MG

, 175, 200 250, 300, 350, 400 78.5 1.5 62.5 12 10 6 42 11.5 9 93 M5 21 21 30 M6 x 1.0 15 M6 x 1.0 5.6 9.5 5.5 1/8 37.5 13.5 28.5 26 WA WB Bore size (mm) Standard stroke (mm) R S T U VA VB X XA XB YY YL Z 100 to 175 st 200 to 250 st 300 to 400 st 100 to 175 st 200 to 250 st 300 to 400 st 75 st or less 75 st or less 25, 50, 75, 100, 125, 150, 175, 200, 250 16 20 25 200 24 54 25 3 62 3.5 46

Cylinder with Lock

12.5 25 37.5 50 75 100 125 150 175 200 225 250 50 12.5 25 37.5 50 75 100 125 150 175 200 225 250 63 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 12.5 25 37.5 50 75 100 125 150 175 200 225 250 100 12.5 25 37.5 50 75 100 125 150 175 200 225 250 13 Cylinder with Lock Double Acting, Single Rod CP96N Series Dimensions: With Mounting Bracket * Refer to Basic (B) for other dimensions.

CQS

Rubber bumper is standard equipment for long stroke type. 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Action 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 D Double acting 25 For "Manufacture of Intermediate Strokes", refer to page 7-4-5. Applicable Auto Switch/Refer to page 7-9-1 for further information on auto switches.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

CQS

Cylinder stroke (mm) Long stroke (mm) 35, 40, 45, 50, 75, 100 Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 Action D Double acting 12, 16 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

MGP

The intermediate strokes that do not use a spacer are made to order "XB10" shown on p.5.4-1. 125, 150, 175, 200, 250 MGP 10, 20, 30, 40, 50, 75, 100 12 16 M L MXS 20 25 MGP 20, 30, 40, 50, 75,100, 125, 150, 175, 200 M L 250, 300, 350, 400 MXQ 32 40 50 63 80 100 MXF MGP 25, 50, 75, 100, 125, 150, 175, 200 M L 250, 300, 350, 400 MXW OUT IN MXP Theoretical Force (N) MG Rod diameter (mm) Operating

LEF-OM002xx

[mm/s] 801900 24 to 610 16 to 410 8 to 200 9011000 24 to 500 16 to 340 8 to 170 500 10 to 500 5 to 250 20 to 1000 12 to 500 6 to 250 24 to 1200 16 to 500 8 to 250 Actuator specification 501600 20 to 900 12 to 500 6 to 250 24 to 1200 16 to 500 8 to 250 Driver type LECPA Note2) 601700 20 to 630 12 to 420 6 to 230 24 to 930 16 to 500 8 to 250 Stroke Speed range 701800 20 to 550 12 to 330 6

Cylinder with Lock

[mm] Bore size Standard stroke Max. manufacturable stroke Stroke range q Stroke range w 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500,

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

High Vacuum Angle Valve, XL Series

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

MXQ

210 250 315 385 26 + 0.2 S 745 100 70 23 30 23 25 47 35 335 340 380 450 490 655 43 + 0.2 S 1250 1400 160 105 40 53 40 45 75 60 605 610 670 735 835 1000 55 + 0.2 S 2350 2650 2900 310 130 65 120 65 80 170 115 1100 1100 1100 1200 1400 1750 166 + 0.5 S 3450 4300 4700 560 200 110 140 110 130 220 180 1750 1750 1750 1950 2400 2750 240 + 0.5 S Option Specifications Stroke Adjustment Range of

2/3 Port Valve

83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90 2.3 2.3 62 72 50 60 30 35 31 36 35 40 43 49 5.5 6.5 17.5 20 151.5 32A, 40A, 50A Port size Main Port Rc(PT) Pilot port A B C D E F G H I J K L M Model Rc(PT) 1 8 1 4 1 4 VNA5-32A VNA6-40A VNA7-50A 1 4 1 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 163 180.5 203.5 175.5 193 216 219.5 237 260 222.5 240 263 229.5

2/3 Port Valve

Construction/Components 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 0.61 4.5 11 1 4 250 Normally closed (N.C.) (8A) 6 1.05 19 8 1.7 31 1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

XL

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

Adsorption Plate

Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

JXCx-OMU0004

2] 2] [mm/s] [mm/s [mm/s] [mm/s 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800 17500 15 1000 20 2000 20 62 No.JXC-OMU0004-A 11. 11.1 [5m ]

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

JB140-22-250 27 Series MGZ/MGZR Specific Product Precautions 2 Be sure to read before handing.

Electric Actuator with Integrated Guide

Positioning distance (mm) 600 300 100 10 1 10 60.5 30.5 10.5 1.5 0.5 100 6.5 3.5 1.5 0.6 0.5 Speed (mm/s) 250 2.9 1.7 0.9 0.6 0.5 500 1.8 1.2 0.8 0.6 0.5 Values will vary slightly depending on the operating conditions.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 402 Series 10-SZ3000 EX510 Gateway-type Serial Transmission System Type