VDW

Valve type C37 Class B N.C. (2) N.O. (3) Stainless steel Note) 50 Note) For pure water: The armature assembly is a corrosion resistant construction. (1) IN Thread type Rc G NPT Nil F N Voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Port size Series Port size Symbol Please consult with SMC regarding other voltages. 300 200 M5

5 Port Solenoid Valve SY Series

LED In common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC. For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage. Response Time Note) Based on dynamic performance test, JIS B 8375-1981.

125

(50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz)[115 VAC (50/60 Hz)] 4 220 VAC (50/60 Hz)[230 VAC (50/60 Hz)] 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * There is no S option for AC, since a rectifier prevents surge voltage generation.

ZP

PCD 22.5 PCD 22.5 Vac. Vac. Vac. ZPT1-A5 4 x M5 x 0.8 4 x 7 Example of attachment 20 0.5 (28.5) Ring-shaped adsorption area 20 16.5 4 x 1 28.5 25 59 Vacuum Pad for Fixing Panel For adsorbing and fixing the stage of LCD panels, etc. Bellows mechanism allows complete contact with curved work surface.

ZP

PCD 22.5 PCD 22.5 Vac. Vac. Vac. ZPT1-A5 4 x M5 x 0.8 4 x 7 Example of attachment 20 0.5 (28.5) Ring-shaped adsorption area 20 16.5 4 x 1 28.5 25 59 Vacuum Pad for Fixing Panel For adsorbing and fixing the stage of LCD panels, etc. Bellows mechanism allows complete contact with curved work surface.

ZP

PCD 22.5 PCD 22.5 Vac. Vac. Vac. ZPT1-A5 4 x M5 x 0.8 4 x 7 Example of attachment 20 0.5 (28.5) Ring-shaped adsorption area 20 16.5 4 x 1 28.5 25 59 Vacuum Pad for Fixing Panel For adsorbing and fixing the stage of LCD panels, etc. Bellows mechanism allows complete contact with curved work surface.

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

1

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) XT34 With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F.O.F.* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Vacuum System Peripherals:

200 VAC 55 1 2 110 VAC (115 V) 3 220 VAC (230 V) 4 U Vacuum switch Wiring specifications (Vacuum switch) Note) U, R are available only for 24 VDC.

ZP3

adapter Vertical VAC VAC ZP3-T VAC p. 138 p. 144 p. 150 p. 156 With adapter Lateral ZP3-Y Construction Precautions Mounting Bracket Assembly VAC VAC VAC p. 139 p. 145 p. 151 p. 157 With adapter VAC VAC VAC Vertical ZP3-T p. 140 p. 146 p. 152 p. 158 With buffer Lateral ZP3-Y p. 141 p. 147 p. 153 p. 159 With buffer VAC VAC VAC 134 Compact Type ZP3 Series Specifications Pad Material Material

3 Port Solenoid Valve Series VQ100 1

G Grommet Coil rated voltage Note) Grommet: No latching type, AC and large flow 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 For the special voltages, please consult with SMC. 4-12-14 15 3 Port Solenoid Valve Series VQ100 Plug Lead Unit Manifold (VV3Q12) 5 L1 L2 3 Manual override 4-M5 Round head combination screw M1.7 x 14 300

Table of Contents

page 12 for dimensions. 200, 220, 230, 240 VAC (50 Hz), 200 to 260V (60 Hz) 2 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 380, 400, 415 VAC (50 Hz), 380 to 420V (60 Hz) 3 Compound 420, 440, 480 VAC (50 Hz), 420 to 520V (60 Hz) 4 Please refer to page 11 for dimensions.

V

0~85PSI ~0PSI P->A 0.6 (0,034) A->R 0.9 (0.05) (N)VZ110--M5 NC 0 ~ 7MPa 0 ~ 100PSI Body Ported 10-32Nom (M5x0.8) 0.15g 22in-Hg VAC 0~85PSI ~55PSI 0 ~ 5MPa 0 ~ 70PSI R->A 0.6 (0.034) A->P 0.6 (0.034 (N)VZ110--M5 NO S A F E T Y Note: In case of (N)VZ120 Supply Air to 'R' Port.

ZR

PE port Vacuum release pressure port M5 PD port Ejector unit Non-locking push type Manual override EXH PE PE 109 PD PD PD PD 80.8 81.5 PS PS PV PV 61.5 52 50 13.5 PS PD 42 35.5 33 31.5 28 PV 17 16.5 PV PV Release flow rate adjustment needle Vacuum release pressure port M5 PD port Pilot valve supply pressure port M5 PS port 3 2.5 1 1.5 7.5 7.5 4.5 2-Rc 1/2 EXH port 2-M5 PD port Air supply

VFR

1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 3-5-94 95 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR6000 Cylinder Speed Chart Use as a guide for selection.

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

Rotary Actuator

and 115 VAC, and between 220 VAC and 230 VAC.

Vacuum

Port srze M5 ( 10 32 nom.)

Vacuum

Port srze M5 ( 10 32 nom.)