Y) Z (X) (V) T R T 25 IN port 23/8 l =280 l =300 : Thread type 2.5 (N) E Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 H H P = J (Pitch) 2 n-1/8 : Thread type L Dimension

VDW

Refer to pages 17-2-72/73 regarding manifold additions. 17-2-69 10 Series VDW10/20/30 Dimensions VV2DW2 (25.5) 16 1 4.6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 16 300 11 1 24 33 19.5 (19.5) (: Thread type) 21/4 (IN port) R2.3 4.5 9 L1 L2 L3 1 Stations D side

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Series Option Example VV2DW2-0501 ... 1 set Manifold part no. 1 2 3 10 20 30 None With bracket Nil F VDW23-5G-2 ... 5 sets Valve part no. (Stations 1 to 5) Note) Type 30 is available only with bracket. "" is the symbol for mounting. Add "" in front of the part numbers for solenoid valves, etc., to be mounted. Enter together in order, counting from station 1 on the D side.

VCL

W (44) T R (Y) Z VC T 25 VDW IN port 2-3/8 : Thread type l=280 l=300 VQ VX2 (X) (V) S Q 2.5 (N) VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C E A (U) VX3 D G C B VXA L1 L2 L3 16 VN LVC D side U side Stations 1 2 3 4 5 n LVA LVH LVD LVQ 21 5.5 16 OUT port n-

VDW Series

Series Option Example VV2DW2-0501 ... 1 set Manifold part no. 1 2 3 10 20 30 None With bracket Nil F VDW23-5G-2 ... 5 sets Valve part no. (Stations 1 to 5) Note) Type 30 is available only with bracket. "" is the symbol for mounting. Add "" in front of the part numbers for solenoid valves, etc., to be mounted. Enter together in order, counting from station 1 on the D side.

CM2x-OM0230Q

PTFE X446 GR-F-005(5g) 1) 19 - 2) () 5. 5. 20 - 6. 1.

IR1000/2000/3000

Example 1) 0.4MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2MPa setting 2pcs., 0.4MPa setting 2pcs., 0.8MPa setting 1pc. with 5 stations IRM20-5G-021221 Copper-free specifications Ozone Resistant Specifications 3 Accessory (pressure gauge) Nil None Fluoro rubber is used for rubber seal materials.

VT317

Then, tighten the mounting screws to fix the valve to the manifold base. 4-7-16

VFS4000-OMY0001

17 18 19 20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25 0.3mm 2 AXT100-DS25-150 15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3 , 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4 1214 Rc 3/8

Precision Regulator

With digital pressure switch ARX Switch output specifications Example 1) 0.4 MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2 MPa setting 2 pcs., 0.4 MPa setting 2 pcs., 0.8 MPa setting 1 pc. with 5 stations IRM20-5G-021221 AMR Output specifications NPN open collector 1 output PNP open collector 1 output NPN open collector 1 output + Analog voltage output NPN open collector 1 output

Air cylinder

PTFE Grease Specification Standard models -X446 Grease pack part number: GR-F-005(5g) 21 - Lubrication Caution 1) Lubrication for products using special grease Lubrication to this cylinder leads to operation failure. Otherwise, it may cause the operating failure. 2) Do not wipe off the grease on the sliding surface of the air cylinder.