VQC

Cylinder port size C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow Wtih 3.2 One-touch fitting Top ported elbow With 4 One-touch fitting Top ported elbow With 6 One-touch fitting M5 thread Bottom ported elbow With 3.2 One-touch fitting Bottom ported elbow With 4

Series VQ Base Mounted Metal Seal/Rubber Seal

2 sets of regulator unit 3 sets of regulator unit With vacuum ejector unit B D G1 G2 G3 J K N R S (2) Series VQ1000 1 (3) Kit Manifold (3) (3) Plug-in unit 1 (4) Stations (5) Special wiring specification (Not double wiring) With name plate External pilot Built-in silencer (Direct exhaust) Cylinder ports 01 1 station Symbol Port size Symbol Port size C3 C4 C6 M5 CM L3 L4 (6) L6 L5 B3 B4

VQC

Bottom ported elbow With 4 One-touch fitting B4 Bottom ported elbow With 6 One-touch fitting B6 r SI unit COM t Input block (Fill out for I/O unit only) B5 LM M5 thread Elbow port, mixed sizes EX500 EX250 DeviceNet SI unit COM Nil DeviceNet Nil Without SI unit/input block (SD0) Without input block With 1 input block PROFIBUS-DP PROFIBUS-DP Remote I/O 0 1 +COM COM N Note 1) Indicate

ZP

M6 x 1 A6 Mounting M8 x 1 A8 U C Flat Flat with ribs M4 x 0.7 B4 M5 x 0.8 B5 D Deep M6 x 1 B6 B Bellows UT Thin flat CT Thin flat with ribs M8 x 1.25 B8 Material N S NBR Silicon rubber Table (1) Pad Diameter/Pad Type Dia.

Serial Transmission System Series EX250 Series EX500

(Fill out for I/O unit only) L5 B3 Nil PNP (+) or without SI unit/input block (SD0) NPN () N B4 Input block type (Fill out for I/O unit only) B6 B5 LM Nil Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3-pin) 1 2 3 Ports 2, 4 size (inch) Ports 2, 4 Symbol N1 N3 N7 NM Ports 1, 3, 5 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting Mixed Top ported elbow 1

5 Port Solenoid Valve, Series VQC

Bottom ported elbow With 4 One-touch fitting B4 Bottom ported elbow With 6 One-touch fitting B6 r SI unit COM t Input block (Fill out for I/O unit only) B5 LM M5 thread Elbow port, mixed sizes EX500 EX250 DeviceNet SI unit COM Nil Without SI unit/input block (SD0) Without input block With 1 input block Nil DeviceNet PROFIBUS-DP PROFIBUS-DP Remote I/O 0 1 +COM COM N Note 1) Indicate

0.4

(Except double wiring) With name plate External pilot Direct EXH outlet with built-in silencer C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow with 3.2 One-touch fitting Top ported elbow with 4 One-touch fitting Top ported elbow with 6 One-touch fitting M5 thread

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Pad Type Lislf} Vacuum Entry"Mounling SmIxj TlTeEif ~~zeJ n .s ."0-"16 'DiiltiMi) j 04 4 Tube 06 6 Tube ~I 08 B Tube ~20 ':" 32 140-5Il : I 4 h 2 4 6 8 10 13 16 20 25 32 40 50 Ast type T Rat with rib DNptype Bellows type M5 x Q.8 '1\6' M6 x 1 2' U A8 Ma XI I ~1 B4 M4 x 0.7 B5 M5 x O .8 J~ 86 M6 X' , ,'. , Bjj M8xl.25 AS j!

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 4 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: B4 (ø4 One-touch Fitting), Downward Elbow

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: B4 (ø4 One-touch Fitting), Downward Elbow

Model: Side Ported, Connector Type: D-sub Connector, 25 Pins, Connector Entry Direction: Upward, Valve Stations: 4 Stations, P, E Port Location: U Side, SUP/EXH Block: Internal Pilot/Built-in Silencer, A, B Port Size: ø4 One-touch Fitting, Mounting: -, DIN Rail Option: -

Model: Side Ported, Connector Type: D-sub Connector, 25 Pins, Connector Entry Direction: Upward, Valve Stations: 10 Stations, P, E Port Location: D Side, SUP/EXH Block: Internal Pilot, A, B Port Size: ø4 One-touch Fitting, Mounting: -, DIN Rail Option: -

JXCx-OMU0004

ALARM OFF [7] ALARM OFFRESET OFF STOP ON OFF OFF [8] IN013 ON 11 2 OUT0 ON OFF [9] BUSY ON [10] BUSY ONIN013 OFF bit_0 OFF ON OUT1 bit_1 [11] BUSY OFFOUT0 13 ON OUT2 ON OFF bit_2 [12] OUT013 ONIN13 ON10 OUT3 ON OFF bit_3 [13] BUSY ON OUT0 1 OFF ON BUSY 3 OFF [14] BUSY ONIN13 OFF OFF ON ALARM [15] BUSY OFFOUT1 3 ON 0 49 No.JXC-OMU0004-A 10. 10.1 LEF LEF LEFB LEFS 16,25,32 16A 16B

Programless controller Step motor (servo 24 VDC)

LEFB LEFS 16, 25, 32 common 16A 16B 25H 25A 25B Direction Motor side Return to origin Speed [mm/s] 60 30 Acceleration[mm/s2] 1000 Speed [mm/s] 48 10 5 20 12 6 Jog Acceleration[mm/s2] 1000 Inching Distance [mm] 5 1 LEFS 32H 32A 32B 40H 40A 40B Direction Motor side Return to origin Speed [mm/s] 30 Acceleration[mm/s2] 1000 Speed [mm/s] 24 16 8 30 20 10 Jog Acceleration[mm/s2] 1000 Inching Distance

10-my3m-e

MY3M16 MY3M25 MY3M40 MY3M63 Qty. 1 9 Seal belt MY3B16-16AStroke MY3B25-16A-Stroke MY3B40-16AStroke MY3B63-16AStroke Polyamide Dust seal band 10 MY3B16-16BStroke MY3B25-16BStroke MY3B40-16B-Stroke MY3B63-16BStroke 1 Stainless steel 15 Tubing gasket RMB-16 RMB-25 RMB-40 RMB-63 2 NBR 16 Piston seal RMY-16 RMY-25 RMY-40 RMY-63 2 NBR KA00020 KA00048 KA00156 KA00036 O-ring 28 4 NBR (6.2 x 3 x 1.6

Mechanically Jointed Rodless Cylinder/Cam Follower Guide Type Series MY1C

A: Black zinc chromated MY-16B-stroke, B: Nickel plated MY-16BW-stroke 98

2

4.3 2.6 0.1 4 KQ2C-04A 8.3 5.2 2.6 0.1 6 KQ2C-06A 10.3 7.2 2.6 0.1 8 KQ2C-08A 12.8 9.2 2.6 0.1 10 KQ2C-10A 15.2 11.2 2.7 0.1 12 KQ2C-12A 17.6 13.2 2.7 0.1 16 KQ2C-16A 22.4 17.2 3.2 0.2 2 KQ2C-02A 6.1 3.2 2.6 0.1 3.2 KQ2C-23A 7.3 4.3 2.6 0.1 4 KQ2C-04A 8.3 5.2 2.6 0.1 6 KQ2C-06A 10.3 7.2 2.6 0.1 8 KQ2C-08B 13.6 9.2 2.6 0.1 10 KQ2C-10B 16.2 11.2 2.7 0.1 12 KQ2C-12B 18.8 13.2 2.7 0.2 16 KQ2C-16B

One-touch Fittings

[mm] Model D1 D2 L Weight [g] 8 KQ2C-08B 13.6 9.2 2.6 0.1 10 KQ2C-10B 16.2 11.2 2.7 0.1 12 KQ2C-12B 18.8 13.2 2.7 0.2 16 KQ2C-16B 24.2 17.2 3.2 0.3 : B (Black), R (Red), YR (Orange), BR (Brown), Y (Y ellow), G (Green), CB (Sky blue), GR (Gray), W (White), BU (Blue) : B (Black), R (Red), YR (Orange), BR (Brown), Y (Y ellow), G (Green), CB (Sky blue), GR (Gray), W (White), BU (Blue) Inch Size

Mechanically Jointed Rodless Cylinder/Slide Bearing Guide Type

A: Black zinc chromated MY -16B-stroke, B: Nickel plated MY-16BW-stroke 97

Mechanically Jointed Rodless Cylinder/Linear Guide Type

A: Black zinc chromated MY-16B-stroke, B: Nickel plated MY-16BW-stroke 100 Mechanically Jointed Rodless Cylinder/Linear Guide Type Construction Series MY1H Replacement Procedure is 16, 20, 25 32, 40 P.310 With End Lock: 16 to 40 Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L.