70astamb1

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type: With Mounting Bracket Dimensions not shown are the same as basic style.

mb1

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type: With Mounting Bracket Dimensions not shown are the same as basic style.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5 5.5(3.5) 10.5

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B ZZ -t2 xstrokes.1 12 + 2X!

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

LJ1H

B 89 A A B Section BB Coupling P.C.D.

ZPT/ZPX

B D D Dimensions Dimensions (mm) (mm) Model B A C D E F G H I J Y Model B A C D E F G H I J Y ZPX40HBJ25-B01-A18 ZPX63HBJ25-B01-A18 109 160 120 171 50-B01-A18 50-B01-A18 40 41.4 28.4 43.2 20.5 32 47 69 144 195 13 63 65.1 45.5 67.6 31.5 43 58 80 155 206 21.5 75-B01-A18 75-B01-A18 180 231 191 242 ZPX50HBJ25-B01-A18 ZPX80HBJ25-B01-A18 112.5 163.5 125.5 176.5 50-B01-A18 50-B01-A18 50 51.9 35.7

MQQ

type B L F G C Note) 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

7ND9071en

T100 C IP66, AEx tb IIIC T100 C IP66 Ambient temperature ranges T6 T5 T4 ND9_E2 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I02 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I09 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/I32 -25 to +60 C -25 to +70 C -25 to +70 C ND9_E2/D33 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/D44 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/I45 -25 to +60

Air Cylinder Series MB

, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-F5LF D-P5DWL Bore size (mm) A A A A B A A A A B B B B B B B 32 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 40 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 50 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 63 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 80 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 100

CLS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA CNS CLS Bore size (mm) 125 140 160 Tie-rod nut Bore size (mm) Tie-rod nut JIS B 1181 Class 1 M14 x 1.5 JIS B 1181 Class 1 M20 x 1.5 200 CLQ JIS B 1181 Class 1 M16 x 1.5 JIS B 1181 Class 1 M18 x 1.5 180 JIS B 1181 Class 1 M24 x 1.5 250 MLGP Wing nut

7

Hs Ht A B Hs A B Hs A B Hs Ht B D-P4DW D-M9 D-M9W D-M9A 12 D-A9 Hs D-B54 Note) The above drawing is the switch band mounting example for the D-P4DWS.

SMC

A 5H9 depth 4 +0.030 0 NN-M6 x 1 thread depth 12 6 10.5 10.5 1 9.5 26 5.1 B A 10.5 24 10.5 24 H G (NN1) x H Section AA Section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

Brake mechanism added

A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

Free Mount Cylinder

With auto switch Without auto switch With auto switch Bore size (mm) 15 10 5 15 10 5 15 10 5 15 10 5 6 67 62 52 67 62 52 57 52 47 57 52 47 42 42 9 8 10 80 65 55 80 65 55 65 55 50 65 55 50 45 45 9 8 16 94 79 69 84 69 59 69 59 54 59 49 44 49 39 9 8 20 90 75 65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65

Table of Contents

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

Table of Contents

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

A 5H9 ( ) depth 4 +0.030 0 NN x M6 x 1 thread depth 12 6 10.5 10.5 1 9.5 26 5.1 B A 10.5 24 10.5 24 H G (NN 1) x H Section AA Section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Hs Auto switch 12 15 22.5 A B 33 101 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA Proper auto switch mounting positions (mm) Auto switch type D-A5, D-A6 D-A3, D-A44 D-G39, D-K39 D-F5, D-J5 D-F5W, D-J5W D-F5BAL D-A59W D-F5NTL D-F5F D-B5, D-B64 D-B59W Bore size (mm) A B A A A A A B A B B B B B 40 10.5 11.5 14.5 14 21 17 22 23 11 12 15 15.5 22 18 50 11 13