Table of Contents

(C ) Temp. conditions Power source Vacuum 60 10 Air Response Characteristics 40 AC/DC Maximum Minimum AC/DC 20 Response time (msec) Switching Signal ON OFF Model Power source Tightness of Valve (Leak rate) 60 or less DC VX31 40 or less 50 or less AC 40 or less 40 or less DC 50 or less 40 or less AC 50 or less 60 or less DC 60 or less 40 or less AC 50 or less Seal material Fluid Air Liquid

Applicable Auto Switch Model

(RedGreenRed) CXS 6, 10, 15, 20, 25, 32 MGQ, MVGQ 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 MGP 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 MY1B 25, 32, 40, 50, 63, 80, 100 MY1C 25, 32, 40, 50, 63 MY1H 25, 32, 40 MY1M 25, 32, 40, 50, 63 RSH 20, 32, 50, 63, 80 Specifications D-Y7lW/D-Y7lWV (With indicator light) PLC: Programmable Logic Controller D-Y7NW D-Y7NWV D-Y7PW D-Y7PWV D-Y7BW D-Y7BWV Auto

CL

42 50 59 76 92 100 112 118 60 70 86 102 116 15 17 17 21 21 16 16 11 11 11 11 11 16 16 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 32 40 40 52 52 14 14 14 9.0 9.0 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 MGG 11.5 MGC 13.5 13.5 19 19 19 MGF 112.5 121 133 141.5 150 167 CY1 18.5 18.5 18.5 W/o rod boot W/ rod boot Bore (mm) 40 50 63 80 100 125 140

Electric Actuator/Slider Type

0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500 1,500

Battery-less

500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work

15

5 46 69.8 61.4 M3 x 12 M5 x 40 14 NY M4 x 0.7 8 70 50 5 46 69.8 61.4 M4 x 12 M5 x 40 11 NX M5 x 0.8 9 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NW M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 9 NV M4 x 0.7 8 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NU M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5 46 69.8 61.4 M3 x 12 M5 x 40 12 NM2 M4 x 0.7

MY1

, 50, 63, 80, 100 Slide Bearing Type Series MY1M P. 23 to 37 16, 20, 25, 32, 40, 50, 63 Cam Follower Guide Type Series MY1C P. 39 to 53 16, 20, 25, 32, 40, 50, 63 High Precision Guide Type Series MY1H P. 55 to 76 10, 16, 20, 25, 32, 40 High Rigidity/High Precision Guide Type Series MY1HT P. 77 to 89 50, 63 Protective Cover Series MY1MW/CW Series MYMW/CW P. 90 to 95 16, 20, 25, 32, 40 P.

10

Technical Data 391 Air Cylinder: Standard Type Double Acting, Single Rod How to Order MB Series 32, 40, 50, 63, 80, 100, 125 RoHS 50 B 32 Z MB With auto switch MDB M9BW Z B 32 50 With auto switch (Built-in magnet) Number of auto switches Mounting type Bore size Accessories 1 Auto switch Nil No bracket N Pivot bracket 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm 125 125 mm Nil Without

MGP

(mm) Load rate 40% or less 16 50% or less 20, 25 60% or less 32 to 100 CL Ball Bushing Bearing MLGC MGPL32 to 63 MGPL80 to 100 CNA Over 50 stroke Under 50 stroke CB 100 100 63 P=0.5MPa P=0.5MPa CV/MVG 50 40 50 80 40 100 Load weight m (kg) Load weight m (kg) 30 CXW 32 20 CXS 50 40 10 30 CXT 5 4 20 MX 3 MXU 10 10 100 200 2 3 4 5 20 30 40 50 10 1 100 20 30 40 50 200 Eccentric distance l (mm

MB

E1 L1 R1 E1 L1 MM NDH10 NX U1 NDH10 NZ A A1 R1 U1 MM NX CA2 30 40 50 65 65 100 32 40 50, 63 80 100 125 32 40 50, 63 80 100 125 20 22 28 40 40 46 I-03M I-04M I-05M I-08M I-10M I-12M Y-03M Y-04M Y-05M Y-08M Y-10M Y-12M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.30

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

Cylinder with Lock

1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg

MY1

50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

ZP

, 50 Buffer stroke 10, 20, 30, 40, 50 mm 10, 20, 30, 50 mm Pad Type Flat Pad form Thin flat/Thin flat with ribs Flat with ribs Deep Bellows 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20, 25, 32, 40, 50 Pad dia.

CM2

163 215 203 138 190 178 113 188 253 265 213 278 290 Clevis Pivot Bracket 1 to 50 51 to 100 151 to 200 201 to 250 101 to 150 Bore size (mm) LY LV LT LP LH LG LD LF Q P Bore size (mm) LZ LZ LZ LZ LZ 59 18.4 3.2 37 30 30 6.8 15 20 20 177 202 227 21.5 6 59 18.4 3.2 37 30 30 15 6.8 25 25 181 206 231 24.5 6 75 28 4 50 40 40 15 9 32 32 199 224 274 249 27 6 75 28 4 50 40 40 15 9 40 40 228 253

Table of Contents

63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

JIS Standard Hydraulic Cylinder

to 1500 M12 x 1.5 90 63 15 42 19 43 35 1/2 52 163 15 40 31.5 31.5 261 40 63 80 17 20 65 80 25 to 1800 M16 x 1.5 110 80 17 40 22 44 44 3/4 65 184 18 40 31.5 31.5 291 40 72 1/4 stroke 100 19 15 80 100 25 to 1800 M18 x 1.5 135 102 19 42 22 44 44 3/4 75 192 20 50 40 40 316 50 84 Rod series Tolerance (mm) B-series rod C-series rod Bore size (mm) Bore size (mm) CDH9 E E MM A MA D K G H ZZ MM

Cylinder with Lock

P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg] Load mass m [kg] 50 50 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] 6 Cylinder with Lock Double Acting, Single Rod 32, 40, 50, 63, 80, 100 MWB Series RoHS How to Order 50 B 40 MWB With auto switch MDWB M9BW B 40 50

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 1500 1500 1000 800 1000 1000 Lz 600 L3 [mm] L1 [mm] L2 [mm] 400 500 500 200 Ly Lx 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 Work load [kg] Work load [kg] Work load [kg] 670 Model Selection LEFS Series AC Servo Motor Table Accuracy

High Vacuum Angle Valve

XLC/XLCV Series How to Order XLC M9N A 16 Flange size 16, 25, 40 XLC M9N A 50 1 Flange size 50, 63, 80, 100, 160 q t y w e r u XLC16 to 40 q Flange size e Pilot port direction w Flange type Rear flange surface Applicable flange 16, 25, 40, 50, 63, 80 100, 160 63, 80, 100, 160 Type Symbol Size 16 25 40 50 63 80 100 160 Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear