Specifications: A (+COM), Connector Mounting Position: U Side, Valve Stations: 6 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot Type: None, A, B Port Size: N7 (1/4" One-touch Fitting)

Specifications: +COM, Connector Mounting Position: U Side, Valve Stations: 6 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot Type: None, A, B Port Size: ø6 One-touch Fitting

Specifications: +COM, Connector Mounting Position: U Side, Valve Stations: 6 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot Type: None, A, B Port Size: 1/4" One-touch Fitting

Lubrication Equipment

A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

ITV

Return 0.4 0.3 0.5 0.5 AV 0.2 0.1 0 2 6 4 8 1.0 0 25 50 75 1.0 AU 0.0 10 0 25 50 75 100 100 Input signal (%F.S.) Repetition Input signal (%F.S.)

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Possible to transfer a workpiece at low-speed.

Through) Effective depth FC AV AX AY BA BA DG AU (Max. approx.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

SF AV AU BB (Max. approx.

Rotary Table/

SF AV AU BB (Max. approx.

Rotary Actuator

[mm] 63 15 105 59 130 101 Size H U UU 50 39 114 150 63 45 136 177 80 55 165 215 100 60 190 250 Size H N U UU 50 30 15 105 125 63 33 17 124 146 80 43 20 153 178 100 44 25 174 204 80 18 130 76 160 119 100 18 150 92 180 133 DThe dimensions of shaft key and four chamfers are the same as the basic type.

VER2000/4000

6: VER4001 (Outer pilot) 14-9-21 6 Series VER2000/4000 Dimensions VER2000-: With sub-plate With flow control interface With B port regulator Hex. socket head cap screw M5 x 45 With SW (Max. 45) (Max. 45) (Cable: 6.8 to 9.6) Pressure gauge Interface regulator Flow control interface Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

plating) CuSn (Au plating) Phosphor bronze (Au plating) CuSn (Au plating) Connector material Soft PBT (UL94 V0) TPU (UL94 HB) Soft PBT (UL94 V0) TPU (UL94 HB) Material Material of sheath (Sheath color) PVC (Light gray) PUR (Black-Gray (RAL 7021 equiv.))

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

22.5 BE WF WF BD 2 x M5 x 0.8 Port (Plugged) Effective depth FB DD M5 x 0.8 depth 5 (Vacuum suction port) D BB DE 2 x P Port FA 2 x JC depth JD CA (UU) H 2 x JU HC 5.5 11.5 Q SE SD CB BC AW AY AX YB effective depth YC DF BA BA AU AA A SF AV DG (Max.

IR1000/2000/3000

-X465 0.1 to 1 Set pressure range (MPa) Desolution of setting and display (MPa) Power supply voltage Specifications AU 0.001 Class 10 With M5 fitting (Applicable tubing O.D. 6) Pressure switch Cleanliness Breather port 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With reverse connection protection) 45 mA or less (but 70 mA or less at current output) AF IR1000/2000: With M5 fitting (Applicable

Specifications: A (+COM), Connector Mounting Position: U Side, Valve Stations: 4 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot Type: None, A, B Port Size: N3 (5/32" One-touch Fitting)

Specifications: +COM, Connector Mounting Position: U Side, Valve Stations: 4 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot Type: None, A, B Port Size: 5/32" One-touch Fitting

2

(C) Correction factor 1.21 1.10 1 0.87 0.76 0.74 0.72 0.70 IDG 5 to 30 35 40 45 50 55 60 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 45 50 55 60 65 70 75 80 5 to 45 50 55 60 65 70 75 80 Data B: Ambient Temperature Note) Series IDF IDF1E to 75E Series IDU IDU3E to IDU37E IDU55E, 75E IDF100F to 150F IDF190D to 240D Ambient temp.

Cylinder with Lock

AB AH AO AT AU E R2 TG 0.2 TR Screw size R2 TG/2 32 L5032 7 32 10 4.5 24 48 15 32.5 32 M6 x 16L 40 L5040 10 36 11 4.5 28 55 17.5 38 36 M6 x 16L 50 L5050 10 45 12 5.5 32 68 20 46.5 45 M8 x 20L 63 L5063 10 50 12 5.5 32 80 22.5 56.5 50 M8 x 20L 80 L5080 12 63 14 6.5 41 100 22.5 72 63 M10 x 20L 100 L5100 14.5 71 16 6.5 41 120 27.5 89 75 M10 x 20L AH AT AB E TR AU AO * Supplied with 4 mounting

Table of Contents

Note) D1: Max. diameter 45 Male Elbow: KRK D A M Effective area (mm 2) Weight (g) H (width across flats) Applicable tubing O.D.

IC

Converts digital input signal into analog output signal AV Controller AU Power supply Power is supplied to the controller alone.