39

, 75 , 90 , 105 A photograph shows handle unit L.

100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350

Industrial Filters

120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100 3400 83 150 160 170 120 170 10 FGELC Note 2) 1200 4400 120 190 200 220 150 230 20 FGETC FGGSB 160 270 300 320 290 360 FGGLB FGGSC 200 300 320 340 320 370 FGGLC FGGSD 230 320 330 350 330 370

MXS

, 100, 125, 150 *Refer to below table for parts No. of auto switch.

Vacuum Unit

105 120 135 150 165 L2 45 60 75 90 105 120 135 150 165 180 L3 56.8 71.8 86.8 101.8 116.8 131.8 146.8 161.8 176.8 191.8 L4 73.5 88.5 103.5 118.5 133.5 148.5 163.5 178.5 193.5 208.5 L5 75 100 112.5 125 137.5 150 175 187.5 200 212.5 L6 85.5 110.5 123 135.5 148 160.5 185.5 198 210.5 223 Metric size 06 8.3 4 9.7 8.7 08 11.4 6 Inch size 07 9.7 4.76 12.3 11.3 09 11.4 6 1 Common pilot pressure

JA/JAH/JB/JS

JAF63-18-150 JAF80-22-150 JAF100-26-150 JAF140-30-150 JAF160-36-150 20 25, 30 40 50, 63 80 100 125, 140 160 19 25 32 65 75 90 125 150 8 10 14 18 22 26 30 36 32.5 36 49 61.5 76.5 94 131 152 19 20.5 27 34.5 43.5 52 73.5 86 8 9 13 15 18 24 38 42 48 52 70 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 0.5 0.5 0.75 1 1.25 2 2.5 3 36 40 52 45 55 65 82 100 1100 2500 4400 11000 18000 28000 36000 55000 21 24

JA/JAH/JB/JS

JAF63-18-150 JAF80-22-150 JAF100-26-150 JAF140-30-150 JAF160-36-150 20 25, 30 40 50, 63 80 100 125, 140 160 19 25 32 65 75 90 125 150 8 10 14 18 22 26 30 36 32.5 36 49 61.5 76.5 94 131 152 19 20.5 27 34.5 43.5 52 73.5 86 8 9 13 15 18 24 38 42 48 52 70 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 0.5 0.5 0.75 1 1.25 2 2.5 3 36 40 52 45 55 65 82 100 1100 2500 4400 11000 18000 28000 36000 55000 21 24

240

0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Me 150 150 150 150 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 100 100 100 100 Wall Y L5 50 50 50 50 0 0.2 0.4 0.6 0.8 1 0 0 0 0 0 0.2 0.4 0.6 0.8 1 0.0 0.4 0.8 1.2 1.6 2.0 Work load [kg] 0.0 0.4 0.8 1.2 1.6 2.0 Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 160 160 160 160 L6 L6 [mm] L6 [mm] L6 [mm] L6

Environment

200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 LC3F2 Product weight [kg] Step motor 1.45 1.52 1.69 1.95 2.13 2.30 2.48 2.65 2.83 2.48 2.59 2.88 3.35 3.64 3.91 4.21 4.49 4.76 5.04 5.32 Servo motor 1.41 1.48 1.65 1.91 2.09 2.26 2.44 2.61 2.79 Weight: In-line Motor Type Model LEY25D LEY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

134 135 65 75 35 13 16 9 130 9 30 109 75, 100 125, 150 200, 250 300 32 M6 x 1 depth 13 60 118 35 102 106 150 M8 80 134 140 73 16 85 40 16 9 135 129 9 35 40 M8 x 1.25 depth 16 75 50 150 134 134 M8 95 186 170 175 93 105 50 19 19 12 170 9 45 152 50 M10 x 1.5 depth 21 90 56 160 152 140 115 210 200 103 190 115 55 21 12 194 25 11 50 182 M10 Long Stroke Bracket Mounting Stroke Bracket mounting

A

254 45 90 70 66 35 11 13 90 3.2 90 NAL6000 95 268 45 95 70 66 35 11 13 90 3.2 95 Courtesy of Steven Engineering, Inc. !

SY

750 150 300 450 600 750 150 300 450 600 750 150 300 450 600 750 SY3120 -C6 Cv = 0.23 SY5120 -01 Cv = 0.59 SY7120 -02 Cv = 0.87 SY9120 -03 Cv = 2.1 The speed of CJ2 and CM2 cylinders is controlled by a fixed orifice built into the cylinder.

MXS Series Air Slide Table

200 160 120 80 40 200 0 0 100 150 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 20 20 20 Lr=122mm 0.040 0.05 0.10 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection mm Table deflection mm Table deflection mm

MGP

63 MGPA -400 50 63 0.6 Plate displacement mm Plate displacement mm 0.3 50 63 MGPA -300 50 63 MGPA -300 0.5 MGPA16-150 MGPA16-150 MGPA16-100 0.25 MGPA16-100 0.4 50 63 MGPA -200 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -200 0.2 MGPA16-75 MGPA16-75 50 63 MGPA -150 0.3 0.15 50 63 MGPA -100 MGPA16-50 MGPA16-50 0.2 0.1 MGPA16-10 MGPA16-10 0.1 0.05 50 63 MGPA -50 50 63 MGPA -50 0 0 0 10 20 30

LEY-OM007

8) 4/6 4/12 [W] 9) 59 96 10) [N] 20 39 78 78 157 294 [W] 11) 3.6 5 [V] DC2410% LEYG 16MA LEYG 25MA [mm] 30 50 100 150 200 30 50 100 150 200 250 300 (kg) 0.83 0.97 1.20 1.49 1.66 1.63 1.82 2.14 2.56 2.90 3.24 3.50 LEYG 16LA LEYG 25LA [mm] 30 50 100 150 200 30 50 100 150 200 250 300 (kg) 0.84 0.97 1.14 1.43 1.58 1.64 1.85 2.09 2.52 2.78 3.10 3.34 [kg] 0.12 0.19 1 2 3000[mm/s 2] 320%(F.S

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

or less (No condensation) Storage temperature range [C] 10 to 60 (No freezing) Storage humidity range [%RH] 90 or less (No condensation) Insulation resistance [M] Between the housing and SG terminal: 50 (500 VDC) Weight [g] 150 (Screw mounting), 170 (DIN rail mounting) Note 1) Do not use the power supply of inrush current prevention type for the controller power supply.

Power Clamp Cylinder

30 to 90 CKZT80-A015B 30 to 90 80 CKZ80-42 3680N-R A B C 30 to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

Modular F.R.L. Unit

90 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 E 47 47 R 35 60 80 110 110 110 110 F 30 41 50 50 70 70 P 28 57 73 73 D 25 40 53 70 70 90 95 C 26 36 38 40 38 41 45 A B 77 115 142 176 176 250 268 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250

Best Pneumatics Vol. 14

245 258 A 25 40 53 70 75 90 95 M 2.3 2.3 2.3 2.3 3.2 3.2 L 40 53 70 70 90 90 K 8.4 8 10.5 10.5 13 13 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specifications Model With barb fitting B 137 173 177 253 266 Metal bowl B

ZP

8 14 40 33 20 52 7 17 150 250 155 40 4 x 14 4 x 9 88 4 x 16 4 x 10 34 Symbol/Type HB: Heavy-duty (Bellows) Heavy-duty Pad 32, 150 Pad diameter For heavy or large work pieces How to Order ZP2 32 HB N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 Symbol Material NBR Silicone rubber FKM CR 32 150 N S F C Note) Silicone rubber is only applicable to the 32 pad.