Vacuum Unit How to Order Manifold w q e r t ZZK2 A A 1 L 04 If the manifold parts (set of end plates for both ends and tension bolts) are shipped unassembled, please refer to page 33. q Stations e Exhaust w System/Port For adequate performance, the number of stations that can be operated simultaneously depends on the nozzle diameter. Refer to the Max.
0 o q o !0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.
-23) for details. 356 KPQ/KPG Series Clean One-touch Fittings How to Order KP H 06 KP P 08 Q 01 KQ2 Applicable fitting size Clean One-touch fittings Made to Order KQB2 04 06 08 10 12 4 6 8 10 12 Specifications X53 With pipe tape Grease-free Symbol Q G KS KX Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel 304 Rubber material: EPDM (Fluorine-coated) X193
20 20 stations Applicable individual exhaust spacer assembly SYJ5000-17-1A Applicable interface regulator assembly ARBYJ5000-00-P R port Rc(PT) 1 8 A, B port M5 X 0.8 M5 M5 X 0.8 A, B port side How to Order 41 Type (5 Port/Base mounted) SS5YJ5-41-05 --M5 Stations 2 stations 02 : R port Rc(PT) : 1 8 20 stations 20 A, B port M5 X 0.8 M5 M5 X 0.8 A, B port side P port Rc(PT) 1 8 Applicable solenoid
06 FH440-08 FH440-10 FH440-12 FH640-03 FH640-04 FH640-06 FH640-08 FH640-10 FH640-12 3/8 3/8 10 10 FH441-04 FH441-06 FH441-08 FH441-10 FH441-12 FH441-16 FH441-20 FH441-24 FH641-04 FH641-06 FH641-08 FH641-10 FH641-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4 1 1/4 120 120 40
Cable 6 to 12 Model Grommet Electrical entry Bracket Conduit Conduit terminal DIN terminal R Q 59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66
) Additional dimensions by stroke(mm) K P Q: 6 Q: 8 K P 5.1 Stroke H I K P Q: 6 Q: 8 K P 5.1 Stroke H I 20 +10 3.6 0 20 30 +10 3.6 1 +1 +20 + 4.9 6.4 0 30 50 1 +1 +20 4.9 6.4 +25 +40 +49.9 51.4 50 +25 +40 49.9 51.4 9 Lateral Vacuum Entry Series ZPR Without Buffer/Female Thread How to Order ZPR 10 F GS 06 B5 Pad diameter (mm) Mounting thread diameter/female thread (Refer to Table 1 for applications
fitting for purge air discharge (Option: P) IDG3/5 IDG3H/5H IDG10/20 IDG10H/20H Option specifications With fitting for purge air discharge (Option: P) i t t Plug } IN OUT OUT IN q o q Plug y Purge air for dehumidification u Plug u Purge r Purge Purge air for dehumidification Component Parts Material Description No.
1 3.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 1 15.5 1 34 1 35.5 13 35 32 Additional Dimensions by Stroke Additional Dimensions by Stroke (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 H I H I Stroke Stroke K P K P 5.1 K P K P 5.1 20 20 +10 5.6 +10 5.6 0 0 30 30 1 +1 +20 +4.9 +4.4 1 +1 +4.9 +4.4 +20 50 50 +25 +40 +49.9 +49.4 +25 +40 +49.9 +49.4 717 Vacuum Pad: Ball Joint Type Lateral Vacuum Entry Without Buffer
36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q: 8 K P 5.1 K P Q: 6 Q: 8 K P 5.1 Stroke H I Stroke H I 20 20 3.6 3.6 +10 +10 0 0 30 30 +1 1 +1 1 +6.4 +6.4 +20 +4.9 +20 +4.9 50 50 +25 +25 +51.4 +51.4 +40 +49.9 +40 + 9.9 13-11-110 15 Vacuum Pad: Ball Joint Type Lateral Vacuum Entry Without Buffer/Female Thread Series ZPR
Q) ~ 0.3 1 '"' l' Q. Q) Q. Cautions on Use o ~ ~ 0 0.2 I:". When the primary pressure has been released, the residual pressure (secondary pressure) cannot be removed. If removal of residual pressure is needed, please contact SMC. ---... 0.1 O.l SiHI---t-t---t--t--t--+--t,., . 7 . r" " 1 I':.
VFA5000 Symbol Up to 10 stations for VV5FA5-20, and up to 15 stations for VV5FA5-21. 30 20 21 The A and B ports are made on the top.
03 04 SUP blocking plate VVQ5000-16A-1 P R1 EXH blocking plate VVQ5000-16A-2 R2 Rc3/8 03 Rc1/2 04 Bottom ported Rc1/2 04 Description/Model Stations 1 2 3 4 5 6 7 8 9 10 11 12 Notes Applicable valves and options Part No.
85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate (l/min (ANR)) 14-5-20 20 Series IRV1000/2000/3000 Made to Order Specifications: Please contact SMC regarding detailed dimensions, specifications, and delivery times. 1.
1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.
(up to 24 solenoids possible) 20 20 20 stations 20 stations Connector mounting position Mounting position Symbol D PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) D Side Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations ... ... ... ...
Q 2 x O Oval type Round type 4, 6 8 to 16 2 x N M Q L1 L2 Q D D 1: D is maximum diameter.
Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9
A B D +0.058 0 +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 +0.3 +0.1 AD-EI-20 AD-EI-25 AD-EI-32 AD-CHN-40 -0.016 -0.034 -0.016 -0.034 -0.016 -0.034 -0.016 -0.034 Y-02 Y-03 Y-04C YHN-04 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 16 9 9 16 16 36 38 55 55 16 18 22 22 9 9 12 15 20 25 32 40 12 12 13 13 20 20 24 24 14 14 25 25 18 18 38 38 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 3.2 x 16l
Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type