MY1

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

smcmaintenancepartslist

Material Applicable model Note) Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S Replacement Parts 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

CL

1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 40 50 63 80 100 125 140 160 207 3.2 3.2 3.2 4.5 6.0 8 9 9 70 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 244 36 45 45 60 60 75 75 75 252 42 50 59 76 92 100 112 118 27 30 31 37 40 35 35 39 16.5 16.0 16.0 18.0 18.0 40 40 40 84 90 98 116 126 98 98 106 59 66 66

Rotary Actuator

Applicable shaft type: K X = X = X = Y = W2 = L2 = L4 = Y = [mm] [mm] [mm] Size Y W2 L2max L4max 30 8.5 to 25 1 to 2 Y-2 L2-2 50 10 to 36 1 to 5.5 Y L2-2 63 11 to 41 1 to 6.5 Y L2-2 80 13.5 to 50 1 to 8 Y L2-3 100 17 to 60 1.5 to 10.5 Y L2-4 Size X 30 3 to 25 50 3.5 to 36 63 3.5 to 41 80 4 to 50 100 5 to 60 Size Y 30 3 to 25 50 1 to 36 63 1 to 41 80 1 to 50 100 1 to 60 Symbol: A53 Note) Except

Environment

101 to 400 32 20 to 100 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 15.4 8.2 60 60 61 1 15.9 87 101 to 500 Body Bottom Tapped [mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30

Series AP500

psig (0.69 MPa) 60 psig (0.41 MPa) Inlet pressure: 80 psig (0.55 MPa) 100 0.69 60 0.41 90 0.62 50 0.34 80 0.55 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 70 0.48 40 0.28 60 0.41 50 0.34 30 0.21 40 0.28 20 0.14 30 0.21 20 0.14 10 0.07 0 10 0.00 0.07 0 0.00 0 100 200 300 400 500 600 Flow rate (slpm, N2) 0 50 100 150 Flow rate (slpm, N2

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces) 90 + 100 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 125 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 With n pcs. (Same surface) 60 65 75 80 85 90 10 With 1 pc. With 2 pcs. (Different surfaces) 70 75 80 85 90 35 With 2 pcs.

Air Cylinder

, 125, 150 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

204 162 23 45 70 48 20 41 39 44 17 50 100 40 Up to 1200 3/4 1 +0.100 0 +0.3 +0.1 0.1 0.3 115 18.5 M20 x 1.5 90 M45 x 1.5 63 60 226 182 25 50 74 48 20 46 39 44 17 Lube Non-lube 50 100 40 Up to 1200 20+0.100 0 +0.3 +0.1 0.1 0.3 140 23 M24 x 1.5 110 M56 x 2 71 277 30 86 25 49 67 225 60 60 20 56 55 63 126 50 Up to 1200 +0.120 0 +0.3 +0.1 0.1 0.3 140 23 M30 x 1.5 130 M64 x 2 1 80 330 37 96 30

LJ1H

Refer to page 100 for part numbers. 73

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Applicable bore (mm) 20 25, 32 40 50, 63 80 100 8d9 10d9 12d9 14d9 16d9 18d9 18d9 22d9 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 (18.1) (20.7) (23.6) (27.3) (29.7) (34.3) (35.8) (39.8) (49.4) (58.4) (72.4) (90.4) 42 42 48 56 64 74 72 93 28 28 28 30 36 46 45 60 16 20 22 30 36 46 85 100 38.3 42.1 53.8 64.6 79.2 97.2

10

Bore size [mm] B TA TL TU TC TX TE TO TR TT TS TH TF Z TDH10 Bore size [mm] Z MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 32 92 40 96 50 109 63 109 80 134 100 134 125 163 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15

MGG

(mm) Stroke range (mm) Bore size (mm) AP AK AL AJ AI N AH M AG L AB K AA J I V B U T O P S A 20 25 32 40 50 75, 100, 125, 150, 200 25 6.6 9 95 82 45 125 25 112 80 11 60 12 55 30 48 108 82 12 99 M6 x 1 depth 9 Rc 1/8 26 30 9 9 108 92 54 150 35 134 100 13 70 16 65 35 57 130 100 109 M6 x 1 depth 13 Rc 1/8 13 31 75, 100 125, 150 200, 250 300 35 9 9 118 102 60 150 35 134 106 16 80 16 73 40 65

HRS100/150

For the hanging angle, use caution regarding the position of the center of gravity and hold it within 60. HRS 100/150 HRS 100/150 HRSH 090 The product will be delivered in the packaging shown below.

SYJ3000/5000/7000

Rated voltage 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry G H L LN LO M MN MO W0 Grommet (300 mm lead wire) Grommet (600 mm lead wire) With lead wire Without lead wire Without connector With lead wire Without lead wire Without connector Without connector cable Electrical

IDG

75 100 50/6 3 25/3 Nil P R None (Standard) 5 With fitting for purge air discharge 10 20 30 50 60 75 100 100/11 200/22 300/35 500/60 600/65 750/80 1000/110 Flow direction (Right Left) With dew point indicator S Standard equipment Note) In the case of two or more options, indicate them alphabetically.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

st 200 st 100 st 100 st 75 st 75 st 0 0 0 0 0 0 10 20 30 40 50 Allowable end load F (N) 20 40 60 80 100 10 20 30 40 50 60 70 Allowable end load F (N) Allowable end load F (N) MGGM40Stroke 3 (Slide bearing type) 2.5 800 st Deflection Y (mm) 2 700 st 600 st 1.5 500 st 1 300 st 400 st st: Stroke (mm) 0.5 100 st 200 st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM50Stroke 4 (

Free Mount Cylinder

60, 70, 80, 90, 100 Weight/( ): Denotes the values with D-A93.

MB

B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 47 60 60 80 80 100 115 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25 35