Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32 40 50 63 80 8 8 12 12 16 16 16 50 57 64 80 100 112 132 34 36 46 58 61 75 95 60 70 78 100 125 138 155 8 8 12 12 16 16 16 50 57 64 80 100 112 132 34 36 46 58 61 75 95 60 70 78 100 125 138 155 5.5 6.6 9 9 9 12 14 5.5 6.6 9 9 9 12 14 44 48 60 74 78 100 120 44 48 60 74 78 100 120 114 136 167 190 211 237 264 Double

C85

Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 1000 500 Not available with air cushion. Other strokes available on request.

Table of Contents

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

MNB

2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

C95Series

Rod du.met.r OpOfmnil Piston...a 'Op WIlting rM8ure (pII) ~ OUT... 25, 50, 75, 100, 125. 150,175.200, 25~ 3OO, 3S0, 40~45~50~600 63' (mm) . 25 (mm) 145 A (Inch') 1" direction 50 54 125 134 '00 107 80 . ' 25. 50,75, 100,125, 150.175,200,250, 300, 350, 400, 450, SO(), 600, 700, 800 32 INOUT 12 27 80 155 1.07 40 16 INOUT 1.64 41 82 123 164 205 237 SO 20 IN-OUT 2.56 64 128 192 256 319 371 100

MLGP

P-80 (JT)

MLGP

P-80 (JT)

LG1H

radius 80 35 8H10 depth 8 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 300 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

MLGP

Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

MLGP

Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

Integrated Controller

70 60 50 40 30 20 10 0 100 200 300 400 500 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2

CLS

Bore size Thread type Nil TN Foot style Nil S n 2 pcs. 125 140 160 180 200 250 Rc 125 mm Rod side flange style 1 pc.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

125 137.5 150 162.5 L3 69.5 153.5 80 90.5 101 111.5 122 132.5 143 L4 14 16 15 16 17 12 13 14 15 112 Body Ported 10-SY3000/5000/7000 Type 60 Dimensions [ ]: AC 10-SS5Y3-60Stations B Manual override L3 (L4) D side U side M5 x 0.8 (A, B port) 8 4.1 35 1 (3) 26 22.5 44.4 [46.6] 88.8 [93.2] 97.3 [101.7] 30.7 22.2 22.2 10.2 P P 5.5 B B A B B B B 4.7 R R A A A A A (Lead wire length) Approx. 300

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

How to Order Connector Assembly 80 A DXT170 Lead wire color Lead wire length Lead wire with socket Lead wire length L (mm) Symbol Note Symbol Nil 6 10 15 20 25 30 Nil Socket only (2 pcs.)

7ND9071en

I02 NDabcdE1e/I04 NDabcdE1e/K05 NDabcdE1e/K06 NDabcdE1e/B06 NDabcdE1e/I32 NDabcdE1e/R35 NdabcdE1e/I41 -40 ... +60 C -40 ...+75 C -40 ... +85 C Resistive load: 3A: 250 V AC (K05) 5A: 30 V DC 0.4 A: 125 V DC 100 mA: 30 V DC/125 V AC (K06) Switch accuracy: < 2 NDabcdE1e/D33 NDabcdE1e/D44 -40... +60 C -40 to +75 C -40 to +82 C NDabcdE1e/R01 -40 to +60 C -40 to +75 C -25 to +80 C NDabcdE1e/I59

Single Axis Electric Actuator Series LJ1H

5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 90 A section 83 5.8 1.7 4.8 80 Stroke + 360 A section detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 3-5H10 depth 5 9.4 18 4.5 10 Stroke + 145 80 40 30 T-slot dimensions The body mounting

JXCx-OMU0004

LEP LEP6-J LEP6-K LEP10L-J LEP10L-K 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 20 200 10 200 20 200 10 200 1 30 300 15 300 30 300 15 300 2 40 400 20 400 40 400 20 400 3 50 500 30 500 50 500 30 500 4 60 600 40 600 75 600 40 600 5 70 700 50 700 100 700 50 700 6 80 800 60 800 125 800 60 800 7 100 900 70 900 150 900 70 900 8 125 1000 80 1000 175 1000 80 1000 9 150 1200

CLQ

x 175l 80 85 90 95 100 105 110 115 120 155 180 90 95 100 105 110 115 120 125 130 165 190 M6 x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 155l x 180l M8 x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 165l x 190l 100 105 110 115 120 125 130 135 140 175 200 115 120 125 130 135 140 145 150 155 190 215 M10 x 100l MLGC -15D -15D x 105l -20D -20D x 110l CNG -25D

CLQ

85 90 95 100 60 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 80 85 90 95 100 105 110 115 120 155 180 90 95 100 105 110 115 120 125 130 165 190 100 105 110 115 120 125 130 135 140 175 200 115 120 125 130 135 140 145 150 155 190 215 CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D