High Vacuum Angle Valve

Maintenance Parts Table 1: Seal Material Symbol -XN1 -XP1 Kalrez -XQ1 -XR1 Chemraz -XR2 -XR3 VMQ 1232-70 -XS1 FKM for Plasma 3310-75 -XT1 ULTIC ARMOR -XU1 Symbol Seal material Compound no.

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

CNA

80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 10 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 (Different sides, Same side), 1 20 95 100 105 110 D-Y7BAL (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 110 + 45 105 + 45 n = 4, 8, 12, 16 100 + 45 n = 4, 8, 12, 16 95 + 45 n = 4, 8, 12, 16 20 + 45 n = 2, 4, 6, 8 2 (Different sides, Same side), 1 15 120 130 140 n = 4, 8,

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Air Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

CY1

1 to 60 0.9 to 75 0.8 to 90 0.7 32 400K 8cos + 2 (5.1+Lo) sin Angle coefficient (k) k = [to 45(=)] = 1, [to 60] = 0.9, [to 75] = 0.8, [to 90] = 0.7 Lo: Distance from mounting surface to load center of gravity (cm) 40 20 36 2.9+Lo 10 5.25 2.2+Lo 6 2.55 1.9+Lo 15 17.5 2.7+Lo Bore size (mm) Allowable load weight (WA)(kg) 25 60 3.4+Lo 32 105 4.2+Lo 40 200 5.1+Lo Bore size (mm) 5.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

40 112 95 CXS10-45-XB19 45 117 100 CXS10-50-XB19 50 122 105 CXS10-60-XB19 60 132 50 115 CXS10-70-XB19 70 142 125 CXS10-75-XB19 75 147 130 5 Series CXS-XB19 Dimensions CXS15--XB19 S ZZ 12 7 6 18 20 1 30 Z SS 2-3 x 16l AW (spring pin) 12 2-4.3 through 2-8 counter bore depth 4.4 45 0.2 50 0.2 45 0.2 48 25 56 58 6.3 5 2.1 M4 x 0.7 x 14.5l and M4 x 0.7 (hexagon bolt) (hexagon nut) 2-M5 x 0.8

AC

0.55 45 0.58 45 1.08 45 1.18 AF3000 Bowl capacity (cm 3) Weight (kg) VEX Accessory (Standard) Bowl guard AW Accessory (optional) Part No.

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100

Table of Contents

Lock 15-2-75 4 Series KK Plug (P) Socket (S) Part no. Male thread type Male thread type Body size Port size Part no.

0.4

Formula: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (For one input block.

MQQ

, 60 RHC Mounting style 10 15, 30, 45, 60, 75, 100 16 15, 30, 45, 60, 75, 100 Basic style Foot style Rod side flange style Head side flange style (Except 6) Single clevis style (Non-integrated type) Double clevis style Note 1) Bore size: 20, 25 mm only Mounting brackets are shipped together, (but not assembled).

MQQ

, 60 RHC Mounting style 10 15, 30, 45, 60, 75, 100 16 15, 30, 45, 60, 75, 100 Basic style Foot style Rod side flange style Head side flange style (Except 6) Single clevis style (Non-integrated type) Double clevis style Note 1) Bore size: 20, 25 mm only Mounting brackets are shipped together, (but not assembled).

Single Axis Electric Actuator Series LJ1H

Model Regenerative Absorption Unit Selection Guide Allowable Moment (Nm) LJ1H2021PF-K (Power supply voltage 100VAC) LJ1H2022PF-K (Power supply voltage 200VAC) Allowable static moment Pitching Yawing m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) Allowable dynamic moment 71 75 25 50 75 100 125 150 175 200 225 250

IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

Electric Actuator with Integrated Guide

Refer to page 66 for part numbers. 41 45 Non-standard Motor Series LTF8 Motor Output Ground Ball Screw 200W 15mm/10mm lead Horizontal Mount How to Order Motor/switch entry direction Stroke F LTF8 G PH 1 X10 Left entry Power supply voltage Motor specification Switch specifications Right entry Matsushita Electric Industrial Co., Ltd.

Compact Hydraulic Cylinder Series CH
KGB

Standard Strokes Bore sizes (mm) Standard strokes (mm) 20 & 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Made to Order Pages 22 to 24 Manufacture of Intermediate Stroke Cylinders Hydraulic Fluid Compatibility Intermediate strokes in 5mm increments can be manufactured by installing spacers

MQQ

, 60 6 Mounting 15, 30, 45, 60, 75, 100 10 15, 30, 45, 60, 75, 100 16 Standard type Foot type Front flange type Rear flange type (except 6) Single clevis type (non-integrated type) Double clevis type B L F G C Note) 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

Cylinder with Lock Series MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0