240

or less 100 70 30 3 100 15 1 LEC 11.

Industrial Filters

x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 x L500 65 x L250 65 x L750 65 x L250 65 to 70 x L250 65 x L250 65 to 70 x L250 Element size Cover Stainless steel 304 Case Stainless steel 304 Main materials Gasket Fluororesin Fluororesin Fluororesin O-ring NBR FKM Legs SS400 (Chromatic plating) Weight (kg) 10 13

air-filter-e

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Air Preparation Equipment

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

12.5 14 8 33.6 20 8 16 5 66 46 24 64 24 27 13 86 9.5 7 85 M10 x 1.5 x 15 12.5 14 8 41.6 25 10 20 5 76 57 25 74 25 31 17 104 10.5 10 95 PA PB PW QW S T TT ta tb Q W Z M (N) MM NN P LD Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 8 7.5 M5 x 0.8 M8 x 1.0 M5 x 0.8 5.6 30 50 75 30 62 12.5 22.5 0.5 1 75 72 97 10 9.5 M6 x 1.0 M10 x 1 Rc 1/8 5.6 40 70 90 38 73

XM, XY

80 40 50 65 70 88 90 P.C.D 27 70 P.C.D 58.7 6 x 6.6 114 P.C.D 92.1 8 x 8.4 95 110 XYA/In-line type C D XLA G Fd C XL (K flange) XLQ XM XY XM XY B DXSA XVD H 45 XGT A CYV E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2 130 178

LJ1H

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

C95Series

I~} a: D-A59W -25 60 70 65 11 0 115 120 1 pC. 15 .. I ~ .pa. (':'!." 15 . I~ _OJ ~I~) -25 60 70 65 11 0 115 120 OF5J5 1 pC. 10 :!l. 2 pes , ~~~ 70 75 95 120 125 130 !i 1 pc. 10 0 DF!

Table of Contents

50 70 Note 1) J dimension is at fully closed.

MG

Standard stroke (mm) Bore size (mm) PW Q R B C DA G GA GB H J K L MM ML NN PB 20 25 18 70 78 62 10 36 10.5 8.5 83 18 18 24 M5 x 0.8 13 M5 x 0.8 10.5 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 25 28.5 26 78 78.5 62.5 12 42 11.5 9 93 21 21 30 M6 x 1.0 15 M6 x 1.0 13.5 U VA VB WA WB X Bore size (mm) XA XB S T 75 st or less Over 250 st Over 75 st to 175 st Over 175 st to 250 st 75

VFR

or less VFR450 VFR451 VFR454 Pressure center 3 70 or less Note 1) EA, EB port: Rc 3/8 Note 2) [ ]: Normal position Note 3) Min. operating frequency is once in 30 days.

CJ2

10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Bore size 10 16 10 mm 16 mm CJ2 Intermediate strokes are available by the 1 mm interval with no stroke adjustment by spacer.

High Vacuum Angle Valve

181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

MGP

400st 140 140 161 161 125 to 200st 118 118 134 134 75 to 124st 98 98 114 114 25 to 74st 21.5 15 21 16 75 to 124st 38.5 32 42 37 125 to 200st 58.5 52 62 57 201 to 400st 80.5 74 89 84 25 to 74st 81 81 93 93 32 40 50 63 32 40 50 63 80 100 A E Bore size (mm) 25 to 49st 109.5 121 50 to 74st 130 147 75 to 200st 160 180 201 to 400st 193 203 25 to 49st 13 5 50 to 74st 33.5 31 75 to 200st 63.5 64

CLA

With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JO

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

75 Series VZ5000 Option/Standard Manifold Individual EXH Spacer Assembly Installation of the VZ500 Valve on the VZ5000 Manifold Combinations of Solenoid Valve, Manifold Gasket and Manifold Base DXT199-29-2A Use of an adaptor plate makes it possible to mount Series VZ500 on the manifold base of Series VZ5000.

MY1

PP 24 37.5 53 69 V V 23.5 25 60 70 QQ 27 29.5 35 38 WW 22.5 28 25 28 TT 22.5 27 30 40 XX 47 56 90 120 UU 23.5 29 40 48 RR 34 45.5 61 75 SS 10 13.5 15 20 Model MY1B 50G MY1B 63G MY1B 80G MY1B100G "P" indicates cylinder supply ports.

MY1

52 12 M6 x 1 37 25 MY1B32 50 2 M5 x 0.8 10 49 64 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 64 12 M6 x 1 45 30.5 MY1B40 63 2 M6 x 1 13 61.5 75 (mm) PC PD T VV XX YH YW Z ZZ P PA PB Q PP QW QQ RR SS TT UU WW Model Rc 1/8 60 30 206 12 42 16 16 6 14.5 15 12.5 MY1B25 55 6 10 16 28 38.5 46 220 Rc 1/16 Rc 1/8 80 35 264 17 51 16 23 4 16 16 16 MY1B32 70 10 10 19 32 48 55 280 Rc 1/16 Rc 1/4 100

CLQ

75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l