Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

14.5 17 285.5 275 254.5 15.5 18 298 287.5 265 16.5 19 310.5 300 275.5 17.5 20 310.5 300 286 12.5 L1 L2 L3 L4 External Pilot Manifold L Dimension n: Stations L n 2 135.5 125 107.5 14 16 285.5 275 254.5 15.5 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15 10 223 212.5 191.5 16 11 235.5 225 202 17 12

C85

With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 M8 x 1.25 71 84 96 134 159 109 25 22 10 36 20 8 M10 x 1.25 74 87 99 137 162 112 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

C76

151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5

C76

151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5

Industrial Filters

34 750 24 560 262 745 550 300 860 1390 1845 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 635 870 34 1000 24 326 745 550 300 860 1650 2105 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 630 920 37 750 24 317 795 600 300 880 1410 1865 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 710 970 37 1000 24 394 795 600 300 880 1670 2125 120 250 80 (3B) 100 (4B) 150

VQZ1000/2000/3000

144 (Lead wire length) 72 Indicator light 30.5 <35.5> 150 MAX.10 75 Applicable cable O.D. 3.5 to 7 Pg.7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 M plug connector (M): VQZ3220 1(R)-M-C6/C8/C10/02 35.5 Cover diameter 1.5 Cross section 0.23 mm2 (Lead wire length) 300 132 77 66 154.5 Indicator light 37 <42> < >: AC 2-7-16 17 17 Body Ported Series VQZ1000/2000

smcmaintenancepartslist

temperature (C) Note 2) 0 to 150 0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

5

, 175, 200, 250, 300, 350, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125

MLGP

, 175, 200, 250, 300, 350 W 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 Minimum Auto Switch Mounting Stroke Manufacture of Intermediate Strokes (mm) Spacers installed Spacers are installed in standard stroke cylinders. 20 to 32: Stroke can be modified in 1mm increments. 40 to 100: Stroke can be modified in 5mm increments.

MLGP

, 175, 200, 250, 300, 350 W 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 Minimum Auto Switch Mounting Stroke Manufacture of Intermediate Strokes (mm) Spacers installed Spacers are installed in standard stroke cylinders. 20 to 32: Stroke can be modified in 1mm increments. 40 to 100: Stroke can be modified in 5mm increments.

Series IDG

170 (6.00) 240 (8.48) 300 (10.59) IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 50 (1.77) 100 (3.53) 150 (5.30) IDG60SM IDG75SM IDG100SM V type A regulator combined with the M type 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3V IDG5V IDG10V IDG20V IDG30V IDG50V IDG60V IDG75V IDG100V 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

SZ3000

L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Internal Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 310.5 300 275 18 273 262.5 243.5 15 285.5 275 254 16 298 287.5 264.5 17 110.5 100 86 12 223 212.5 191 16 235.5 225 201.5 17 235.5 225 212 12 248 237.5 222.5 13 260.5 250 233 14 185.5 175 159.5 13 198 187.5 170 14 210.5 200 180.5 15 135.5 125 107 14 148 137.5 117.5 15 160.5 150

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 2032, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Data Intermediate strokes and strokes shorter than 75 mm are also available.

Environment

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

energy saving effect

HRS 100/150 Applicable model Dimension [mm] A B C HRSH250/300-A--A 916 536 1838 HRSH100/150/200-A--A 830 401 1538 HRSH100/150/200/250-W--A 570 1353 HRSH 090 HRSH HRSH HRSE HRZ HRZD HRW C HECR HEC 118 HEB A B HED HEA Option symbol With Earth Leakage Breaker B IDH HRSH 20 B With earth leakage breaker A leakage breaker is built in to automatically stop the supply power when it has short-circuit

MLGP

, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU ML1C Spacer installation type Spacers are installed in the standard stroke cylinders. 20 to 32: Stroke can be modified by the 1 mm interval. 40 to 100: Stroke can be modified by the 5 mm interval.

MLGP

, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU ML1C Spacer installation type Spacers are installed in the standard stroke cylinders. 20 to 32: Stroke can be modified by the 1 mm interval. 40 to 100: Stroke can be modified by the 5 mm interval.

Adsorption Plate

Adsorption surface size SP2330 SP2430 SP2530 SP2630 150 x 150 180 180 20 150 82.5 82.5 105 16 200 x 200 230 230 20 200 107.5 107.5 130 25 250 x 250 280 280 25 250 132.5 132.5 155 36 300 x 300 330 330 25 300 157.5 157.5 180 49 755 SP Series Made to Order Please contact SMC for detailed specifications, delivery and pricing.