CP95

, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200

energy saving effect

Page 175 Required Cooling Capacity Calculation . Page 184 List of Function . Page 175 Precautions on Cooling Capacity Calculation ... Page 185 Alarm . Page 175 Circulating Fluid Typical Physical Property Values ... Page 185 Communication Function . Page 176 Specific Product Precautions . Page 186 Options With Caster Adjuster-foot . Page 177 With Earth Leakage Breaker .

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

36.4 B B B B B B 65.3 17 50.4 70.2 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5 1/8 (P, R port) (Station n) (Station 1) (Light/surge voltage suppressor) Applicable connector: 26 pins MIL type With strain relief (Conforming to MIL-C-83503) 48.5[55.5] 5.8 25.6 20 Stations n L1 L2 6 97.5 89.5 8 122.5 114.5 10 147.5 139.5 5 85 77 7 110 102 9 135 127 11 160

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

196 200 221 225 246 48 22 28 59.4 156 180 181 205 206 230 231 255 56 30 30 71.4 175 200 200 228 225 253 250 278 For dimensions of pivot bracket, refer to page 6-5-12.

Table of Contents

185.5 147.5 160 187.5 198 158.5 171 200 210.5 169.5 182 212.5 223 180.5 193 212.5 223 191.5 204 225 235.5 How to Order Valves How to Order Manifold Assembly Specify the part numbers for valves and options together beneath the manifold base part number. 1 3 0 Y 5 C6 VQ1 Lead wire kit VV5Q13-08LD21 set Manifold base part no.

Stability of suction position,

materials Pad diameter: 63, 80 Compared with the ZP series ( ) * The pad material when weight was measured is NBR. 8 16.4 ZP (Current model) ZP3E ZP2/Flat type ZP3E/Flat type with groove Pad diameter Suction port Area [mm2] Suction port Area [mm2] 32 8.4 55.4 40 6 28.3 50 63 8 50.2 16.4 211 80 100 10 78.52 125 Pad diameter Weight [g] Weight [g] 32 56 40 91 57 50 110 75 63 230 150 80 270 160

VFS

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 900 Perpendicular, upward actuation Horizontal

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(Station 1) Light/Surge voltage suppressor (18.9) A side: Orange B side: Green (62.4) (DIN rail dimension) ON ON 43.5 OFF OFF (7.5) 34.2 Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 123 112.5 97 13 3 135.5 125 107.5 14 4 148 137.5 118 15 5 160.5 150 128.5 16 6 173 162.5 139 17 7 173 162.5 149.5 12 8 185.5 175 160 13 9 198 187.5 170.5

MXS

190 235 285 150 35 15 45 9 40 40 415 26+0.17S 340 340 400 500 340 50 30 60 20 80 90 930 690 43+0.21S 600 610 670 800 600 80 50 105 30 120 160 1800 1450 1150 55+0.21S 1020 1050 1150 1300 1000 170 100 205 71 140 310 3350 2800 2250 1700 166+0.45S 1740 1750 1900 2160 1720 215 150 300 125 240 540 4900 4300 3400 2750 240+0.45S 3.11-7 Series MXS Table Deflection Table deflection by pitch moment

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

0 A B 4 3H9 ( ) depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 HA GA A-A B-B (mm) Model F 25 25 26 32 46 50 N 4 4 6 6 6 6 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11 10 12 14 13 12 J 17 28 40 52 78 105 K 23.5 33.5 43.5 53.5 63.5 88.5 KA 82.5 112.5 NA 4 4 4 4 8 8 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5 108.5 134.5 ZZ 71 81 95 109 134 160

RZQ

Features Applicable bore size Grommet (perpendicular) D-A80 Grommet (in-line) Connector (perpendicular) Grommet (in-line) Grommet (in-line) Grommet (perpendicular) Grommet (in-line) D-A80H D-A80C D-Z80 D-A90 D-A90V D-F7NTL 12 to 160 Without indicator light Reed switch 125 to 200 32 to 100 12 to 160 Solid state switch With timer D-F7NTL is also available with pre-wired connector.

Environment

Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 600 700 800 A 12 900 600 B 6 450 300 C 3 225 150 LEY25 Motor mounting position: Top/Parallel, In-line 100 W /40 (Motor rotation speed) (4500 rpm) (3000 rpm) A 20 1200 800 B 10 600 400 C 5 300 200 LEY32 Motor mounting position: Top/Parallel 200 W /60 (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160

3 Position Cylinder Series RZQ

RZQ mounting bolt C CR D 110 135 160 120 145 170 130 155 180 135 160 185 CH Model RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75Mounting bolt M5 x 110l M5 x 135l M5 x 160l M5 x 120l M5 x 145l M5 x 170l M6 x 130l M6 x 155l M6 x 180l M8 x 135l M8 x 160l M8 x 185l 9.5 8 10 8.5 16.5 11.5 3 17.5 12.5 3.5 4 Series RZQ Model Selection

MXQ

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W dimension tolerance 0.1 mm MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 CX Model Radial internal clearance (m) 14 to 0 1) 0.1 mm for 75 mm or longer stroke 4 to 0 4 to 0 6 to 0 10 to 0 12 to 0 Bore size (mm) 8 12 16 20 25 D50 to 500 mm/s Piston speed Holding force (N) 25 60 110 160

MNB

Standard Stroke/ Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

MNB

Standard Stroke/ Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

MVGQ

CC 25, 50, 75, 100 125, 150, 175, 200 M L MVGQ 80/100 RB Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

70pvpump

Recommended Valve PA3000 PA5000 VQZ140 (Exhaust center) VQZ240 (Exhaust center) Refer to page 17-5-160 for details. 17-5-153 14 Series PA Performance Curve: Air Operated Type PA313 Flow Characteristics PA513 Flow Characteristics 50 50 Cycle 7 Hz Cycle 5 Hz Cycle 3 Hz (No change when SUP = 0.2 MPa) Cycle 7 Hz Cycle 5 Hz Cycle 3 Hz (No change when SUP = 0.2 MPa or 0.3 MPa) SUP = 0.5 MPa 40