Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

DS: DIN terminal with light DN: DIN terminal without connector Applicable cable 6 to 12 F K L D G1/2 F K D C E C E J G J G B B WN: M12 connector D F K C J G E B [mm] Size Port size A B C D E F G 20 1/8, 1/4 42 40 77.6 36 17.5 18 15.5 30 1/4, 3/8 53 53 94.5 42 21.5 21 18 40 1/4, 3/8, 1/2 71 70 102.5 42 25.5 21 22.5 Size Port size DIN terminal DIN terminal without connector M12 connector

V

rib Deep type Pad Dia (mm) 2, 4, 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 10, 13, 16, 20, 25, 32, 40, 50 10, 16, 25, 40 Material (Color) NBR (Black) Hardness 50 shore D I M E N S I O N S PA D D I A M E T E R S 20, 25, 32 D I M E N S I O N S PA D D I A M E T E R S 2, 4, 6, 8 F L AT T Y P E F L AT W I T H R I B H : M6x1 H : M8x1 Y Model A B D C E F G I C E F G I Flat Flat with rib F L AT T Y P

1

(mm) ZZ H F 32 205 47 16 Series C95 40 221 56 18 50 250 63 19 Bore size (mm) 32 40 50 63 80 100 ZZ 146 163 179 194 218 233 H 48 54 69 69 86 91 F 15 17 19 19 25 25 63 264 63 19 80 326 77 25 100 346 77 25 H F F ZZ + Stroke H ZZ + Stroke 6-17-92 6-17-93 74 Made to Order Common Specifications: -XC35: With Coil Scraper Symbol -XC35 34 With Coil Scraper How to Order Specifications MGPM MGPL, MGPA

MXQ

F F A Lr 6 6 6 Lr = 40 mm MXQ6-30 MXQ6-30 0.015 0.03 0.05 MXQ6-30 MXQ6-50 MXQ6-10 MXQ6-10 MXQ6-20 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-50 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Series CH2E/CH2F/CH2G/CH2H Limit stroke charts/Bore sizes 32, 40 Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation F F F F F F F F F F F Bore size 32 B rod 2000 5 2 4 8 3 7 1 1000 6 500 Stroke (mm) 100 50 10 0.1 0.5 1 5 10 20 Load (kN) Bore size 40 B rod C rod 2 4 3 7 3 7 5 2000 4 8 1 5 8 6 2 1 1000 6 500 Stroke (mm) 100 50 0.5

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

S + Stroke Relief port M5 x 0.8 1.5 (20, 25) FZ Z N N F H 20 to 32 Standard port ZZ + Stroke 4 x FD F Y 45 Relief port (32, 40) 40 (mm) K I HC H FY D B2 A 66 52 40 40 34 B 22 17 17 13 B1 10.5 7.5 7.5 7.5 DL Bore size FT F FD FX AL FZ G H1 H2 E C2 MM 0 41 32 32 26 20-0.033 7 7 7 4 4 4 60 60 60 16 13 13 13 40 32 25 20 24 22 22 18 21 19.5 19.5 15.5 5 24 46.5 37.5 33.5 28 47.3 37 37 30 36 50

CQ2

Spring return Spring extend C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Mounting bolt M3 X 35 l X 40 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 60 l Mounting bolt M3 X 40 l X 45 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 65 l Model

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H I J K Stroke 5 5 D C 20 +38 +10 +28 I 30 +48 +20 40 +84 +30 +54 50 +94 +40 J H F Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) A B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30

LJ1H

2 3 4 5 2m 3m 4m 5m F R L T B Axial entry Right entry Bottom entry Specifications Intermediate strokes 100 5.5 200 6.3 300 7.1 400 7.8 500 8.6 5 to 40 (with no condensation) 5 150 600 mm kg C kg N mm/s mm Standard stroke For manufacture of strokes other than the standard strokes on the left, add "-X2" at the end of the part number.

Vacuum Pad: Ball Joint Type

N: M8 x 1.25 Model A B C D F NL P F P ZPT40F12.5 18.5 39 39 40 43 8 12 14 ZPT50F13.5 19.5 40 40 50 53 712 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry: With Buffer ZPT Series How to Order ZPT 10 F GN J 20 04 A10 Mounting (Refer to Table (1) for applications.)

MY1

direction (2) C2 C K 20 20 JJ M8 x 1.25 M10 x 1.5 LD 11 14 L 7.5 9.5 E4 2.5 2.5 P 16 19 Q E3 2.5 2.5 Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 (mm) 8 9.5 Mounting direction (2) Common G H 3.2 4.5 4.5 Applicable bore size Model D J 35 40 47 MM 5.5 6.5 6.5 A 63 76 92 B C 39 47 56 F 100 124 144 MY1B25 MY1B32 MY1B40 MY-J25 MY-J32 MY-J40 40 55 74 78 94 112 60 80 100 F Mounting direction

Tie-rod Type Hydraulic Cylinder

CHA 40 100 L L CHDA 40 100 M9BW Without Auto Switch With Auto Switch With auto switch (built-in magnet) Mounting type Without auto switch Nil Auto switch type Bore size 40 50 63 80 100 Number of auto switches B L F G C D T U Basic type Axial foot type Rod flange type Head flange type Single clevis type Double clevis type Center trunnion type Rod trunnion type 40 mm 50 mm 63 mm 80 mm 100 mm

High Purity Fluoropolymer

LQ2B5B-F LQ2B5A-F 29.5 35.5 1/2" 7 40 26 32 14 28 36 32 36 37 3/4" LQ2B5D-F 28 Series LQ2 Dimensions Union Elbow: LQ2E Metric sizes Applicable tubing O.D.

CNA

BN TT K K 8 f l N C h + l B ZZ + l + 2 stroke S + Stroke H + Stroke ZZ + 2 strokes H TX TZ With rod boot on both sides ZZ + 2 l + 2 stroke Bore size (mm) Stroke range (mm) 40 50 63 80 100 MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27

CNA

AL A F Q GB K With rod boot LH W W D D e E LY V H1 Width across flats B1 8 f l LT KA Width across flats h + l T Y X S + Stroke BN N X Y ZZ + l + 2 stroke LX C H 4-LD With rod boot on both sides LS + Stroke ZZ + 2 strokes ZZ + 2 l + 2 stroke B Bore size (mm) Stroke range (mm) 40 50 63 80 100 LD LH LS LT A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA 9 40 45 50 65 75 207 222 250

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

29.5 32 1/2" LQ2R4D-F LQ2R5D-F LQ2R5C-F LQ2R5B-F LQ2R5A-F 29.5 35.5 1/2" 7 26 40 32 14 28 36 36 37 3/4" 17-5-120 25 Series LQ2 High Purity Fluoropolymer Fittings Male Branch Tee: LQ2B-M Metric sizes Connection threads R/NPT Model L1 L2 H G F M N E B Applicable tubing O.D.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

3) Exhaust throttle SQ Series 38 1 4 1 8 M5 38 1 2 1 2 1 4 1 8 M5 VFS Bracket C4 C6 C8 C10 C12 N3 N7 N9 N11 VFR VQ7 SY3 20 SY5 20 SY7 20 External Pilot (Note 2) External Pilot (Note 2) External Pilot (Note 2) DIN terminal (EA, EB) (P) M8 connector SY9 20 SY3 40 SY5 40 SY7 40 External pilot Sub-plate External pilot External pilot DIN terminal M8 connector SY9 40 Standard Option Made to order

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

/10mm stroke A (mm) B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional dimensions by stroke(mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +25 +40 +60.5 8 Series ZPT ZPT 20/25/32 F J/K 10-0-A14 (With Buffer/One-Touch Fitting) ZPT 40/50 F J/K 10-0-A14 (With Buffer/One-Touch Fitting) Applicable tube O.D.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

ZP 40HB ZP HB ZP HB 40 50 63 80 100 125 F F 4 x 9.5 F 4 x 8 4 x 6 3 x 6.5 4 x 5 G 3 x 4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54

Proposals for Energy Saving

32, 40, 50, 63 40, 50, 63, 80, 100 125, 140, 160, 180, 200, 250, 300 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 32, 40, 50, 63, 80, 100 32, 40, 50 Wiper ring SCB scraper CVM5: Rubber bumper CV3, CVS1: Air cushion None Rubber bumper Rubber bumper (base cylinder unit) Air cushion (base cylinder unit) Rubber bumper Air cushion Rubber bumper