Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4 60 75 9 10 19 500 300 300 30 134 3.2 171 500 300 52 45 143 39 18 177 188 11 53 53 77 154 154 7 10 47.3 11 10 44.5 143.5 82

CS1

Stroke to 1400 106 106 120 204 322 206 40 141 301 75 25 50 322 301 0.2 Stroke to 1500 111 135 115 228 354 235 153 45 85 30 336 60 358 340 Lube Non-lube 0.2 Stroke to 998 111 120 135 257 354 240 153 90 45 60 30 336 363 345 Lube Non-lube 0.2 Stroke Other dimensions are the same as standard style.

Secondary Batteries

mounting style Mounting style B L F D Basic style Cylinder standard stroke (mm) Axial foot style 10 16 15, 30, 45, 60, 75, 100, 125, 150 Rod side flange style 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Double clevis style (Except 6) *Manufacture of intermediate strokes at 1 mm intervals is possible.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

60 44 18 25 14 17.5 9.5 18 9 47 160 8 44 77 10 20 M14 x 1.5 30 22 50 9 19 50 25 73 73 53 20 28 17 17 13 M10 x 1.5 20 11 52 172 10 53 88.5 12 22 M16 x 1.5 30 26 63 8 21 55 28 80 80 60 22.4 30 17 17 13 M10 x 1.5 22 11 55 190 10 60 95 12 25 M18 x 1.5 30 26 80 8 26 65 32 100 100 75 28 32 22 20 15 M12 x 1.75 26 13 65 207 12 75 115 14 29 M22 x 1.5 35 30 100 6.5 34 80 38 118 118 90 35.5 35 27 19

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Allowable voltage fluctuation (%) Power consumption (W) [Current mA] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Refer to pages 3-3-60 to 3-3-65 for manifold use.

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

39

Cylinder Specifications Bore size (mm) 25 50 Equivalent 40 63 Equivalent 80 Equivalent Clamping Unclamping 30 , 45 , 60 , 75 90 , 105 , 120 30 , 45 , 60 75 , 90 , 105 105 Angle Cushion Unclamping side: Rubber bumper Maximum operating pressure 0.8 MPa Ambient and fluid temperature 10 to 60 (No freezing) Minimum operating time 1.0 sec. to clamp, 1.0 sec. to unclamp Power clamp cylinder with

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

60 60 FZ 188 154 152 144 G M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 42.5 34.5 30 24 NA NN ZZ FY FT 40 32 25 20 Bore size 16 13 13 13 6 6 5 8 8 8 M26 x 1.5 M26 x 1.5 M20 x 1.5 75 75 75 5 4 4 4 26-0.033 0 26-0.033 0 32-0.039 0 8 10 M32 x 2 82 36 The bracket is shipped together.

JXCx-OMU0004

1200 60 1200 60 1200 60 1200 12 65 1400 65 1400 70 1400 70 1400 13 70 1600 70 1600 80 1600 80 1600 14 75 1800 75 1800 90 1800 90 1800 15 80 2000 80 2000 100 2000 100 2000 LEHZ32 LEHZ40 2] 2] [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 1 10 150 10 150 2 15 200 15 200 3 20 300 20 300 4 25 400 25 400 5 30 500 30 500 6 35 600 35 600 7 40 700 40 700 8 50 800 50 800 9 60 900 60 900 10 70 1000 70 1000

SMC

100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 FF 40 40 40 50 35 60 70 75 80 F 50 50 50 60 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25

VQZ1000/2000/3000

pilot specifications, refer to page 2-7-60.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25

Modular F.R.L. Units

-X430 -X440 Environment Low temperature High temperature Ambient temperature [C] 30 to 60 5 to 80 Fluid temperature [C] 5 to 60 (with no freezing) Material Rubber parts Special NBR FKM Main parts Metal (Aluminum die-cast, etc.)

Slider Type Ball Screw Drive/11-LEFS Series

Screw Drive Horizontal Vertical 22500 22500 20 20 Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] Duty ratio: 50% 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000 12500 12500 10 10 Duty ratio: 100% Duty ratio: 100% 7500 7500 5000 5000 2500 2500 0 0 0 10 20 30 40 50 60 0 10 20 30 Work load [kg] Work load [kg] 50 Model Selection LEFS Series AC Servo

LJ1H

Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 60 61 Non-standard Motor/Horizontal Mount Specification Series LJ1H30 Dimensions/LJ1H303PD(X10) Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12

ISO Standard Hydraulic Cylinder

1.5 73 6.5 22 22 34 12 41 19 37 18 47 3/8 128 62 153 175 51 32 50 25 to 800 75 75 52.3 14 105 130 M12 x 1.25 11 25 M20 x 1.5 74 7 28 28 42 9 52 24 42 18 53 1/2 134 67 159 187 57 33 63 25 to 800 90 90 64.3 14 117 145 M12 x 1.25 13 32 M27 x 2 80 12 36 36 50 13 65 30 39 17 68 1/2 136 71 168 204 55 33 80 25 to 800 115 115 82.7 18 149 180 M16 x 1.5 17 41 M33 x 2 93 15 45 45 60 9 83 41 46 20 76

IDU/IDF

60 72 72 114 125 126 135 Weight (kg) Coating color Applicable compressor (screw type) kW Munsell 10Y8/0.5 (White) 11 15 22 37 75 55 Note 1) Select an air dryer according to the selection method and not the rated conditions.