Air Slide Table

For details, refer to the adjuster specifications on page 70.

AC

Model Port size Q M B B A B C D P E F G H J K L M5 x 0.8 25 40 53 70 75 90 95 66 97.5 129 165 169 244 258 7 11 14 18 20 24 24 25 40 53 70 70 90 95 86.5 120.5 27.5 40 56 73 73 AF1000 AF2000 AF3000 AF4000 AF4000-06 AF5000 AF6000 8, 1 4 1 17 16 17 14 23 23 30 41 50 50 70 70 27 40 54 54 66 66 22 23 26 25 35 35 5.4 6.5 8.5 8.5 11 11 8.4 8 10.5 10.5 13 13 40 53 70 70 90 90 2.3 2.3 2.3 2.3 3.2 3.2

Battery-less

Refer to the dimension drawings on pages 175 and 176 for the mounting dimensions.

Table of Contents

70 G 27 40 54 54 66 66 D 25 40 53 70 70 90 95 A B 77 115 142 176 176 250 268 E 47 47 H 22 23 26 25 35 35 C 26 36 38 40 38 41 45 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specifications Metal bowl B 82 121 142 176

Integrated Controller

The load factor for each direction can be found as follows. x = 0/350 = 0 y = 50/250 = 0.2 z = 200/1000 = 0.2 5. x + y + z = 0.4 1 1000 1000 Lz 1000 800 800 800 600 600 600 L2 [mm] L3 [mm] L1 [mm] 400 400 400 Lx Ly 200 200 200 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 0 0 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 15 Easy to Operate Model Selection EQFSH Series

Secondary Batteries

Bore size 12 16 20 25 Cylinder stroke (mm) 32 40 50 63 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300 350, 400 20, 25 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 400 32 to 63 *Specifications and dimensions for the 90-series are the same as standard products.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y A Connection thread S 10 94 60 23 20 132 70 51 30 142 80 40 178 90 77 50 188 100 E D C B 10 49 32.9 24 P 10 8 M5 x 04 06 2.5 Applicable tubing O.D.

Compact

Select three graphs from the top of the right side first row on page 175. LEPY LEPS 3. Lx = 420 mm, Ly = 300 mm, Lz = 1000 mm 4.

MLGP

250, 300, 350 84 36.5 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st 25 24 24 st 30 30 < st 100 48 25 < st 100 100 < st 200 200 < st 300 300 < st 350 20 25 32 9.5 9.5 11 13 15 20 5.6 5.6 6.6 12.5 18 26 30 70 78 96 30 81 72 82 98 120 120 124 54 64 78

MLGP

250, 300, 350 84 36.5 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st 25 24 24 st 30 30 < st 100 48 25 < st 100 100 < st 200 200 < st 300 300 < st 350 20 25 32 9.5 9.5 11 13 15 20 5.6 5.6 6.6 12.5 18 26 30 70 78 96 30 81 72 82 98 120 120 124 54 64 78

MLGP

93 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 112 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st25 24 24 st30 3070 78 96 30 81 72 82 98 120 120 124 54 64 78 44 50 63 10.5 200 200 200 25 24 44 44

MLGP

93 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 112 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st25 24 24 st30 3070 78 96 30 81 72 82 98 120 120 124 54 64 78 44 50 63 10.5 200 200 200 25 24 44 44

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

Lubrication Equipment

70 90 95 27 40 56 73 73 50 80 95 120 120 120 120 81.5 122 142 177 177 254 268 25 40 53 70 75 90 95 25.5 38 38 41 39 45 45 M5 X 0.8 AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 30 41 50 50 70 70 27 40 54 54 66 66 22 23 26 25 35 35 5.4 6.5 8.5 8.5 11 11 8.4 8 10.5 10.5 13 13 40 53 70 70 90 90 2.3 2.3 2.3 2.3 3.2 3.2 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 SAC1000, #3 SAC2000,

Proposals for Energy Saving

M5 x 0.8 through hole 0.5MPa 0.35MPa (except 05) 0.45MPa (13,15 only) H M S 112 85.4 74 70 62 10 P ZM1 K5LZ-E15L-X235 26 30 Body type Conforms to the standard product.

VZ100/300/500

Weight (g) Port size Body ported VZ110 VZ120 70 M5 x 0.8 0 to 0.5 Note ) Weight stands for grommet type Flow Characteristics Flow characteristics Type of actuation Port size N.C.: 1 2 (P A) N.O.: 3 2 (R A) N.C.: 2 3 (A R) N.O.: 2 1(A P) Supply side Exhaust side Model C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Body ported VZ110 VZ120 N.C. 0.11 0.19 0.026 0.071 0.023 0.042 0.19 0.13 0.071

Air Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.