CG5-S

Relationship of liquid entry and sliding distance X Amount of liquid entry (g) 15 10 Standard cylinder Stainless steel cylinder 5 0 50 100 150 200 Sliding distance (km) 250 300 Conditions Working fluid ...Air Pressure .. 0.5MPa Liquid ...

Peltier-type Chiller Thermo-con/ Compact Type

Peltier-type Chiller Thermo-con/ Compact Type Air-cooled Compact 130 mm x 210 mm x 150 mm Height Width Depth Low-noise design (at low load): 37 dB 130 mm 150 mm Display/Operation panel 210 mm Circulating fluid level gauge Dustproof filter Replaceable Cooling capacity: 220 W Superior temperature control Temperature stability: 0.1C Now only takes about 41 seconds to lower the temperature by

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Unit*12 Instantaneous flow L/min, cfm Accumulated flow L, ft3 Display Display range Instantaneous flow [L/min] 0.05 to 1.05 0.1 to 2.1 0.25 to 5.25 0.5 to 10.5 1.3 to 26.3 2.5 to 52.5 5 to 105 10 to 210 Zero cut-off range 0 to 10% F.S. (Select per 1% F.S. for the maximum rated flow rate.)

SYJ300/500/700

cable L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) M: Common exhaust for the pilot and main valve + + + D: Push-turn locking slotted type + R port P, E port H: Lead wire length 600 mm Pilot valve exhaust is centralized to main valve.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[87.1] (Lead wire length) 300 57.1 [ ] for AC Other dimensions are the same as the grommet

JXCx-OMU0004

2500 225 2500 15 700 3000 360 3000 1100 3000 750 3000 400 3000 LEFS32H LEFS32A LEFS32B LEFS40H LEFS40A LEFS40B 2] 2] 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 24 200 16 200 8 200 30 200 20 200 10 200 1 30 300 20 300 10 300 40 300 30 300 12 300 2 40 400 30 400 15 400 50 400 40 400 15 400 3 50 500 40 500 20 500 60 500 50 500 20 500 4 60 600

SYJA3000

SYJ3000-21-2A1 pc. 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) 3.1-16 Series SYJA3000 Body Ported Base Mounted 2 position single: SYJA3120-M3(-F) 2 position single: SYJA3140-M5 10 10 28.4 (Mounting holes) 3.5 25 2.5 5 5 10 22 16.4 3.2 210 SlA 22 4 (Mounting hole) Manual override M3 X 0.5 (Pilot port) M3 X 0.5 (Pilot port) (Non-locking) A B 11 17.5 VlA 1 (Bleed port) 1.5 A B 1.5 1.5 5

TABLE OF CONTENTS

Max Operating Pressure Differential Table A 3.5 Watts Orifice Size CV Factor FLOW CONFIGURATION Valve No: MODEL TYPE AC DC Inlet Exhaust Inlet Exhaust Model 581 2 Way Normally Open 581A15PE 581F15PE 581M15PE 581W15PE 300 275 230 150 300 275 230 150 .6MM .8MM 1.0MM 1.2MM 0.010 0.020 0.030 0.034 Model 582 2 Way Normally Closed 582A15DE 582F15DE 582M15DE 582W15DE 300 250 150 135 300 250 150

3 Port Air Operated Valve Series SYJA300

76.1 Max. 10 66.1 77 Pg7 65.2 [72.2] Approx. 300 (Lead wire length) 41.1 M8 x 1 58.6 68.1 38.7 Approx. 300 (Lead wire length) 79.4 54.1 [61.1] 86.9 Applicable cable O.D. 3.5 to 7 Refer to page 4-4-61 for dimensions with connector cable.

CNG

301 to 400 20 to 300 301 to 400 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l ZZ H e f h ZZ 20 25 32 40 M4 x 0.7 depth 7 5 6 M8 x

CNG

7 to 300 45 22 19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ

Cylinder with Lock Series CNG

7 to 300 45 22 19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Station n L1 L2 Station 2 78 50 Station 20 438 410 3 98 70 4 118 90 5 138 110 6 158 130 7 178 150 8 198 170 9 218 190 10 238 210 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 65 Series SYJ7000 Type 42: Side Ported/SS5YJ7-42Stations C6,N7 C8,N9 [ ]: AC Grommet (G) 122 [126.4] Approx. 300 (Lead wire length) Manual override L1 14 L2 4-4.5

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to 750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01 (Lead H: 0.02) Lost motion [mm]*2 0.05 Lead [mm] 20 12 6 24 16 8 30

Smooth Cylinder/Low Speed Cylinder

31 16.5 40 6 5.5 M10 x 1.25 17 29 M5 x 0.8 depth 7.5 19.5 2 22 10 14 8 Up to 300 38 20 40 6 5.5 M10 x 1.25 17 35.5 M5 x 0.8 depth 8 19.5 2 22 12 18 10 Up to 300 47 26 50 8 6 M14 x 1.5 19 44 M6 x 1 depth 12 27 2 30 16 25 14 Up to 300 58 32 58 11 7 M18 x 1.5 27 55 M8 x 1.25 depth 16 32 2 35 20 30 18 Up to 300 72 38 58 11 7 M18 x 1.5 27 69 M10 x 1.5 depth 16 32 2 35 20 32 18 Up to 300 89 50

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F Maximum speed (mm/s) Load center of gravity position l (mm) Maximum speed (mm/s) up to 300 up to 500 up to 700 up to 300 up to 500 up to 100 up to 200 up to 300 Graph (1) Graph (2) Graph (3) Graph (4) Graph (5) Graph (6) Graph (7) Graph (8) l: This

C95

Standard Stroke Bore size (mm) Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 32 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 50 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 80 300, 350